公开(公告)号：WO2012119018A1

公开(公告)日：2012-09-07

申请号：PCT/US2012/027361

申请日：2012-03-02

Applicant: RESEARCH TRIANGLE INSTITUTE, INTERNATIONAL ,  GOODWIN, Scott, H. ,  BAHNER, Mark

Inventor： GOODWIN, Scott, H. ,  BAHNER, Mark

IPC: F03D9/02

CPC classification number: F03B13/06 ,  F03D9/17 ,  F03D9/255 ,  F03D9/28 ,  F05D2260/42 ,  F15B1/024 ,  F15B1/045 ,  F15B1/106 ,  H02K7/18 ,  Y02E10/22 ,  Y02E10/72 ,  Y02E60/15 ,  Y02E60/17 ,  Y02P80/158

Abstract: An energy management system includes an energy storage reservoir (100) and a fluid pump (412). The energy storage reservoir (100) includes a fluid reservoir (104) configured to contain varying quantities of a fluid and to isolate the fluid from the ambient environment. The fluid reservoir (104) has a top surface (112), a bottom surface (116), a flexible member (124), and at least one opening (128) for filling or for emptying the fluid reservoir (104). A pressing mass (108) of solid material is positioned above the fluid reservoir (104) with a weight sufficient to press the fluid reservoir (104) and empty the fluid reservoir (104) of the fluid when the fluid reservoir opening (128) is open. The pressing mass (108) is supported by the fluid reservoir (104) when the fluid reservoir (104) contains fluid and the fluid reservoir (104) is closed. The flexible member (124) is disposed around the fluid reservoir (104) to seal the fluid and to facilitate vertical motion of the pressing mass (108) as the fluid reservoir (104) is filled and emptied. The fluid pump (412) is configured supply fluid to the fluid reservoir (104) via the at least one opening (128).

Abstract translation: 能量管理系统包括能量储存容器（100）和流体泵（412）。 能量储存器（100）包括被配置为容纳不同数量的流体并将流体与周围环境隔离的流体储存器（104）。 流体储存器（104）具有顶表面（112），底表面（116），柔性构件（124）和用于填充或排空流体储存器（104）的至少一个开口（128）。 当流体储存器开口（128）是（或）流体储存器开口（128）是固体材料时，固体材料的按压块（108）被定位在流体储存器（104）的上方，其重量足以按压流体储存器（104）并且清空流体的流体储存器 打开。 当流体储存器（104）包含流体并且流体储存器（104）关闭时，压力块（108）由流体储存器（104）支撑。 当流体储存器（104）被填充和排空时，柔性构件（124）围绕流体储存器（104）设置以密封流体并且促进挤压块（108）的垂直运动。 流体泵（412）被配置成经由至少一个开口（128）向流体储存器（104）供应流体。

公开(公告)号：WO2012075106A1

公开(公告)日：2012-06-07

申请号：PCT/US2011/062577

申请日：2011-11-30

Applicant: RESEARCH TRIANGLE INSTITUTE ,  DAUSCH, David ,  GOODWIN, Scott H.

Inventor： DAUSCH, David ,  GOODWIN, Scott H.

IPC: B06B1/06 ,  G10K11/00 ,  H01L41/04

CPC classification number: H01L41/0474 ,  B06B1/0607 ,  G10K11/004 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/293 ,  H01L41/332

Abstract: A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

Abstract translation: 提供一种用于形成压电超声波换能器装置的方法，该装置具有沉积在设置在初级基底上的电介质层上的第一电极。 压电材料沉积在第一电极和第二电极之间，以形成换能器装置。 至少压电材料被图案化，使得第一电极的一部分从其横向向外延伸。 蚀刻初级衬底和电介质层以形成延伸到第一电极的横向向外部分的第一通孔，并且沉积第一导电材料以基本上填充第一通孔，并与横向向外部分形成导电接合 的第一电极。 蚀刻初级衬底以限定穿过其延伸的第二通孔，其中第二通孔与第一通路横向间隔开。 还提供了相关联的方法和装置。

公开(公告)号：WO2011139602A2

公开(公告)日：2011-11-10

申请号：PCT/US2011/033579

申请日：2011-04-22

Applicant: RESEARCH TRIANGLE INSTITUTE ,  DAUSCH, David ,  CARLSON, Jim ,  SANDERS, Christopher Brewer ,  GOODWIN, Scott H.

Inventor： DAUSCH, David ,  CARLSON, Jim ,  SANDERS, Christopher Brewer ,  GOODWIN, Scott H.

CPC classification number: A61B8/4494 ,  A61B8/4444 ,  B06B1/0622 ,  G10K11/002 ,  H01L41/0475 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/332 ,  Y10T29/42

Abstract: A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.

Abstract translation: 提供了一种针对限定空气背腔的压电微加工超声换能器（pMUT）的方法和相关装置。 由器件衬底和相关联的电介质层限定并延伸到第一电极的第一通孔基本上被第一导电材料填充。 与器件衬底接合的支撑构件限定延伸到第一导电材料的第二通孔。 第二通孔具有设置在其上的第二导电材料，与第一导电材料形成导电接合，并且延伸到第二通孔的外部，以便可以从支撑构件的外部进入。 连接元件延伸穿过由连接支撑基板限定的第三通孔，并且与第二导电材料导电接合，其中连接元件和连接支撑基板之一通过以下方式结合到支撑元件和第二导电材料中的一个上： 接合材料之间的接合材料。

公开(公告)号：WO2011139602A3

公开(公告)日：2012-01-26

申请号：PCT/US2011033579

申请日：2011-04-22

Applicant: RES TRIANGLE INST ,  DAUSCH DAVID ,  CARLSON JIM ,  SANDERS CHRISTOPHER BREWER ,  GOODWIN SCOTT H

Inventor： DAUSCH DAVID ,  CARLSON JIM ,  SANDERS CHRISTOPHER BREWER ,  GOODWIN SCOTT H

IPC: B06B1/06 ,  G10K11/00 ,  H01L41/047

CPC classification number: A61B8/4494 ,  A61B8/4444 ,  B06B1/0622 ,  G10K11/002 ,  H01L41/0475 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/332 ,  Y10T29/42

Abstract: A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.

Abstract translation: 提供了一种针对限定空气背腔的压电微加工超声换能器（pMUT）的方法和相关装置。 由器件衬底和相关联的电介质层限定并延伸到第一电极的第一通孔基本上被第一导电材料填充。 与器件衬底接合的支撑构件限定延伸到第一导电材料的第二通孔。 第二通孔具有设置在其上的第二导电材料，与第一导电材料形成导电接合，并且延伸到第二通孔的外部，以便可以从支撑构件的外部进入。 连接元件延伸穿过由连接支撑基板限定的第三通孔，并且与第二导电材料导电接合，其中连接元件和连接支撑基板之一通过以下方式结合到支撑元件和第二导电材料中的一个上： 接合材料之间的接合材料。

公开(公告)号：WO2005104717A3

公开(公告)日：2006-04-27

申请号：PCT/US2005014104

申请日：2005-04-25

Applicant: DAUSCH DAVID E ,  GOODWIN SCOTT H

Inventor： DAUSCH DAVID E ,  GOODWIN SCOTT H

IPC: F16K99/00 ,  G02B26/08 ,  H01H59/00 ,  G02F1/03 ,  G02B26/00 ,  G02F1/01 ,  H01G5/01 ,  H01H57/00 ,  H01L29/84 ,  H05F3/00

CPC classification number: H01H59/0009 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B26/0841 ,  H01G5/16 ,  H01H2059/0081

Abstract: An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode (40) electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. A stiffening member (310) can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice (420,320) extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane.

Abstract translation: 一种静电致动器，其具有包括第一电极（20）的基部（10），并且具有柔性膜（50），该柔性膜包括彼此接触的不同材料的至少两个材料层。 至少一个材料层包括与第一电极电隔离的第二电极（40）。 柔性膜包括固定端，柔性膜连接到基部和与固定端相对的自由端。 在柔性膜中，第二电极具有至少第一和第二部分，第一和第二部分由第三部分组合，限定了设置在固定端附近的台阶。 第一步最靠近固定端并与第二电极分开距离第一电极较短的距离。 加强构件（310）可以朝向柔性膜的自由端设置在柔性膜上。 静电致动器可以包括延伸穿过底座并沿着远离固定端的方向延伸的细长孔（420,320）。 基部的第一电极可以沿着朝向固定端限定的方向延伸超过柔性膜的第二电极的端部。 柔性膜可以包括构造成连通到柔性膜的内部的周边或侧面切口。

公开(公告)号：WO2006012509A3

公开(公告)日：2006-04-06

申请号：PCT/US2005026029

申请日：2005-07-22

Applicant: AFA CONTROLS LLC ,  TEACH WILLIAM O ,  GIBSON PAUL W ,  DOUGLAS KEVIN R ,  HARRIS DONALD C ,  GOODWIN SCOTT H ,  DAUSCH DAVID E ,  DETTLOFF WAYNE D

Inventor： TEACH WILLIAM O ,  GIBSON PAUL W ,  DOUGLAS KEVIN R ,  HARRIS DONALD C ,  GOODWIN SCOTT H ,  DAUSCH DAVID E ,  DETTLOFF WAYNE D

IPC: F16J3/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G05D7/0694 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/7761 ,  Y10T137/86558 ,  Y10T137/87169 ,  Y10T137/87217 ,  Y10T137/87225

Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

Abstract translation: 阀组件可以包括主壳体以及第一和第二静电致动阀。 主壳体可限定至少三个腔室，其中第一腔室配置为连接至高压供应端口，第二腔室配置为连接至输出端口，第三腔室配置为连接至低压排气口 港口。 第一静电致动阀可以设置在第一和第二腔室之间，并且第一静电致动阀可以响应于第一电信号而允许或基本上阻断第一腔室和第二腔室之间的流体连通。 第二静电致动阀可以设置在第二和第三腔室之间，并且第二静电致动阀可以响应于第二电信号而允许或基本上阻塞第二腔室和第三腔室之间的流体连通。 还讨论了相关的方法。

公开(公告)号：WO2005104717A2

公开(公告)日：2005-11-10

申请号：PCT/US2005/014104

申请日：2005-04-25

Applicant: DAUSCH, David, E. ,  GOODWIN, Scott, H.

Inventor： DAUSCH, David, E. ,  GOODWIN, Scott, H.

IPC: F16K99/00 ,  G02B26/08 ,  H01H59/00

CPC classification number: H01H59/0009 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B26/0841 ,  H01G5/16 ,  H01H2059/0081

Abstract: An electrostatic actuator having a base including a first electrode, and having a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. As a part of the flexible membrane, a stiffening member can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane. Laterally extending connectors can connect the base and the fixed end of the flexible membrane along a part of the base not otherwise connected to the flexible membrane.

Abstract translation: 一种静电致动器，具有包括第一电极的基底，并且具有包括彼此接触的不同材料的至少两个材料层的柔性膜。 材料层中的至少一个包括与第一电极电隔离的第二电极。 柔性膜包括固定端，柔性膜连接到基部和与固定端相对的自由端。 在柔性膜中，第二电极具有至少第一和第二部分，第一和第二部分由第三部分组合，限定了设置在固定端附近的台阶。 第一步最靠近固定端并与第二电极分开距离第一电极较短的距离。 作为柔性膜的一部分，加强构件可以朝向柔性膜的自由端设置在柔性膜上。 静电致动器可以包括延伸穿过基部并沿着远离固定端的方向延伸的细长孔。 基部的第一电极可以沿着朝向固定端限定的方向延伸超过柔性膜的第二电极的端部。 柔性膜可以包括构造成连通到柔性膜的内部的周边或侧面切口。 横向延伸的连接器可以将柔性膜的基部和固定端沿基座的一部分连接，而不是连接到柔性膜。

公开(公告)号：WO2012075106A9

公开(公告)日：2014-01-09

申请号：PCT/US2011062577

申请日：2011-11-30

Applicant: RES TRIANGLE INST ,  DAUSCH DAVID ,  GOODWIN SCOTT H

Inventor： DAUSCH DAVID ,  GOODWIN SCOTT H

IPC: B06B1/06 ,  G10K11/00 ,  H01L41/04

CPC classification number: H01L41/0474 ,  B06B1/0607 ,  G10K11/004 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/293 ,  H01L41/332

Abstract: A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

Abstract translation: 提供一种用于形成压电超声换能器装置的方法，该装置具有沉积在设置在初级基底上的电介质层上的第一电极。 压电材料沉积在第一电极和第二电极之间，以形成换能器装置。 至少压电材料被图案化，使得第一电极的一部分从其横向向外延伸。 蚀刻初级衬底和电介质层以形成延伸到第一电极的横向向外部分的第一通孔，并且沉积第一导电材料以基本上填充第一通孔并与横向向外部分形成导电接合 的第一电极。 蚀刻初级衬底以限定延伸穿过其中的第二通孔，其中第二通孔与第一通路横向间隔开。 还提供了相关联的方法和装置。

公开(公告)号：WO2006012509A2

公开(公告)日：2006-02-02

申请号：PCT/US2005/026029

申请日：2005-07-22

Applicant: AFA CONTROLS, LLC ,  TEACH, William O. ,  GIBSON, Paul W. ,  DOUGLAS, Kevin R. ,  HARRIS, Donald C. ,  GOODWIN, Scott H. ,  DAUSCH, David E. ,  DETTLOFF, Wayne D.

Inventor： TEACH, William O. ,  GIBSON, Paul W. ,  DOUGLAS, Kevin R. ,  HARRIS, Donald C. ,  GOODWIN, Scott H. ,  DAUSCH, David E. ,  DETTLOFF, Wayne D.

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  G05D7/0694 ,  Y10T137/0491 ,  Y10T137/0497 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/7761 ,  Y10T137/86558 ,  Y10T137/87169 ,  Y10T137/87217 ,  Y10T137/87225

Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

Abstract translation: 阀组件可以包括主壳体和第一和第二静电致动阀。 主壳体可以限定至少三个室，其中第一室被配置为联接到高压供应端口，第二室被配置为联接到输出端口，第三室被配置为联接到低压排气 港口。 第一静电致动阀可以设置在第一和第二室之间，并且第一电动致动阀可以响应于第一电信号而允许或基本上阻挡第一室和第二室之间的流体连通。 第二电动致动阀可以设置在第二和第三室之间，并且第二电动致动阀可以响应于第二电信号而允许或基本上阻挡第二室和第三室之间的流体连通。 还讨论了相关方法。