Abstract:
A method of transporting precision equipment materials without absorption of thermal energy through the heat sensitive material or device such as flat panel displays. The transfer member has a carbon fiber reinforced composite material body with a layer of metal film on the top and bottom surfaces of the transfer member that provides a reflective surface. Flat panel displays, for example, release radiant thermal energy that is absorbed by the carbon fiber reinforced composite which is detrimental to the flat panel display. The reflective surface created by the metal film prevents the energy absorption by the carbon fiber reinforced composite. A glass fiber and epoxy layer on the metal film surface protects the metal film.
Abstract:
An electrically conductive transfer member for transferring precision equipment materials such as silicon wafers for semiconductors and glass substrates for liquid crystal display devices, as well as the method of manufacturing the transfer member. The transfer member has a carbon fiber reinforced composite material body with an electroconductive polymer part connected to at least some of the carbon fibers of the body. The electroconductive transfer member removes static electricity of the components transferred by the transfer member.