公开(公告)号：WO2010137737A1

公开(公告)日：2010-12-02

申请号：PCT/JP2010/059404

申请日：2010-05-27

Applicant: RICOH COMPANY, LTD. ,  AKIYAMA, Yoshikazu ,  KIHIRA, Takakazu ,  UEDA, Keiji ,  SHIMOFUKU, Akira ,  MACHIDA, Osamu

Inventor： AKIYAMA, Yoshikazu ,  KIHIRA, Takakazu ,  UEDA, Keiji ,  SHIMOFUKU, Akira ,  MACHIDA, Osamu

IPC: H01L41/22 ,  B41J2/16 ,  H01L41/09 ,  H01L41/18 ,  H01L41/24 ,  H02N2/00

CPC classification number: H01L41/0973 ,  H01L41/318

Abstract: A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

Abstract translation: 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤; 重复第一，第二和第三步骤以获得具有期望厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

公开(公告)号：WO2012036103A1

公开(公告)日：2012-03-22

申请号：PCT/JP2011/070662

申请日：2011-09-05

Applicant: RICOH COMPANY, LTD. ,  MIZUKAMI, Satoshi ,  AKIYAMA, Yoshikazu ,  SHINKAI, Masaru ,  MACHIDA, Osamu

Inventor： MIZUKAMI, Satoshi ,  AKIYAMA, Yoshikazu ,  SHINKAI, Masaru ,  MACHIDA, Osamu

IPC: H01L41/22 ,  B41J2/045 ,  B41J2/055 ,  B41J2/16

CPC classification number: H01L41/0973 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14491 ,  H01L27/20 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0805 ,  H01L41/29

Abstract: A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.

Abstract translation: 机电换能装置的制造方法包括在基板上形成振动板; 在振动板上形成由金属制成的第一电极; 在所述第一电极上形成由导电氧化物制成的第二电极; 涂覆表面改性材料并进行仅第一电极的表面改性; 在所述第二电极上形成机电换向膜; 以及在机电转换膜上形成由导电氧化物制成的第三电极。