Abstract:
Disclosed is a substrate processing apparatus and method. The substrate processing apparatus includes a process chamber (10) providing an internal space, in which a process is carried out onto a substrate; a support member (30) installed in the process chamber (10) to support the substrate; and a shower head (20) located above the support member (30) to supply a source gas toward the support member (30), wherein the shower head (20) includes a first injection surface (24) located at a position separated from the upper surface of the substrate by a first distance, and provided with outlets of first injection holes (24a) to inject the source gas; and a second injection surface (26) located at a position separated from the upper surface of the substrate by a second distance being different from the first distance, and provided with outlets of second injection holes (26a) to inject the source gas.
Abstract:
Disclosed herein is a hybrid integrated structure of an optical active device and a Planar Lightwave Circuit (PLC) device using an optical fiber array, in which one or more photodiode are integrated on an upper cladding layer above one or more planar optical waveguides. A section located on a boundary surface between output optical waveguides, that is, an end of the PLC device in the direction of propagation of light, and the input end of an output optical fiber array is ground to be inclined at a predetermined angle with respect to an optical axis. Further, one or more optical fibers and one or more reflection mirrors are alternately arranged, inserted, and disposed in a plurality of V-shaped trenches formed in the output optical fiber array.
Abstract:
The present invention relates to a micro coaxial cable with a high bending performance, comprising an inner conductor; an insulating layer configured to surround the inner conductor; and a helical winding conductor configured to surround the insulating layer and having an elongation of 1.5 to 4 % and a pitch of 3.0 to 5.0 D.
Abstract:
Disclosed is a method of manufacturing an air blown optical fiber unit for prevention of characteristic deterioration of a coating layer, and a gas chamber used therein. This method includes coating a first coating resin on a surface of an optical fiber bundle; introducing the optical fiber bundle coated with the first coating resin into a first curing chamber under inert gas environment and curing the first coating resin to form a first coating layer; coating a second coating resin on a surface of the first coating layer; attaching beads to a surface of the second coating layer; and introducing the optical fiber bundle having the beads attached thereto into a second curing chamber under inert gas environment and curing the second coating resin to form a second coating layer. This method may improve stiffness of the coating layer by intercepting introduction of impurities during the coating layer forming process.
Abstract:
Disclosed is an air blown optical fiber unit for reducing a micro-bending loss. The air blown optical fiber unit includes at least one optical fiber; a buffer layer surrounding the optical fiber and made of polymer resin having a Young's modulus of 0.05 to 2 kgf/mm ; and an outer layer surrounding the buffer layer and having beads attached to a surface thereof, the outer layer being made of polymer resin, wherein the buffer layer has a thickness of 70 to 140 µm. This optical fiber unit may reduce a micro-bending loss of an optical fiber by buffering an external force applied to the optical fiber due to beads attached to its surface.
Abstract:
Disclosed is an air blown optical fiber unit having beads attached on its surface. The air blown optical fiber unit includes at least one optical fiber, a buffer layer surrounding the optical fiber and made of polymer resin, an outer layer surrounding the buffer layer and made of polymer resin, and beads attached on a surface of the outer layer to have height of 40μm to 120μm on the average. This air blown optical fiber unit gives improved installation characteristics.
Abstract:
An optical fiber unit for air blown installation includes at least one optical fiber having a core layer and a clad layer; a protective layer coated on the surface of the optical fiber; and protrusions made of polymer resin and formed on the outer circumference of the protective layer in a banded shape. The protrusions may be formed either by supplying polymer resin to the outer circumference of the optical fiber with passing the optical fiber through an extrusion dice in which grooves of a predetermined shape are formed on a hollow inner circumference thereof, or by supplying polymer resin to the outer circumference of the optical fiber through nozzles with moving the optical fiber in a longitudinal direction.
Abstract:
An Outside Vapor Deposition (OVD) apparatus for making an optical fiber preform with uniform deposition of silica particles through uniform heating to the overall length of the preform includes a mandrel having a predetermined length and driven to rotate and a burner for emitting a combustion gas together with a combustion gas toward the mandrel and burning the combustion gas to make silica particles to that the silica particles are deposited on a surface of the mandrel, wherein the burner has a length corresponding to the length of the mandrel and provides uniform temperature throughout the overall length of the mandrel at the same time.
Abstract:
Disclosed is a substrate processing apparatus and method. The substrate processing apparatus includes a process chamber (10) providing an internal space, in which a process is carried out onto a substrate; a support member (30) installed in the process chamber (10) to support the substrate; and a shower head (20) located above the support member (30) to supply a source gas toward the support member (30), wherein the shower head (20) includes a first injection surface (24) located at a position separated from the upper surface of the substrate by a first distance, and provided with outlets of first injection holes (24a) to inject the source gas; and a second injection surface (26) located at a position separated from the upper surface of the substrate by a second distance being different from the first distance, and provided with outlets of second injection holes (26a) to inject the source gas.
Abstract:
A coaxial cable includes a central conductor made of cylindrical conductive material with conductivity greater than 100% and smaller than 104%, the central conductor having a thickness greater than 0.1 mm and smaller than 0.5 mm; a dielectric layer surrounding the central conductor and made of insulating material; an outer conductor surrounding the dielectric layer and made of conductive material with conductivity greater than 97% and smaller than 105% and a thickness greater than 0.24 mm and smaller than 0.35 mm; and an outer jacket surrounding the outer conductor. This coaxial cable allows stable transmission of signal even at a high frequency.