公开(公告)号：WO2010077865A3

公开(公告)日：2010-07-08

申请号：PCT/US2009/068060

申请日：2009-12-15

Applicant: KLA-TENCOR CORPORATION ,  ZHAO, Guoheng ,  ZAPALAC, George H. ,  NGAI, Samuel S. H. ,  VAEZ-IRAVANI, Mehdi ,  LEVY, Ady ,  DHARMADHIKARI, Vineet

Inventor： ZHAO, Guoheng ,  ZAPALAC, George H. ,  NGAI, Samuel S. H. ,  VAEZ-IRAVANI, Mehdi ,  LEVY, Ady ,  DHARMADHIKARI, Vineet

IPC: H01L21/66 ,  H01L31/042

Abstract: To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.