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公开(公告)号：WO2022063705A1
公开(公告)日：2022-03-31
申请号：PCT/EP2021/075690
申请日：2021-09-17
摘要： The present disclosure describes techniques that, in some instances, can help reduce stress and potential damage during the manufacture of optical elements such as those that include a metastructure formed by imprinting. In one aspect, a method of manufacturing an optical element includes imprinting a stamp into a polymeric material on a substrate, wherein the stamp includes first projections corresponding to an active area of the stamp for formation of meta-atoms in the polymeric material. The stamp further includes a protective structure laterally surrounding the first projections. The protective structure includes at least one additional projection extending in parallel to the first projections. The method includes removing the stamp from the polymeric material, thereby forming openings in the polymeric material in positions corresponding to the first projections and in one or more positions corresponding to the at least one additional projection.
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公开(公告)号：WO2023061987A1
公开(公告)日：2023-04-20
申请号：PCT/EP2022/078206
申请日：2022-10-11
发明人： ELESIN, Yuriy , FRANDSEN, Lars Hagedorn , JOHANSEN, Villads Egede , QUAADE, Ulrich , BILENBERG, Brian
摘要： The present disclosure describes anti-reflective structuring of optical elements that include a metasurface. In some implementations, the anti-reflective structuring includes applying one or more anti-reflective coatings over a surface of the metasurface. In some implementations, the anti-reflective structuring includes modifying the shape of the meta-atoms or providing textured features on the meta-atoms so as to reduce reflections.
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公开(公告)号：WO2021255007A1
公开(公告)日：2021-12-23
申请号：PCT/EP2021/066070
申请日：2021-06-15
IPC分类号： G03F7/00 , B29D11/00 , G02B3/00 , B29D11/00307 , B29D11/00365 , B29D11/00432 , G02B3/0012 , G03F7/0002
摘要： A method includes treating a surface of a substrate to cause the surface to include a hydrophobic portion and a hydrophilic portion, providing a replication material over the hydrophilic portion, and imprinting the replication material to cause the replication material to have a predetermined characteristic.
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公开(公告)号：WO2022233946A1
公开(公告)日：2022-11-10
申请号：PCT/EP2022/062002
申请日：2022-05-04
摘要： The manufacture of surface emitting lasers that include an optical metastructure are described. For example, in accordance with some implementations, a method includes providing a sequence of semiconductor layers and processing the sequence of semiconductor layers to form an upper reflector disposed over an active layer, the active layer being disposed over a lower reflector, and the lower reflector layer being disposed over a substrate. The semiconductor layers in which the upper reflector is formed include one or more outer semiconductor layers, and the method includes forming a metastructure in the one or more outer semiconductor layers.
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公开(公告)号：WO2022175380A1
公开(公告)日：2022-08-25
申请号：PCT/EP2022/053923
申请日：2022-02-17
发明人： HANSSON, Niklas
摘要： An optical device includes a substrate and an optical layer disposed on the substrate. In some implementations, a surface of the substrate that forms an interface with the optical layer is non-planar, and an overall surface area of the interface is greater than if the surface of the substrate were planar. Adhesion of the optical layer to the substrate can, at least in some cases, be improved by the higher surface area of the interface.
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6.发明申请
公开(公告)号：WO2022117458A1
公开(公告)日：2022-06-09
申请号：PCT/EP2021/083176
申请日：2021-11-26
发明人： HANSSON, Niklas , EILERTSEN, James
摘要： Optical element including an optical metastructure composed, at least in part, of cone-shaped or truncated-shaped meta-atoms, such as pyramid-shaped or frustum-shaped meta-atoms, method of manufacturing the optical element, and optical device comprising the optical element. The manufacturing may include the use of sputtering to deposit the material for the meta-atoms, which may be embedded, for example, in a polymer layer. The optical element might be composed of a stack of two metastructured layers.
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公开(公告)号：WO2022058443A2
公开(公告)日：2022-03-24
申请号：PCT/EP2021/075515
申请日：2021-09-16
发明人： EILERTSEN, James
IPC分类号： G03F7/00 , B29C59/16 , G03F7/0002 , G03F7/0005
摘要： A method includes pressing a face of a stamp into a replication material disposed on a substrate, to cause the replication material to have a predetermined characteristic, in which a plurality of nanoparticles are embedded in the replication material, the plurality of nanoparticles having a size distribution with a first local maximum at a first diameter and a second local maximum at a second, different diameter, and in which the plurality of nanoparticles includes a first subset of nanoparticles having diameters closer to the first diameter than to the second diameter and a second subset of nanoparticles having diameters closer to the second diameter than to the first diameter; curing the replication material; and removing the face of the stamp from contact with the replication material.
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8.发明申请
公开(公告)号：WO2022058385A1
公开(公告)日：2022-03-24
申请号：PCT/EP2021/075385
申请日：2021-09-15
发明人： ZALKOVSKIJ, Maksim
摘要： The present disclosure describes metastructure optical elements, assemblies, and methods of their manufacture. In some implementations, a metastructure optical element includes a first grouping of meta-atoms having a first etch characteristic. The first grouping of meta-atoms is composed of a first etched stratum. The metastructure optical element further includes a second grouping of meta-atoms having a second etch characteristic. The second grouping of meta-atoms is composed of a second etched stratum and an etched optical etch-deceleration layer. The second etched stratum is disposed on the etched optical etch-deceleration layer, and the etch-deceleration layer is disposed on a substrate.
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公开(公告)号：WO2021260098A1
公开(公告)日：2021-12-30
申请号：PCT/EP2021/067324
申请日：2021-06-24
发明人： MOXEY, Mark Allen , CZOLKOS, Ilja , BALIMANN, Martin , SCHMIDLIN, Moritz , LENART, Robert , SENN, Tobias
IPC分类号： B29D11/00 , B29D11/00307 , B29D11/00442 , B29D11/0048
摘要： A method includes pressing a face of a stamp into a first portion of a replication material disposed on a substrate, to cause the replication material to have a predetermined characteristic, exposing the first portion of the replication material to illumination, to modify the first portion of the replication material, and subsequently removing a second portion of the replication material that was not exposed to the illumination. An optical device includes a substrate, a portion of replication material disposed on a first surface of the substrate, the portion of replication material forming one or more diffractive optical elements, and a masking layer disposed on a second surface of the substrate, the second surface being opposite the first surface, in which a sidewall of the replication material has a straight profile, and in which the masking layer defines an aperture aligned with the portion of the replication material.
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10.发明申请
公开(公告)号：WO2023025608A1
公开(公告)日：2023-03-02
申请号：PCT/EP2022/072733
申请日：2022-08-12
摘要： Metastructures composed of a plurality of sublayers each of which has a respective index of refraction that differs from the index of refraction of at least one of the other sublayers are described, as are methods for manufacturing the metastructures. Intermediate wafers that can be produced during the methods also are described.
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