公开(公告)号：WO2015181222A1

公开(公告)日：2015-12-03

申请号：PCT/EP2015/061683

申请日：2015-05-27

Applicant: FUNDACIÓ INSTITUT DE CIÈNCIES FOTÒNIQUES ,  INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS

Inventor： DONNER, Jon ,  MARTY, Renaud ,  QUIDANT, Romain

IPC: G02B7/02 ,  G02B3/00 ,  G02B26/08 ,  G02B3/14 ,  G02B26/00

CPC classification number: G02B3/0081 ,  G02B3/14 ,  G02B7/028 ,  G02B26/004 ,  G02B26/0866 ,  G02B27/0068 ,  G02F1/0147

Abstract: The present disclosure relates to a thermally modulated optical lens apparatus that includes an electrically resistive element that has patterned features. The patterned features may be micro-sized or smaller and may create an electrical resistance density across the electrically resistive element. The electrically resistive element is capable of electrically connecting to a controllable electrical source. The apparatus also includes at least one thermo-optical material in thermal contact with the patterned features of the electrically resistive element. The at least one thermo-optical material can have an optical refractive index profile that corresponds to the electrical resistance density.

Abstract translation: 本发明涉及一种热调制光学透镜装置，其包括具有图案特征的电阻元件。 图案化特征可以是微小尺寸或更小，并且可以在电阻元件两端产生电阻密度。 电阻元件能够电连接到可控电源。 该装置还包括与电阻元件的图案化特征热接触的至少一个热光材料。 所述至少一种热光材料可以具有对应于电阻密度的光学折射率分布。

公开(公告)号：WO2010099027A1

公开(公告)日：2010-09-02

申请号：PCT/US2010/024621

申请日：2010-02-18

Applicant: Capella Photonics, Inc. ,  Ostrom, Robert

Inventor： Ostrom, Robert

IPC: C23F1/00

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/058 ,  B81B2207/096 ,  B81C1/00095 ,  G02B26/0866 ,  Y10T29/49002

Abstract: A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.

Abstract translation: 公开了MEMS器件和制造方法。 具有夹在上层和下层之间的绝缘层的底部基板可以结合到器件层。 可以选择性地去除上层的一个或多个部分以形成一个或多个器件腔。 导电通孔可以在位于一个或多个器件空腔下方并且与下层电隔离的位置处通过下层形成。 设备可以从设备层形成。 每个设备覆盖相应的设备腔。 每个设备可以通过由设备层形成的一个或多个相应铰链连接到设备层的其余部分。 一个或多个电触头可以形成在下层的背面上。 每个触点电连接到相应的导电通孔。

公开(公告)号：WO0237621A3

公开(公告)日：2002-09-06

申请号：PCT/US0145341

申请日：2001-10-30

Applicant: SANTUR CORP

Inventor： PEZESHKI BARDIA ,  HEANUE JOHN ,  VAIL EDWARD

IPC: G02B6/32 ,  G02B6/42 ,  G02B26/00 ,  G02B26/08 ,  H01S5/00 ,  H01S5/022 ,  H01S5/12 ,  H01S5/22 ,  H01S5/40 ,  H04J14/00

CPC classification number: H01S5/4031 ,  G02B6/32 ,  G02B6/4225 ,  G02B6/4234 ,  G02B6/4249 ,  G02B26/00 ,  G02B26/0816 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H01S5/005 ,  H01S5/02284 ,  H01S5/1215 ,  H01S5/4087

Abstract: An optical transmission apparatus comprising an array of lasers (5), an optical output (15) and an array of mirrors (23).

Abstract translation: 一种包括激光器阵列（5），光学输出（15）和反射镜阵列（23）的光学传输设备。

公开(公告)号：WO2002061487A2

公开(公告)日：2002-08-08

申请号：PCT/US2001/018782

申请日：2001-06-08

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： HAMERLY, Mike, E. ,  SMITH, Robert, G. ,  THEISS, Silva, K. ,  WEAVER, Billy, L.

IPC: G02B26/02

CPC classification number: G02B6/3564 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3576 ,  G02B6/358 ,  G02B26/0866

Abstract: A MEMS-based device to steer and manipulate beams of light traveling in free-space in an optical switch. The optical switch is based on a rotating vertical micro-mirror constructed on a surface of a substrate. At least one input optical fiber is arranged to direct at least one optical signal through free-space along a first optical path parallel to the surface of the substrate. A plurality of output optical fibers are arranged to receive the optical signal traveling through free-space along other optical paths not co-linear with the first optical path. At least one substantially vertical, rotating micro-mirror assembly is constructed on the substrate. The assembly includes a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear. The rotating micro-mirror is rotatable between a first position not in the first optical path and at least a second position redirecting the optical signal to one of the output optical fibers.

Abstract translation: 一种用于控制和操纵在光学开关中在自由空间中行进的光束的基于MEMS的装置。 光学开关基于构造在基板的表面上的旋转垂直微反射镜。 至少一个输入光纤布置成沿着平行于衬底的表面的第一光路引导至少一个光信号通过自由空间。 多个输出光纤布置成接收沿着与第一光路不共线的其它光路传播自由空间的光信号。 至少一个基本上垂直的，旋转的微反射镜组件被构造在衬底上。 组件包括旋转的微反射镜，其垂直中心线和旋转轴线都垂直于表面而不是共线的。 旋转微镜可在不在第一光路中的第一位置和至少第二位置之间旋转，该第二位置将光信号重定向到输出光纤之一。

公开(公告)号：WO02050874A2

公开(公告)日：2002-06-27

申请号：PCT/US2001/049427

申请日：2001-12-19

IPC: B81B3/00 ,  B81B7/00 ,  B81B7/04 ,  B81C1/00 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  H01L

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: MEMS device (300) having an actuator (302, 306) with curved electrodes (308, 310). According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate (304) having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam (312, 314) attached to the actuating device and having an end attached to the substrate (304). The electrode beam is flexible (322, 324) between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode (308, 310) attached to the substrate. The electrode (308, 310) has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam (312, 314) moves in a curved fashion corresponding substantially to the curved surface of the electrode.

Abstract translation: MEMS器件（300）具有带有弯曲电极（308,310）的致动器（302,306）。 根据本发明的一个实施例，提供了用于使致动装置线性移动的致动器。 致动器包括具有平坦表面的基板（304）和可相对于基板沿线性方向移动的致动装置。 致动器包括附接到致动装置的至少一个电极梁（312,314），并且具有连接到基板（304）的一端。 电极束在致动装置和连接到基底的电极束的端部之间是柔性的（322,324）。 此外，致动器包括附接到基板的至少一个电极（308,310）。 电极（308,310）具有在与电极束的长度相邻的位置对准的弯曲表面，由此当电极束（312,314）以基本相当的弯曲方式移动时，致动装置可在其基本上线性的方向上移动 到电极的弯曲表面。

公开(公告)号：WO0237162A2

公开(公告)日：2002-05-10

申请号：PCT/US0142510

申请日：2001-10-04

Applicant: 3M INNOVATIVE PROPERTIES CO

Inventor： WEAVER BILLY L ,  HAMERLY MIKE E ,  SMITH ROBERT G

IPC: B81B3/00 ,  G02B26/08

CPC classification number: G02B26/0866

Abstract: A micro-mechanical device including a gimbaled micro-mirror positionable by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.

Abstract translation: 微机械装置包括由一个或多个热致动器定位的万向微型镜。 热致动器未连接到微镜。 相反，微镜由一个或多个万向架保持在基底上。 微米尺寸的热致动器能够重复并且快速地将微镜移到平面外以准确地并且重复地引导光束。

公开(公告)号：WO02037069A1

公开(公告)日：2002-05-10

申请号：PCT/US2001/045343

申请日：2001-10-30

IPC: G02B6/32 ,  G02B6/42 ,  G02B17/08 ,  G02B26/08 ,  H01S5/00 ,  H01S5/022 ,  H01S5/12 ,  H01S5/40 ,  H04B10/12 ,  H04B10/13 ,  H04B10/135 ,  H04B10/14 ,  G01J4/00

CPC classification number: G02B26/0816 ,  G02B6/32 ,  G02B6/4225 ,  G02B6/4234 ,  G02B6/4249 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H01S5/005 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/1215 ,  H01S5/4031 ,  H01S5/4087

Abstract: One or more single mode waveguide devices are fiber coupled such that signals to an optical element affect the coupling of the waveguide device to an optical fiber (15). A number of systems and methods are disclosed to adjust the coupling of the waveguide device to the optical fiber. These include dithering the tunable optical element (25) at different frequencies along differing axes and using a lock-in technique to derive an error signal for each degree of motion, using a beamsplitter (121) to form a secondary image of the focused beam on a position-sensitive detector (23), the use of a chisled fiber to generate reflections from the angled facets, using an additional laser for a secondary image, or obtaining a secondary image from an angled fiber or a parasitic reflection.

Abstract translation: 一个或多个单模波导器件被光纤耦合，使得到光学元件的信号影响波导器件与光纤（15）的耦合。 公开了许多系统和方法来调节波导装置与光纤的耦合。 这些包括使可调光学元件（25）以不同的轴在不同频率上抖动，并且使用锁定技术来使用分束器（121）来导出针对每个运动程度的误差信号，以形成聚焦光束的次级图像 位置敏感检测器（23），使用凿裂光纤从成角度的小平面产生反射，使用用于辅助图像的附加激光，或从成角度光纤或寄生反射获得次级图像。

公开(公告)号：WO0173936A3

公开(公告)日：2002-04-18

申请号：PCT/US0109554

申请日：2001-03-23

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers (702, 712) are substantially interdigitated according to a predetermined engagement. A rotating element (700) may be attached to a rotatable flexure (711) disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimballed structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical services, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.

Abstract translation: 描述了包括使用梳齿的致动器和位置传感器的旋转装置。 提供由单层制造的梳齿驱动器的一个设计，使得在标称状态下，两组梳指（702,712）根据预定的接合基本上是交错的。 旋转元件（700）可以附接到沿着轴线设置的可旋转的弯曲部（711），并且与附接到旋转元件的偏置元件一起耦合到梳齿，以使梳齿与旋转元件一起受到控制 来自初始接合的角位移和响应于来自感测可移动或旋转元件的位置的反馈（780）。 可以在梳齿之间施加电压，使得旋转元件以预定的方式围绕轴进行进一步的旋转。 或者，可以在旋转元件上施加时变偏压力，使得第一梳指与旋转元件一起以预定方式围绕轴进一步旋转。 梳齿装置可用作旋转执行器和位置传感器。 通过将两个这样的梳齿机布置在结构结构中，可以构造双轴旋转致动器和位置传感器。 本发明的梳状驱动装置可以用于广泛的应用，包括生物医学服务，用于跟踪和显示的光学装置，诸如光纤开关，惯性传感器和磁盘驱动器之类的电信设备。

公开(公告)号：WO01073937A2

公开(公告)日：2001-10-04

申请号：PCT/US2001/009611

申请日：2001-03-22

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/00

CPC classification number: G02B6/357 ,  G02B6/3518 ,  G02B6/3556 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动执行器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳状驱动执行器来独立控制。 第一组垂直梳齿驱动致动器定位在万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的上部和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：WO01071409A2

公开(公告)日：2001-09-27

申请号：PCT/US2001/009456

申请日：2001-03-23

IPC: B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/10 ,  H02N1/00 ,  G02B26/00

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A beam steering module and switching system. The steering module is composed of an NxM array of single axis mirrors able to rotate about a particular axis (X-axis), a second NxM array of single axis mirrors able to rotate about an axis orthogonal to that of the first NxM array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。