公开(公告)号：WO2007138424A3

公开(公告)日：2008-02-28

申请号：PCT/IB2007001359

申请日：2007-05-24

Applicant: UNIV ROMA ,  CONSIGLIO NAZIONALE RICERCHE ,  MARTINELLI EUGENIO ,  DE LUCA MASSIMILIANO ,  D AMICO ARNALDO ,  DI NATALE CORRADO ,  PAOLESSE ROBERTO ,  MACAGNANO ANTONELLA

Inventor： MARTINELLI EUGENIO ,  DE LUCA MASSIMILIANO ,  D AMICO ARNALDO ,  DI NATALE CORRADO ,  PAOLESSE ROBERTO ,  MACAGNANO ANTONELLA

IPC: B05B12/08 ,  B05B7/02 ,  B05B13/02 ,  B05B15/12 ,  G01B7/06

CPC classification number: B05B12/084 ,  B05B7/02 ,  B05B13/0228 ,  B05B15/1207 ,  G01B7/066

Abstract: An apparatus (1) for automatic deposition comprising a deposition chamber (2); an airbrush (8), part of which (9) is lodged inside the deposition chamber (2); a supporting structure (3) for a substrate (4) lodged inside the deposition chamber (2); a quartz resonator (6) lodged inside the deposition chamber (2) and placed inside the airbrush (8) spraying zone; reading devices (12, 13) able to read the quartz resonator (6) frequency; and a master control unit (14) connected both to the reading devices (12, 13) and to the airbrush (8), and able to receive settings about the amount of material to be deposited on the substrate (4). The master control unit is able to do progressively: - receive the frequency values of the quartz resonator from the reading devices (12, 13), - compare these values with a sequence of values related to the resonator (6) frequency corresponding to a specific amount of material deposited on the substrate (4), and - control the airbrush (8) as consequence of the comparison performed and the amount of substance chosen to be deposited on the substrate (4).

Abstract translation: 一种用于自动沉积的装置（1），包括沉积室（2）; 一个喷枪（8），其一部分（9）被放置在沉积室（2）内; 用于衬底（4）的支撑结构（3），所述衬底放置在所述沉积室（2）内; 沉积在沉积室（2）内并放置在喷枪（8）喷涂区内的石英谐振器（6）; 能够读取石英谐振器（6）频率的读取装置（12,13）; 以及连接到读取装置（12,13）和喷枪（8）的主控制单元（14），并且能够接收关于待沉积在基板（4）上的材料的量的设置。 主控制单元能够逐步进行： - 从读取装置（12,13）接收石英谐振器的频率值， - 将这些值与与谐振器（6）相对应的频率序列进行比较 沉积在基板（4）上的材料的量，以及 - 执行比较的结果控制喷枪（8）和选择沉积在基板（4）上的物质的量。

公开(公告)号：WO2007138424A2

公开(公告)日：2007-12-06

申请号：PCT/IB2007/001359

申请日：2007-05-24

Applicant: UNIVERSITA'DEGLI STUDI DI ROMA "TOR VERGATA" ,  CONSIGLIO NAZIONALE DELLE RICERCHE ,  MARTINELLI, Eugenio ,  DE LUCA, Massimiliano ,  D'AMICO, Arnaldo ,  DI NATALE, Corrado ,  PAOLESSE, Roberto ,  MACAGNANO, Antonella

Inventor： MARTINELLI, Eugenio ,  DE LUCA, Massimiliano ,  D'AMICO, Arnaldo ,  DI NATALE, Corrado ,  PAOLESSE, Roberto ,  MACAGNANO, Antonella

CPC classification number: B05B12/084 ,  B05B7/02 ,  B05B13/0228 ,  B05B16/20 ,  G01B7/066

Abstract: An apparatus (1) for automatic deposition comprising a deposition chamber (2); an airbrush (8), part of which (9) is lodged inside the deposition chamber (2); a supporting structure (3) for a substrate (4) lodged inside the deposition chamber (2); a quartz resonator (6) lodged inside the deposition chamber (2) and placed inside the airbrush (8) spraying zone; reading devices (12, 13) able to read the quartz resonator (6) frequency; and a master control unit (14) connected both to the reading devices (12, 13) and to the airbrush (8), and able to receive settings about the amount of material to be deposited on the substrate (4). The master control unit is able to do progressively: - receive the frequency values of the quartz resonator from the reading devices (12, 13), - compare these values with a sequence of values related to the resonator (6) frequency corresponding to a specific amount of material deposited on the substrate (4), and - control the airbrush (8) as consequence of the comparison performed and the amount of substance chosen to be deposited on the substrate (4).

Abstract translation: 一种用于自动沉积的装置（1），包括沉积室（2）; 喷枪（8），其中的一部分（9）被放置在沉积室（2）内; 用于衬底（4）的支撑结构（3），所述衬底放置在所述沉积室（2）内; 沉积在沉积室（2）内并置于喷枪（8）喷涂区内的石英谐振器（6）; 能够读取石英谐振器（6）频率的读取装置（12,13）; 以及连接到读取装置（12,13）和喷枪（8）的主控制单元（14），并且能够接收关于要沉积在基板（4）上的材料的量的设置。 主控制单元能够逐步进行： - 从读取装置（12,13）接收石英谐振器的频率值， - 将这些值与与谐振器（6）相对应的频率序列进行比较 沉积在基板（4）上的材料的量，以及 - 执行比较的结果控制喷枪（8）和选择沉积在基板（4）上的物质的量。