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    SUBSTRATE SHIPPER
    1.
    发明申请
    SUBSTRATE SHIPPER 审中-公开
    基板运输

    公开(公告)号：WO2012058676A2

    公开(公告)日：2012-05-03

    申请号：PCT/US2011058615

    申请日：2011-10-31

    Applicant: ENTEGRIS INC ,  BURNS JOHN ,  SMITH MARK V ,  OLSON ERIC S ,  RASCHKE RUSS V

    Inventor： BURNS JOHN ,  SMITH MARK V ,  OLSON ERIC S ,  RASCHKE RUSS V

    IPC: B65D85/86 ,  B65D77/04 ,  B65D81/05 ,  H01L21/673

    CPC classification number: H01L21/67366 ,  H01L21/67386

    Abstract: A substrate shipping container suitable for shipping solar cells, substrate wafers, or other suitable media. In some embodiments, the readily constructed container is made up of two identical container portions, each container portion having a horizontally-disposed base member and two adjacent vertically-disposed side members constructed of impact- absorbing double walls. The two container portions are shaped to be coupled using integrally formed tabs and slots located about the perimeter of the container portions. The horizontally-disposed base member of each container portion is equipped with a plurality of integrally formed pads. These pads serve as cushions to provide shock absorption in the vertical direction to substrates that are stacked between these members. Embodiments may further be comprised of molded polymers or pulp.

    Abstract translation: 适用于运送太阳能电池，衬底晶片或其他合适介质的衬底运输容器。 在一些实施例中，容易构造的容器由两个相同的容器部分组成，每个容器部分具有水平布置的基部构件和由冲击吸收双壁构成的两个相邻的垂直设置的侧构件。 两个容器部分被成形为使用围绕容器部分的周边设置的整体形成的突片和狭槽来联接。 每个容器部分的水平布置的底座部件配备有多个整体形成的垫。 这些垫用作垫子，以在垂直方向上提供堆叠在这些构件之间的衬底的冲击吸收。 实施方案还可以由模制的聚合物或纸浆组成。

    WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS
    2.
    发明申请
    WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
    带有管状环境控制组件的集水器

    公开(公告)号：WO2009114798A3

    公开(公告)日：2009-12-23

    申请号：PCT/US2009037143

    申请日：2009-03-13

    Applicant: ENTEGRIS INC ,  WATSON JAMES A ,  BURNS JOHN ,  FORBES MARTIN L ,  FULLER MATTHEW A ,  SMITH MARK V

    Inventor： WATSON JAMES A ,  BURNS JOHN ,  FORBES MARTIN L ,  FULLER MATTHEW A ,  SMITH MARK V

    IPC: H01L21/673 ,  B65D81/18 ,  B65D85/38 ,  B65D85/86

    CPC classification number: H01L21/67393

    Abstract: A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

    Abstract translation: 晶片容器利用具有槽的刚性聚合物管状塔和其中的“吸气剂”，用于吸收和过滤晶片容器内的水分和蒸气。 塔优选在容器的底部使用吹扫索环，并且可以在其中具有止回阀以控制进入和离开容器的气体（包括空气）的流动方向并相对于塔。 塔与护环密封连接。 塔可以具有以细长的圆形方式卷绕的吸气剂介质片，其形成或成形为管，并且设置在塔内并且可以具有轴向延伸。 介质可以提供主动和/或无源过滤以及具有再充电能力。 用于300mm尺寸的晶片的前开口晶片容器通常在容器部分的内侧后部中的左侧和右侧的每一侧上具有一对凹部。 这些凹槽优选地用于细长塔，这种塔基本上从底部晶片位置延伸到顶部晶片位置。 在替代实施例中，吸气剂材料的管状形状暴露在前开口容器内，而不会吸收除了末端之外的吸气剂。 管状吸气剂形式优选地在离散位置处被支撑以最大程度地暴露于内部容器环境。 阻挡件可以选择性地封闭孔。 弹性帽可有助于管状部件固定在容器部分中。

    KINEMATIC COUPLING WITH TEXTURED CONTACT SURFACES
    3.
    发明申请
    KINEMATIC COUPLING WITH TEXTURED CONTACT SURFACES 审中-公开
    与纹理接触表面的运动耦合

    公开(公告)号：WO2007087284A3

    公开(公告)日：2007-11-22

    申请号：PCT/US2007001729

    申请日：2007-01-23

    Applicant: ENTEGRIS INC ,  BURNS JOHN ,  FORBES MARTIN L ,  FULLER MATTHEW A ,  KING JEFFREY J ,  SMITH MARK V

    Inventor： BURNS JOHN ,  FORBES MARTIN L ,  FULLER MATTHEW A ,  KING JEFFREY J ,  SMITH MARK V

    IPC: B65D85/00

    CPC classification number: H01L21/67379 ,  Y10S414/14

    Abstract: A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.

    Abstract translation: 用于衬底载体的衬底运动耦合或导向板，其在接触点处具有纹理或图案化的表面，以减少自动处理设备和运动耦合器之间产生的摩擦力。 纹理表面减少了处理设备和运动耦合器的接触部分之间的接触面积，由此减小了所产生的摩擦力。 通过减小摩擦力，基板载体更容易安置在处理设备的安装销上，从而避免在自动进入基板期间难以忍受的高度和角度偏差。 纹理包括但不限于滚花图案，沿接触部分横向延伸的脊和沿接触部分纵向延伸的脊。 纹理可以通过吹塑，注塑或包覆成型工艺或通过机加工或压印工艺形成。

    SUBSTRATE SHIPPER WITH LOCKING DEVICE
    5.
    发明申请
    SUBSTRATE SHIPPER WITH LOCKING DEVICE 审中-公开
    具有锁定装置的基板搬运器

    公开(公告)号：WO2012135863A3

    公开(公告)日：2012-12-27

    申请号：PCT/US2012031906

    申请日：2012-04-02

    Applicant: ENTEGRIS INC ,  SMITH MARK V ,  BURNS JOHN

    Inventor： SMITH MARK V ,  BURNS JOHN

    IPC: H01L21/673 ,  H01L21/02

    CPC classification number: H01L21/67373 ,  H01L21/67386

    Abstract: The invention is directed to a two piece shipping package such as a substrate shipping container that is used to ship solar cells or other substrate wafers and locking device for use therewith. One or more latching members having permanent and multi-use tab features are used to join the components of a readily constructed container. The container is generally made up of two identical container portions, each container portion having a horizontally-disposed base member and two vertically disposed side members constructed of impact-absorbing double walls. The locking device provides an integrated locking snap connector that holds two container portions together at opposing corners, the containers of which are generally shaped for being readily coupled with one another in reversed and inverted orientations.

    Abstract translation: 本发明涉及一种两件式运输包装，例如用于运输太阳能电池或其他衬底晶片的衬底运输容器以及与之一起使用的锁定装置。 一个或多个具有永久性和多用途突出特征的闩锁构件用于连接容易构造的容器的构件。 该容器通常由两个相同的容器部分组成，每个容器部分具有水平设置的基部构件和两个垂直设置的由冲击吸收双壁构成的侧部构件。 该锁定装置提供集成锁定卡扣连接器，该锁定卡扣连接器在相对的角落处将两个容器部分保持在一起，其容器通常成形为用于容易地以相反和倒置的方向彼此联接。

    WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS
    7.
    发明申请
    WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开

    公开(公告)号：WO2009114798A4

    公开(公告)日：2009-09-17

    申请号：PCT/US2009/037143

    申请日：2009-03-13

    Applicant: ENTEGRIS, INC. ,  WATSON, James, A. ,  BURNS, John ,  FORBES, Martin, L. ,  FULLER, Matthew, A. ,  SMITH, Mark, V.

    Inventor： WATSON, James, A. ,  BURNS, John ,  FORBES, Martin, L. ,  FULLER, Matthew, A. ,  SMITH, Mark, V.

    IPC: H01L21/673 ,  B65D85/38 ,  B65D85/86 ,  B65D81/18

    Abstract: A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

    WAFER CONTAINER AND DOOR WITH CAM LATCHING MECHANISM
    10.
    发明申请
    WAFER CONTAINER AND DOOR WITH CAM LATCHING MECHANISM 审中-公开
    晶圆容器和带凸轮锁紧机构的门

    公开(公告)号：WO2005055280A9

    公开(公告)日：2005-07-28

    申请号：PCT/US2004038453

    申请日：2004-11-16

    Applicant: ENTEGRIS INC ,  BURNS JOHN ,  FULLER MATTHEW A ,  KING JEFFERY J ,  FORBES MARTIN L ,  SMITH MARK V

    Inventor： BURNS JOHN ,  FULLER MATTHEW A ,  KING JEFFERY J ,  FORBES MARTIN L ,  SMITH MARK V

    IPC: E05C3/04 ,  H01L20060101 ,  H01L21/673 ,  H01L

    CPC classification number: H01L21/67353 ,  H01L21/67373 ,  Y10T292/1049

    Abstract: A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.

    Abstract translation: 用于保持单个晶片的容器包括具有锁定机构的门，该锁定机构具有凸轮，该凸轮具有从其横向延伸的一对相对的翼。 凸轮可选择性地在第一有利位置和第二有利位置之间移动，在第一有利位置中，这些翼完全位于门外壳内以使得门能够与门框接合和脱离，在第二偏好位置中，这些翼从门外壳横向向外延伸， 以便当门接合在门框中时接合门框中的闩锁凹槽。 当凸轮从第一有利位置旋转到第二有利位置时，凸轮翼可以包括在其上的倾斜部分，用于将门拉入更紧密地接合在门框内。 而且，锁定机构还可以包括弹簧，该弹簧设置成提供用于将锁定机构推向第一和第二有利位置中的每一个的偏置力，以及用于以受控方式在第一和第二锁定位置使凸轮减速的软停止减震弹簧 有利位置和吸收由于凸轮与门底盘上的固定止动件碰撞而产生的振动。

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