公开(公告)号：WO2006031559A3

公开(公告)日：2006-07-06

申请号：PCT/US2005031832

申请日：2005-09-08

Applicant: AXCELIS TECH INC ,  AGARWAL ADITYA ,  RATHMELL ROBERT ,  HOGLUND DAVID

Inventor： AGARWAL ADITYA ,  RATHMELL ROBERT ,  HOGLUND DAVID

IPC: H01J37/317 ,  H01J37/304

CPC classification number: H01J37/304 ,  H01J37/3171 ,  H01J2237/30472

Abstract: An ion implanter(10) for creating a ribbon or ribbon-like beam by having a scanning device (30) that produces a side to side scanning of ions emitting by a source to provide a thin beam of ions moving into an implantation chamber(50). A workpiece support positions a workpiece within the implantation chamber and a drive (53) moves the workpiece support up and down through the thin ribbon beam of ions perpendicular to the plane of the ribbon to achieve controlled beam processing of the workpiece. A control includes a first control output coupled to said scanning device to limit an extent of side to side scanning of the ion beam to less than a maximum amount and thereby limit ion processing of the workpiece to a specified region of the workpiece and a second control output coupled to the drive simultaneously limits an extent of up and down movement of the workpiece to less than a maximum amount and to cause the ion beam to impact a controlled portion of the workpiece.

Abstract translation: 一种用于通过具有扫描装置（30）来产生色带或带状光束的离子注入机（10），所述扫描装置（30）产生由源发射的离子的侧面扫描以提供移动到注入室中的薄离子束（50 ）。 工件支撑件将工件定位在注入室内，并且驱动器（53）使工件支撑件上下移动穿过垂直于带平面的薄带离子束，以实现对工件的受控束加工。 控制器包括耦合到所述扫描装置的第一控制输出，以将离子束的侧向扫描的范围限制为小于最大量，从而限制工件到工件的指定区域的离子处理和第二控制 耦合到驱动器的输出同时将工件的上下移动范围限制为小于最大量并且使离子束冲击工件的受控部分。

公开(公告)号：WO2006031559A2

公开(公告)日：2006-03-23

申请号：PCT/US2005/031832

申请日：2005-09-08

Applicant: AXCELIS TECHNOLOGIES, INC. ,  AGARWAL, Aditya ,  RATHMELL, Robert ,  HOGLUND, David

Inventor： AGARWAL, Aditya ,  RATHMELL, Robert ,  HOGLUND, David

IPC: H01J37/317 ,  H01J37/304

CPC classification number: H01J37/304 ,  H01J37/3171 ,  H01J2237/30472

Abstract: An ion implanter for creating a ribbon or ribbon-like beam by having a scanning device that produces a side to side scanning of ions emitting by a source to provide a thin beam of ions moving into an implantation chamber. A workpiece support positions a workpiece within the implantation chamber and a drive moves the workpiece support up and down through the thin ribbon beam of ions perpendicular to the plane of the ribbon to achieve controlled beam processing of the workpiece. A control includes a first control output coupled to said scanning device to limit an extent of side to side scanning of the ion beam to less than a maximum amount and thereby limit ion processing of the workpiece to a specified region of the workpiece and a second control output coupled to the drive simultaneously limits an extent of up and down movement of the workpiece to less than a maximum amount and to cause the ion beam to impact a controlled portion of the workpiece.

Abstract translation: 一种离子注入机，用于通过具有扫描装置来产生色带或带状光束，该扫描装置产生由源发射的离子的侧面扫描以提供移动到注入室中的薄的离子束。 工件支撑件将工件定位在注入室内，并且驱动器通过垂直于带平面的离子的薄带离子将工件支撑件上下移动，以实现对工件的受控梁加工。 控制器包括耦合到所述扫描装置的第一控制输出，以将离子束的侧向扫描的范围限制为小于最大量，从而限制工件到工件的指定区域的离子处理和第二控制 耦合到驱动器的输出同时将工件的上下移动范围限制为小于最大量并且使离子束冲击工件的受控部分。