公开(公告)号：WO2011091408A3

公开(公告)日：2011-11-17

申请号：PCT/US2011022375

申请日：2011-01-25

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  GETZ JAMES W ,  ATIA WALID A ,  WHITNEY PETER S ,  KUZNETSOV MARK E ,  COOK CHRISTOPHER C

Inventor： FLANDERS DALE C ,  GETZ JAMES W ,  ATIA WALID A ,  WHITNEY PETER S ,  KUZNETSOV MARK E ,  COOK CHRISTOPHER C

IPC: A61B5/00 ,  B29D11/00 ,  G02B6/42

CPC classification number: A61B5/6852 ,  A61B5/0066 ,  A61B5/0084 ,  G02B6/322 ,  G02B6/3624 ,  G02B6/3652

Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

Abstract translation: 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤端接和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。

公开(公告)号：WO2011091408A4

公开(公告)日：2011-07-28

申请号：PCT/US2011/022375

申请日：2011-01-25

Applicant: AXSUN TECHNOLOGIES, INC. ,  FLANDERS, Dale C. ,  GETZ, James W. ,  ATIA, Walid A. ,  WHITNEY, Peter S. ,  KUZNETSOV, Mark E. ,  COOK, Christopher C.

Inventor： FLANDERS, Dale C. ,  GETZ, James W. ,  ATIA, Walid A. ,  WHITNEY, Peter S. ,  KUZNETSOV, Mark E. ,  COOK, Christopher C.

IPC: A61B5/00 ,  B29D11/00 ,  G02B6/42

Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

公开(公告)号：WO0233458A3

公开(公告)日：2003-08-14

申请号：PCT/US0132512

申请日：2001-10-17

Applicant: AXSUN TECH INC ,  MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

Inventor： MILLER MICHAEL F ,  LE MINH VAN ,  COOK CHRISTOPHER C ,  FLANDERS DALE C ,  NAGLE STEVEN F

IPC: B81B3/00 ,  G02B26/00 ,  G02B1/10

CPC classification number: B81B3/0083 ,  B81B2201/042 ,  B81B2201/047 ,  B81C1/0038 ,  B81C2201/0159 ,  B81C2201/053 ,  B81C2201/056 ,  G02B26/001

Abstract: A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress.

Abstract translation: 公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。 电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。 在一个实例中，使用掩模层作为保护层来蚀刻涂层。 在另一示例中，示出了剥离过程。 光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。

公开(公告)号：WO2011091408A2

公开(公告)日：2011-07-28

申请号：PCT/US2011022375

申请日：2011-01-25

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  GETZ JAMES W ,  ATIA WALID A ,  WHITNEY PETER S ,  KUZNETSOV MARK E ,  COOK CHRISTOPHER C

Inventor： FLANDERS DALE C ,  GETZ JAMES W ,  ATIA WALID A ,  WHITNEY PETER S ,  KUZNETSOV MARK E ,  COOK CHRISTOPHER C

IPC: A61B5/00 ,  B29D11/00 ,  G02B6/42

CPC classification number: A61B5/6852 ,  A61B5/0066 ,  A61B5/0084 ,  G02B6/322 ,  G02B6/3624 ,  G02B6/3652

Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

Abstract translation: 用于在体内发射和/或接收光的光学探头包括传输和/或接收光学信号的光纤，包括纵向延伸的光纤凹槽的硅光学平台，所述光纤凹槽保持光纤的光纤终端和反射器 表面，其将光纤终端的端面光学耦合到光具座的侧面。 纤维凹槽使用硅各向异性蚀刻技术制造。 一些示例在光学平台周围使用利用LIGA或其他电铸技术制造的外壳。 还描述了用于形成透镜结构的方法，其包括在复合晶圆材料（例如SOI（绝缘体上硅）晶圆）的第一层中形成折射透镜并且沿光学方向形成穿过复合晶圆材料背侧的光学端口 折射透镜的轴。

公开(公告)号：WO02073248A3

公开(公告)日：2003-04-10

申请号：PCT/US0202732

申请日：2002-01-30

Applicant: AXSUN TECH INC ,  COOK CHRISTOPHER C

Inventor： COOK CHRISTOPHER C

IPC: C23C14/22 ,  C23C14/54 ,  G02B1/10 ,  C23C14/00

CPC classification number: C23C14/22 ,  C23C14/546 ,  Y10T428/24942

Abstract: A thin membrane (24) having a thin film optical coating thereon is formed from multiple layers of different materials in which the overall stress of the thin film is not more than 15 MPa. Such films can be formed through thermal evaporation with ion assist, by directing an electron beam (14) on a source (16) and evaporating material from the source (16) onto a thin flexible membrane (24) while directing an ion stream (44) onto the membrane device (34). The current of the source of the ion stream should be sufficient to provide a thin film coating that has substantially no porosity. Successive applications at constant current can be deposited, while varying the voltage of the ion stream (44). The stress of the thin films deposited under each different voltage can be evaluated and the voltage at which the stress is acceptably low can be determined.

Abstract translation: 其上具有薄膜光学涂层的薄膜（24）由多层不同材料形成，其中薄膜的总应力不超过15MPa。 通过将电子束（14）引导到源（16）上并将材料从源（16）引导到薄柔性膜（24）上，同时引导离子流（44），可以通过热离子辅助形成薄膜 ）到膜装置（34）上。 离子流源的电流应足以提供基本上没有孔隙率的薄膜涂层。 可以在改变离子流（44）的电压的同时沉积恒定电流的连续应用。 可以评估在每个不同电压下沉积的薄膜的应力，并且可以确定应力可接受的低电压。

公开(公告)号：WO2002073248A2

公开(公告)日：2002-09-19

申请号：PCT/US2002/002732

申请日：2002-01-30

Applicant: AXSUN TECHNOLOGIES, INC. ,  COOK, Christopher, C.

Inventor： COOK, Christopher, C.

IPC: G02B1/10

CPC classification number: C23C14/22 ,  C23C14/546 ,  Y10T428/24942

Abstract: A thin membrane (24) having a thin film optical coating thereon is formed from multiple layers of different materials in which the overall stress of the thin film is not more than 15 MPa. Such films can be formed through thermal evaporation with ion assist, by directing an electron beam (14) on a source (16) and evaporating material from the source (16) onto a thin flexible membrane (24) while directing an ion stream (44) onto the membrane device (34). The current of the source of the ion stream should be sufficient to provide a thin film coating that has substantially no porosity. Successive applications at constant current can be deposited, while varying the voltage of the ion stream (44). The stress of the thin films deposited under each different voltage can be evaluated and the voltage at which the stress is acceptably low can be determined.

Abstract translation: 其上具有薄膜光学涂层的薄膜（24）由多层不同材料形成，其中薄膜的总应力不超过15MPa。 通过将电子束（14）引导到源（16）上并将材料从源（16）引导到薄柔性膜（24）上，同时引导离子流（44），可以通过热离子辅助形成薄膜 ）到膜装置（34）上。 离子流源的电流应足以提供基本上没有孔隙率的薄膜涂层。 可以在改变离子流（44）的电压的同时沉积恒定电流的连续应用。 可以评估在每个不同电压下沉积的薄膜的应力，并且可以确定应力可接受的低电压。

公开(公告)号：WO2005114152A1

公开(公告)日：2005-12-01

申请号：PCT/US2005/016888

申请日：2005-05-12

Applicant: AXSUN TECHNOLOGIES, INC. ,  WANG, Xiaomei ,  FLANDERS, Dale C. ,  KOTIDIS, Peter ,  COOK, Christopher C.

Inventor： WANG, Xiaomei ,  FLANDERS, Dale C. ,  KOTIDIS, Peter ,  COOK, Christopher C.

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01N21/6428 ,  G01N21/75 ,  G01N2021/656 ,  G06K19/14 ,  Y10T436/13

Abstract: To address counterfeit problems, for example, we propose a secure, flexible, and cost-effective authentication solution that can be integrated into conventional distribution logistic systems. The proposed solution for product authentication and distribution channel validation comprises three major components: 1) machine-readable Raman-active chemical taggant; 2) a taggant reader/eraser; and 3) erasable taggants. The proposed solution is to control and validate the distribution channel by authenticating the origin of products. Authentication is accomplished by verification of distinct taggants associated with the article, such as on its label, along with other product distribution information in optical, spatial-encoding indicia, such as a barcode. The taggant information is used to identify, validate, and distinguish the origin of the source of the articles, such as goods or products. The taggant material is thereafter rendered unreadable by modifying the taggants to make obtaining the encoded information unfeasible, thereby controlling the taggants' lifecycle.

Abstract translation: 例如，为了解决假冒问题，我们提出一种可以集成到传统分销物流系统中的安全，灵活，经济有效的认证解决方案。 提出的产品认证和分销渠道验证解决方案包括三个主要组成部分：1）机器可读拉曼活性化学品标签; 2）标签阅读器/橡皮擦; 和3）可擦除标签。 提出的解决方案是通过认证产品的来源来控制和验证分销渠道。 验证是通过与诸如条形码之类的光学，空间编码标记中的其他产品分发信息的验证与文章相关联的不同标签（例如其标签）来完成的。 标签信息用于识别，验证和区分物品的来源，例如货物或产品。 随后，通过修改标签，使得标签材料变得不可读，从而获得编码信息不可行，从而控制标签的生命周期。