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公开(公告)号：WO2006036717A2
公开(公告)日：2006-04-06
申请号：PCT/US2005/033909
申请日：2005-09-20
申请人： CORNING INCORPORATED , DUNN, Thomas J , FARMIGA, Nestor O , KULAWIEC, Andrew W , MARRON, Joseph C
IPC分类号： H01S3/10
CPC分类号： H01S5/0687 , G01B9/02004 , G01B9/02057 , G01B9/02083 , G01B2290/60 , G01J9/02 , G01J2009/0292 , H01S5/0014 , H01S5/141 , H01S5/142
摘要： A mode-monitoring system used in connection with discrete beam frequency tunable laser provides optical feedback that can be used for adjusting the laser or for other processing associated with the use of the laser. For example, the output of a frequency tunable source for a frequency-shifting interferometer can be monitored to support the acquisition or processing of more accurate interference data. A first interferometer for taking desired measurements of optical path length differences traveled by different portions of a measuring beam can be linked to a second interferometer for taking measurements of the measuring beam itself. The additional interference data can be interpreted in accordance with the invention to provide measures of beam frequency and intensity.
摘要翻译： 与分立光束可调谐激光器相结合使用的模式监测系统提供可用于调整激光器或与使用激光器相关的其他处理的光学反馈。 例如，可以监视用于频移干涉仪的频率可调谐源的输出，以支持获取或处理更准确的干扰数据。 用于取得测量光束的不同部分所行进的光程长差的期望测量的第一干涉仪可以连接到用于测量测量光束本身的第二干涉仪。 可以根据本发明解释附加的干扰数据，以提供射束频率和强度的测量。
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公开(公告)号：WO2006071569A3
公开(公告)日：2007-02-08
申请号：PCT/US2005045617
申请日：2005-12-14
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02021 , G01B9/02027 , G01B9/02028 , G01B11/06 , G01B11/306 , G01B2290/45
摘要： Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of the test parts and the reference surface of a second of the two interferometers, and between the first and second reference surfaces. The latter measurement between the reference surfaces of the two interferometers enables the measurements of the opposite sides of the test parts to be related to each other.
摘要翻译： 两个共通干涉仪共用测量腔，用于测量不透明测试部件的相对侧面。 在测试部件的一侧和两个干涉仪中的第一个干涉仪的参考表面之间，在测试部件的另一侧和两个干涉仪中的第二个干涉仪的参考表面之间以及在第一和第二参考点之间形成干涉图案 表面。 在两个干涉仪的参考表面之间的后一测量使得测试部件的相对侧的测量彼此相关。
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公开(公告)号：WO2006036711A3
公开(公告)日：2007-07-26
申请号：PCT/US2005033884
申请日：2005-09-20
IPC分类号： A01N43/00 , A61K31/397
CPC分类号： G01B11/2441
摘要： Frequency-scanning interferometry is used for measuring test objects having multiple surface regions. The regions are distinguished and can be measured based on different measuring criteria. Interference data is gathered for the imageable portion of the test object from a plurality of interference patterns taken over substantially the same imageable portion at different measuring beam frequencies. The interference data is evaluated to determine topographical measures of associated points on the test object. The topographical measures are compared against a benchmark to distinguish between points on the test object that are within a first of the surface regions from points on a boundary separating the first surface region from one or more other surface regions of the imageable portion of the test object. The interference data of points within the first surface region are further evaluated to a higher accuracy.
摘要翻译： 频率扫描干涉测量用于测量具有多个表面区域的测试对象。 区域是区别的，可以根据不同的测量标准进行测量。 从不同测量光束频率的基本上相同的可成像部分上拍摄的多个干涉图案收集测试对象的可成像部分的干扰数据。 对干扰数据进行评估，以确定测试对象上相关点的拓扑测量。 将地形测量与基准进行比较，以将分离第一表面区域与测试对象的可成像部分的一个或多个其他表面区域的边界上的点之间区分在第一表面区域内的测试对象上的点 。 进一步对第一表面区域内的点的干涉数据进行更高精度的评估。
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公开(公告)号：WO2006071569A2
公开(公告)日：2006-07-06
申请号：PCT/US2005/045617
申请日：2005-12-14
申请人： CORNING INCORPORATED , KULAWIEC, Andrew W , TRONOLONE, Mark J , MARRON, Joseph C , DUNN, Thomas J
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02021 , G01B9/02027 , G01B9/02028 , G01B11/06 , G01B11/306 , G01B2290/45
摘要： Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of the test parts and the reference surface of a second of the two interferometers, and between the first and second reference surfaces. The latter measurement between the reference surfaces of the two interferometers enables the measurements of the opposite sides of the test parts to be related to each other.
摘要翻译： 两个共通干涉仪共用测量腔，用于测量不透明测试部件的相对侧面。 在测试部件的一侧和两个干涉仪中的第一个干涉仪的参考表面之间，在测试部件的另一侧和两个干涉仪中的第二个干涉仪的参考表面之间以及在第一和第二参考点之间形成干涉图案 表面。 在两个干涉仪的参考表面之间的后一测量使得测试部件的相对侧的测量彼此相关。
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公开(公告)号：WO2006036576A2
公开(公告)日：2006-04-06
申请号：PCT/US2005032989
申请日：2005-09-15
IPC分类号： H01S3/10
CPC分类号： H01S5/141 , H01S5/0687 , H01S5/142
摘要： A frequency tuning system for a laser includes mode-matched lasing and feedback cavities. A reflective facet of the feedback cavity is adjustable for retroreflecting different feedback frequencies to the lasing cavity without changing a fixed length of the feedback cavity. A selection among resonant frequencies of the feedback cavity provides for tuning the laser through discrete resonant frequencies of the lasing cavity.
摘要翻译： 用于激光器的频率调谐系统包括模式匹配激光和反馈腔。 反馈腔的反射面是可调的，用于向激光腔反射不同的反馈频率而不改变反馈腔的固定长度。 反馈腔的谐振频率中的选择提供了通过激光谐振腔的离散谐振频率来调谐激光器。
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公开(公告)号：WO2006036717A3
公开(公告)日：2007-01-25
申请号：PCT/US2005033909
申请日：2005-09-20
IPC分类号： H01S3/098
CPC分类号： H01S5/0687 , G01B9/02004 , G01B9/02057 , G01B9/02083 , G01B2290/60 , G01J9/02 , G01J2009/0292 , H01S5/0014 , H01S5/141 , H01S5/142
摘要： A mode-monitoring system used in connection with discrete beam frequency tunable laser provides optical feedback that can be used for adjusting the laser or for other processing associated with the use of the laser. For example, the output of a frequency tunable source for a frequency-shifting interferometer can be monitored to support the acquisition or processing of more accurate interference data. A first interferometer for taking desired measurements of optical path length differences traveled by different portions of a measuring beam can be linked to a second interferometer for taking measurements of the measuring beam itself. The additional interference data can be interpreted in accordance with the invention to provide measures of beam frequency and intensity.
摘要翻译： 与分立光束可调谐激光器相结合使用的模式监测系统提供可用于调整激光器或与使用激光器相关的其他处理的光学反馈。 例如，可以监视用于频移干涉仪的频率可调谐源的输出，以支持获取或处理更准确的干扰数据。 用于取得测量光束的不同部分所行进的光程长差的期望测量的第一干涉仪可以连接到用于测量测量光束本身的第二干涉仪。 可以根据本发明解释附加的干扰数据，以提供射束频率和强度的测量。
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公开(公告)号：WO2006036716A1
公开(公告)日：2006-04-06
申请号：PCT/US2005/033908
申请日：2005-09-20
申请人： CORNING INCORPORATED , KULAWIEC, Andrew W. , MARRON, Joseph C. , MCCLIMANS, Donald G. , TRONOLONE, Mark J.
IPC分类号： G01B9/02
CPC分类号： G01B9/02004 , G01B9/02002 , G01B9/02069 , G01B9/02079 , G01B2290/60
摘要： A frequency-shifting interferometer gathers intensity data from a set of interference patterns produced at different measuring beam frequencies. A periodic function is matched to the intensity data gathered from the set of interference patterns over a corresponding range of measuring beam frequencies. Localized correlations involving phase offsets between the interfering portions of the measuring beam are used to inform a determination of a rate of phase change with measuring beam frequency corresponding to the optical path length difference between the interfering beam portions.
摘要翻译： 频移干涉仪从在不同测量光束频率处产生的一组干涉图案中收集强度数据。 周期函数与在相应测量光束频率范围内从干涉图案集合收集的强度数据相匹配。 使用涉及测量光束的干涉部分之间的相位偏移的局部相关来通知与测量光束频率相对应的干涉光束部分之间的光程长度差的相位变化速率的确定。
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公开(公告)号：WO2006036711A2
公开(公告)日：2006-04-06
申请号：PCT/US2005/033884
申请日：2005-09-20
IPC分类号： G01B11/02
CPC分类号： G01B11/2441
摘要： Frequency-scanning interferometry is used for measuring test objects having multiple surface regions. The regions are distinguished and can be measured based on different measuring criteria. Interference data is gathered for the imageable portion of the test object from a plurality of interference patterns taken over substantially the same imageable portion at different measuring beam frequencies. The interference data is evaluated to determine topographical measures of associated points on the test object. The topographical measures are compared against a benchmark to distinguish between points on the test object that are within a first of the surface regions from points on a boundary separating the first surface region from one or more other surface regions of the imageable portion of the test object. The interference data of points within the first surface region are further evaluated to a higher accuracy.
摘要翻译： 频率扫描干涉测量用于测量具有多个表面区域的测试对象。 区域是区别的，可以根据不同的测量标准进行测量。 从不同测量光束频率的基本上相同的可成像部分上拍摄的多个干涉图案收集测试对象的可成像部分的干扰数据。 对干扰数据进行评估，以确定测试对象上相关点的拓扑测量。 将地形测量与基准进行比较，以将分离第一表面区域与测试对象的可成像部分的一个或多个其他表面区域的边界上的点之间区分在第一表面区域内的测试对象上的点 。 进一步对第一表面区域内的点的干涉数据进行更高精度的评估。
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公开(公告)号：WO2006036576A3
公开(公告)日：2006-04-06
申请号：PCT/US2005/032989
申请日：2005-09-15
申请人： CORNING INCORPORATED , DUNN, Thomas, J. , FARMIGA, Nestor, O. , KULAWIEC, Andrew, W. , MARRON, Joseph, C.
IPC分类号： H01S3/10
摘要： A frequency tuning system for a laser includes mode-matched lasing and feedback cavities. A reflective facet of the feedback cavity is adjustable for retroreflecting different feedback frequencies to the lasing cavity without changing a fixed length of the feedback cavity. A selection among resonant frequencies of the feedback cavity provides for tuning the laser through discrete resonant frequencies of the lasing cavity.
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公开(公告)号：WO1997005448A1
公开(公告)日：1997-02-13
申请号：PCT/US1996012145
申请日：1996-07-24
发明人： TROPEL CORPORATION
IPC分类号： G01B09/02
CPC分类号： G01B9/02022 , G01B9/02021 , G01B9/02039 , G01B11/2441
摘要： Compound diffractive optics are used in an interferometer for simultaneously measuring multiple surfaces, making multiple measurements of individual surfaces, conveying test beams multiple times, and aligning pairs of the diffractive optics with each other. Typically, the compound optics have multiple diffraction zones that reshape test beams for reflecting from test surfaces or for combining with reference beams. The multiple diffraction zones can also exhibit different optical qualities such as transmission and reflection for conveying the test beams to and from the test surfaces.
摘要翻译： 复合衍射光学器件用于干涉仪中，用于同时测量多个表面，对单个表面进行多次测量，多次传送测试光束，并将衍射光学器件对彼此对准。 通常，复合光学器件具有多个衍射区域，其重新形成用于从测试表面反射或用于与参考光束组合的测试光束。 多个衍射区域还可以表现出不同的光学质量，例如用于将测试光束传送到测试表面和从测试表面传输测试光束的透射和反射。
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