公开(公告)号：WO2012058678A3

公开(公告)日：2012-05-03

申请号：PCT/US2011/058622

申请日：2011-10-31

Applicant: ENTEGRIS, INC. ,  GALLAGHER, Gary ,  BURNS, John ,  SMITH, Mark, V. ,  ROSENFELD, Paul ,  OLSON, Eric, S. ,  RASCHKE, Russ, V.

Inventor： GALLAGHER, Gary ,  BURNS, John ,  SMITH, Mark, V. ,  ROSENFELD, Paul ,  OLSON, Eric, S. ,  RASCHKE, Russ, V.

IPC: B65D85/86 ,  B65D81/113 ,  B65D77/04 ,  H01L21/673

Abstract: A substrate shipping container suitable for shipping solar cells, substrate wafers, or other suitable media. In some embodiments, the readily constructed container is made up of two identical container portions, each container portion having a horizontally-disposed base member and two adjacent vertically-disposed side members constructed of impact- absorbing double walls. The two container portions are shaped to be coupled using integrally formed tabs and slots located about the perimeter of the container portions. The horizontally-disposed base member of each container portion is equipped with a matrix of integrally formed pads. These pads serve as cushions to provide shock absorption in the vertical (i.e. "z") direction to substrates that are stacked between these members. Embodiments may further be comprised of molded pulp or bulrush fibers.

公开(公告)号：WO1997013710A1

公开(公告)日：1997-04-17

申请号：PCT/US1995012516

申请日：1995-10-13

Applicant: EMPAK, INC. ,  GREGERSON, Barry ,  WISEMAN, Brian ,  GALLAGHER, Gary

Inventor： EMPAK, INC.

IPC: B65D85/48

CPC classification number: H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

Abstract: A container for creating a microenvironment is disclosed. The container includes a shell (10), a door (90) and a plurality of supports (60) having a unique design which are used to securely retain items, such as silicon wafers (80), in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures (44-46) are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

Abstract translation: 公开了一种用于创建微环境的容器。 容器包括外壳（10），门（90）和具有独特设计的多个支撑件（60），其用于以间隔开的平行关系可靠地保持诸如硅晶片（80）的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供了运动耦合结构（44-46）用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：WO1997013709A1

公开(公告)日：1997-04-17

申请号：PCT/US1995012515

申请日：1995-10-13

Applicant: EMPAK, INC. ,  PETERSON, Kelly ,  WISEMAN, Brian ,  GALLAGHER, Gary ,  GREGERSON, Barry

Inventor： EMPAK, INC.

IPC: B65D85/48

CPC classification number: H01L21/67326 ,  G11B33/0444

Abstract: A cassette (10) for storing a plurality of items in a parallel registration is disclosed. The cassette is specifically designed to be lightweight and is reinforced (50, 52, 54) to prevent warpage, bending, flexing or breaking of the cassette. Means (66, 68, 70) for indexing the cassette to a surface for precise insertion and removal of items are also described.

Abstract translation: 公开了一种用于以并行配准存储多个物品的盒（10）。 盒式录像带专门设计为轻便，并加强（50,52,54），以防止卡带的翘曲，弯曲，弯曲或断裂。 还描述了用于将盒索引到表面以用于物品的精确插入和移除的装置（66,68,70）。

公开(公告)号：WO2017139494A1

公开(公告)日：2017-08-17

申请号：PCT/US2017/017234

申请日：2017-02-09

Applicant: ENTEGRIS, INC. ,  JOHNSON, Michael, L. ,  GALLAGHER, Gary, M. ,  GREGERSON, Barry

Inventor： JOHNSON, Michael, L. ,  GALLAGHER, Gary, M. ,  GREGERSON, Barry

IPC: H01L21/673

CPC classification number: H01L21/67386 ,  H01L21/67346 ,  H01L21/67369 ,  H01L21/67373

Abstract: A substrate container (100) includes a receptacle (105) and a cover (110). The receptacle (105) includes a base portion (115) for supporting a substrate and a side wall portion (120) extending upward from the base portion (115). The cover (110) defines a closure over the receptacle (105). In one embodiment, the receptacle (105) includes a first alignment feature (300, 305) located on an exterior surface of the receptacle (105). The first alignment feature (300, 305) interfaces with automation for aligning the receptacle (105). In another embodiment, the cover (110) includes a contoured surface (135) for applying a compressive load to the contents of the substrate container (100).

Abstract translation: 衬底容器（100）包括容器（105）和盖子（110）。 容器（105）包括用于支撑基板的基部（115）和从基部（115）向上延伸的侧壁部（120）。 盖（110）在容器（105）上限定封盖。 在一个实施例中，容器（105）包括位于容器（105）的外表面上的第一对准特征（300,305）。 第一对准特征（300,305）与自动化接口以对准插座（105）。 在另一个实施例中，盖（110）包括用于向基底容器（100）的内容物施加压缩载荷的波状表面（135）。

公开(公告)号：WO2012058678A2

公开(公告)日：2012-05-03

申请号：PCT/US2011058622

申请日：2011-10-31

Applicant: ENTEGRIS INC ,  GALLAGHER GARY ,  BURNS JOHN ,  SMITH MARK V ,  ROSENFELD PAUL ,  OLSON ERIC S ,  RASCHKE RUSS V

Inventor： GALLAGHER GARY ,  BURNS JOHN ,  SMITH MARK V ,  ROSENFELD PAUL ,  OLSON ERIC S ,  RASCHKE RUSS V

IPC: B65D85/86 ,  B65D77/04 ,  B65D81/113 ,  H01L21/673

CPC classification number: H01L21/67386 ,  H01L21/67363 ,  H01L21/67369

Abstract: A substrate shipping container suitable for shipping solar cells, substrate wafers, or other suitable media. In some embodiments, the readily constructed container is made up of two identical container portions, each container portion having a horizontally-disposed base member and two adjacent vertically-disposed side members constructed of impact- absorbing double walls. The two container portions are shaped to be coupled using integrally formed tabs and slots located about the perimeter of the container portions. The horizontally-disposed base member of each container portion is equipped with a matrix of integrally formed pads. These pads serve as cushions to provide shock absorption in the vertical (i.e. "z") direction to substrates that are stacked between these members. Embodiments may further be comprised of molded pulp or bulrush fibers.

Abstract translation: 适用于运送太阳能电池，衬底晶片或其他合适介质的衬底运输容器。 在一些实施例中，容易构造的容器由两个相同的容器部分组成，每个容器部分具有水平布置的基部构件和两个相邻的垂直设置的由冲击吸收双壁构成的侧部构件。 两个容器部分被成形为使用围绕容器部分的周边定位的整体形成的突片和槽来联接。 每个容器部分的水平设置的基部构件配备有整体形成的垫的矩阵。 这些衬垫用作衬垫，以便在垂直方向（即“z”）方向上对堆叠在这些部件之间的衬底提供减震。 实施例可以进一步由模制纸浆或隆起纤维组成。