SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING
    1.
    发明申请
    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING 审中-公开
    SILICON OPTICAL BENCH OCT探针用于医学成像

    公开(公告)号:WO2011091408A2

    公开(公告)日:2011-07-28

    申请号:PCT/US2011022375

    申请日:2011-01-25

    Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

    Abstract translation: 用于在体内发射和/或接收光的光学探头包括传输和/或接收光学信号的光纤,包括纵向延伸的光纤凹槽的硅光学平台,所述光纤凹槽保持光纤的光纤终端和反射器 表面,其将光纤终端的端面光学耦合到光具座的侧面。 纤维凹槽使用硅各向异性蚀刻技术制造。 一些示例在光学平台周围使用利用LIGA或其他电铸技术制造的外壳。 还描述了用于形成透镜结构的方法,其包括在复合晶圆材料(例如SOI(绝缘体上硅)晶圆)的第一层中形成折射透镜并且沿光学方向形成穿过复合晶圆材料背侧的光学端口 折射透镜的轴。

    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING
    2.
    发明申请
    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING 审中-公开
    硅光学OCT OCT医学成像探针

    公开(公告)号:WO2011091408A3

    公开(公告)日:2011-11-17

    申请号:PCT/US2011022375

    申请日:2011-01-25

    Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

    Abstract translation: 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤端接和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。

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