公开(公告)号：WO2006012509A2

公开(公告)日：2006-02-02

申请号：PCT/US2005/026029

申请日：2005-07-22

Applicant: AFA CONTROLS, LLC ,  TEACH, William O. ,  GIBSON, Paul W. ,  DOUGLAS, Kevin R. ,  HARRIS, Donald C. ,  GOODWIN, Scott H. ,  DAUSCH, David E. ,  DETTLOFF, Wayne D.

Inventor： TEACH, William O. ,  GIBSON, Paul W. ,  DOUGLAS, Kevin R. ,  HARRIS, Donald C. ,  GOODWIN, Scott H. ,  DAUSCH, David E. ,  DETTLOFF, Wayne D.

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G05D7/0694 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/7761 ,  Y10T137/86558 ,  Y10T137/87169 ,  Y10T137/87217 ,  Y10T137/87225

Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

Abstract translation: 阀组件可以包括主壳体和第一和第二静电致动阀。 主壳体可以限定至少三个室，其中第一室被配置为联接到高压供应端口，第二室被配置为联接到输出端口，第三室被配置为联接到低压排气 港口。 第一静电致动阀可以设置在第一和第二室之间，并且第一电动致动阀可以响应于第一电信号而允许或基本上阻挡第一室和第二室之间的流体连通。 第二电动致动阀可以设置在第二和第三室之间，并且第二电动致动阀可以响应于第二电信号而允许或基本上阻挡第二室和第三室之间的流体连通。 还讨论了相关方法。

公开(公告)号：WO2005104717A3

公开(公告)日：2006-04-27

申请号：PCT/US2005014104

申请日：2005-04-25

Applicant: DAUSCH DAVID E ,  GOODWIN SCOTT H

Inventor： DAUSCH DAVID E ,  GOODWIN SCOTT H

IPC: F16K99/00 ,  G02B26/08 ,  H01H59/00 ,  G02F1/03 ,  G02B26/00 ,  G02F1/01 ,  H01G5/01 ,  H01H57/00 ,  H01L29/84 ,  H05F3/00

CPC classification number: H01H59/0009 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B26/0841 ,  H01G5/16 ,  H01H2059/0081

Abstract: An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode (40) electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. A stiffening member (310) can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice (420,320) extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane.

Abstract translation: 一种静电致动器，其具有包括第一电极（20）的基部（10），并且具有柔性膜（50），该柔性膜包括彼此接触的不同材料的至少两个材料层。 至少一个材料层包括与第一电极电隔离的第二电极（40）。 柔性膜包括固定端，柔性膜连接到基部和与固定端相对的自由端。 在柔性膜中，第二电极具有至少第一和第二部分，第一和第二部分由第三部分组合，限定了设置在固定端附近的台阶。 第一步最靠近固定端并与第二电极分开距离第一电极较短的距离。 加强构件（310）可以朝向柔性膜的自由端设置在柔性膜上。 静电致动器可以包括延伸穿过底座并沿着远离固定端的方向延伸的细长孔（420,320）。 基部的第一电极可以沿着朝向固定端限定的方向延伸超过柔性膜的第二电极的端部。 柔性膜可以包括构造成连通到柔性膜的内部的周边或侧面切口。

公开(公告)号：WO2006012509A3

公开(公告)日：2006-04-06

申请号：PCT/US2005026029

申请日：2005-07-22

Applicant: AFA CONTROLS LLC ,  TEACH WILLIAM O ,  GIBSON PAUL W ,  DOUGLAS KEVIN R ,  HARRIS DONALD C ,  GOODWIN SCOTT H ,  DAUSCH DAVID E ,  DETTLOFF WAYNE D

Inventor： TEACH WILLIAM O ,  GIBSON PAUL W ,  DOUGLAS KEVIN R ,  HARRIS DONALD C ,  GOODWIN SCOTT H ,  DAUSCH DAVID E ,  DETTLOFF WAYNE D

IPC: F16J3/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G05D7/0694 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/7761 ,  Y10T137/86558 ,  Y10T137/87169 ,  Y10T137/87217 ,  Y10T137/87225

Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

Abstract translation: 阀组件可以包括主壳体以及第一和第二静电致动阀。 主壳体可限定至少三个腔室，其中第一腔室配置为连接至高压供应端口，第二腔室配置为连接至输出端口，第三腔室配置为连接至低压排气口 港口。 第一静电致动阀可以设置在第一和第二腔室之间，并且第一静电致动阀可以响应于第一电信号而允许或基本上阻断第一腔室和第二腔室之间的流体连通。 第二静电致动阀可以设置在第二和第三腔室之间，并且第二静电致动阀可以响应于第二电信号而允许或基本上阻塞第二腔室和第三腔室之间的流体连通。 还讨论了相关的方法。

公开(公告)号：WO2005104717A2

公开(公告)日：2005-11-10

申请号：PCT/US2005/014104

申请日：2005-04-25

Applicant: DAUSCH, David, E. ,  GOODWIN, Scott, H.

Inventor： DAUSCH, David, E. ,  GOODWIN, Scott, H.

IPC: F16K99/00 ,  G02B26/08 ,  H01H59/00

CPC classification number: H01H59/0009 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B26/0841 ,  H01G5/16 ,  H01H2059/0081

Abstract: An electrostatic actuator having a base including a first electrode, and having a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. As a part of the flexible membrane, a stiffening member can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane. Laterally extending connectors can connect the base and the fixed end of the flexible membrane along a part of the base not otherwise connected to the flexible membrane.

Abstract translation: 一种静电致动器，具有包括第一电极的基底，并且具有包括彼此接触的不同材料的至少两个材料层的柔性膜。 材料层中的至少一个包括与第一电极电隔离的第二电极。 柔性膜包括固定端，柔性膜连接到基部和与固定端相对的自由端。 在柔性膜中，第二电极具有至少第一和第二部分，第一和第二部分由第三部分组合，限定了设置在固定端附近的台阶。 第一步最靠近固定端并与第二电极分开距离第一电极较短的距离。 作为柔性膜的一部分，加强构件可以朝向柔性膜的自由端设置在柔性膜上。 静电致动器可以包括延伸穿过基部并沿着远离固定端的方向延伸的细长孔。 基部的第一电极可以沿着朝向固定端限定的方向延伸超过柔性膜的第二电极的端部。 柔性膜可以包括构造成连通到柔性膜的内部的周边或侧面切口。 横向延伸的连接器可以将柔性膜的基部和固定端沿基座的一部分连接，而不是连接到柔性膜。

公开(公告)号：WO2004107014A1

公开(公告)日：2004-12-09

申请号：PCT/US2004/016318

申请日：2004-05-25

Applicant: MCNC RESEARCH & DEVELOPMENT INSTITUTE ,  DAUSCH, David, E.

Inventor： DAUSCH, David, E.

IPC: G02B26/04

CPC classification number: B81B3/0035 ,  G02B26/04 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866

Abstract: The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for.

Abstract translation: 本发明提供一种具有微加工静电斩波器/快门装置的改进的电磁辐射检测器。 MEMS柔性薄膜斩波器/快门装置为相关的电磁辐射探测器提供可靠性，效率，降噪和温度波动补偿能力。 具有静电斩波器/快门装置的电磁辐射检测器包括检测器材料元件和覆盖检测器材料层并可相对于其移动的柔性膜致动器。 柔性薄膜致动器通常将包括电极元件和偏置元件，使得致动器在静电电压下保持完全卷曲的打开状态，并且在施加静电电压时移动到完全未弯曲的闭合状态。 另外提供了并入有多个电磁辐射检测器和/或静电遮蔽装置的阵列。