公开(公告)号：WO1997033114A1

公开(公告)日：1997-09-12

申请号：PCT/US1997003183

申请日：1997-03-07

申请人： CONTROL SYSTEMS, INC. ,  BARR, Thomas, Aloysius ,  BARR, Christopher, Velton ,  ELLIOTT, James, Charles ,  FREW, Dirk, Alan

发明人： CONTROL SYSTEMS, INC.

IPC分类号： F16L03/00

CPC分类号： C23C16/4409 ,  C23C16/44 ,  F17C13/04 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2205/0341 ,  F17C2205/0385 ,  F17C2221/011 ,  F17C2221/014 ,  F17C2223/0123 ,  F17C2270/0518 ,  Y10T137/598 ,  Y10T137/87885 ,  Y10T137/87917

摘要： A mounting system (10), for supporting semiconductor process gas delivery and control components (26, 28, 30, 32) for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components (26, 28, 30, 32) to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components (26, 28, 30, 32) are mounted on individual upper clamp members (36) which are secured to lower clamp members (38) to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member (12) for subsequent longitudinal positioning and joining of adjacent fittings (25).

摘要翻译： 用于支撑用于组装和用作气棒的半导体工艺气体输送和控制部件（26,28,30,32）的安装系统（10）将相邻部件（26,28,30）上的配件之间的连接接头密封 ，32）以吸收由制造公差产生的累积应力并减少密封泄漏的可能性。 组件（26,28,30,32）安装在固定到下部夹紧构件（38）上的各个上部夹紧构件（36）上，以形成围绕刚性细长支撑构件（12）的可滑动但不可旋转的径向对准的轭 用于随后的相邻配件（25）的纵向定位和接合。