公开(公告)号：WO2021255007A1

公开(公告)日：2021-12-23

申请号：PCT/EP2021/066070

申请日：2021-06-15

申请人： NILT SWITZERLAND GMBH

发明人： BALIMANN, Martin ,  SCHMIDLIN, Moritz ,  LENART, Robert ,  SENN, Tobias

IPC分类号： G03F7/00 ,  B29D11/00 ,  G02B3/00 ,  B29D11/00307 ,  B29D11/00365 ,  B29D11/00432 ,  G02B3/0012 ,  G03F7/0002

摘要： A method includes treating a surface of a substrate to cause the surface to include a hydrophobic portion and a hydrophilic portion, providing a replication material over the hydrophilic portion, and imprinting the replication material to cause the replication material to have a predetermined characteristic.

公开(公告)号：WO2022063705A1

公开(公告)日：2022-03-31

申请号：PCT/EP2021/075690

申请日：2021-09-17

申请人： NILT SWITZERLAND GMBH

发明人： ZALKOVSKIJ, Maksim ,  HANSEN, Jesper Fly ,  SENN, Tobias ,  BILENBERG, Brian

IPC分类号： G02B1/00 ,  G02B1/14 ,  B29C43/02 ,  B29C59/02 ,  B82Y40/00 ,  H01L31/0236

摘要： The present disclosure describes techniques that, in some instances, can help reduce stress and potential damage during the manufacture of optical elements such as those that include a metastructure formed by imprinting. In one aspect, a method of manufacturing an optical element includes imprinting a stamp into a polymeric material on a substrate, wherein the stamp includes first projections corresponding to an active area of the stamp for formation of meta-atoms in the polymeric material. The stamp further includes a protective structure laterally surrounding the first projections. The protective structure includes at least one additional projection extending in parallel to the first projections. The method includes removing the stamp from the polymeric material, thereby forming openings in the polymeric material in positions corresponding to the first projections and in one or more positions corresponding to the at least one additional projection.

公开(公告)号：WO2021260098A1

公开(公告)日：2021-12-30

申请号：PCT/EP2021/067324

申请日：2021-06-24

申请人： NILT SWITZERLAND GMBH

发明人： MOXEY, Mark Allen ,  CZOLKOS, Ilja ,  BALIMANN, Martin ,  SCHMIDLIN, Moritz ,  LENART, Robert ,  SENN, Tobias

IPC分类号： B29D11/00 ,  B29D11/00307 ,  B29D11/00442 ,  B29D11/0048

摘要： A method includes pressing a face of a stamp into a first portion of a replication material disposed on a substrate, to cause the replication material to have a predetermined characteristic, exposing the first portion of the replication material to illumination, to modify the first portion of the replication material, and subsequently removing a second portion of the replication material that was not exposed to the illumination. An optical device includes a substrate, a portion of replication material disposed on a first surface of the substrate, the portion of replication material forming one or more diffractive optical elements, and a masking layer disposed on a second surface of the substrate, the second surface being opposite the first surface, in which a sidewall of the replication material has a straight profile, and in which the masking layer defines an aperture aligned with the portion of the replication material.