SUBSTRATE PROCESSING APPARATUS AND METHOD
    1.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD 审中-公开
    基板加工装置和方法

    公开(公告)号:WO2009120034A2

    公开(公告)日:2009-10-01

    申请号:PCT/KR2009/001566

    申请日:2009-03-27

    CPC classification number: C23C16/45565 H01J37/3244 H01J37/32449

    Abstract: Disclosed is a substrate processing apparatus and method. The substrate processing apparatus includes a process chamber (10) providing an internal space, in which a process is carried out onto a substrate; a support member (30) installed in the process chamber (10) to support the substrate; and a shower head (20) located above the support member (30) to supply a source gas toward the support member (30), wherein the shower head (20) includes a first injection surface (24) located at a position separated from the upper surface of the substrate by a first distance, and provided with outlets of first injection holes (24a) to inject the source gas; and a second injection surface (26) located at a position separated from the upper surface of the substrate by a second distance being different from the first distance, and provided with outlets of second injection holes (26a) to inject the source gas.

    Abstract translation: 公开了一种基板处理装置和方法。 基板处理装置包括提供内部空间的处理室(10),其中进行到基板上的处理; 安装在所述处理室(10)中以支撑所述基板的支撑构件(30) 以及位于所述支撑构件(30)上方以朝向所述支撑构件(30)供应源气体的淋浴喷头(20),其中所述喷淋头(20)包括位于与所述支撑构件(30)分离的位置的第一喷射表面(24) 衬底的上表面第一距离,并且设置有用于喷射源气体的第一喷射孔(24a)的出口; 以及第二注入表面(26),其位于与所述基板的上表面隔开第二距离与所述第一距离不同的位置处,并且设置有用于喷射所述源气体的第二喷射孔(26a)的出口。

    HYBRID INTEGRATION STRUCTURE BETWEEN OPTICAL ACTIVE DEVICES AND PLANAR LIGHTWAVE CIRCUIT USING FIBER ARRAY
    2.
    发明申请
    HYBRID INTEGRATION STRUCTURE BETWEEN OPTICAL ACTIVE DEVICES AND PLANAR LIGHTWAVE CIRCUIT USING FIBER ARRAY 审中-公开
    使用光纤阵列的光学有源器件与平面照明电路之间的混合积分结构

    公开(公告)号:WO2009031744A1

    公开(公告)日:2009-03-12

    申请号:PCT/KR2008/002386

    申请日:2008-04-28

    Abstract: Disclosed herein is a hybrid integrated structure of an optical active device and a Planar Lightwave Circuit (PLC) device using an optical fiber array, in which one or more photodiode are integrated on an upper cladding layer above one or more planar optical waveguides. A section located on a boundary surface between output optical waveguides, that is, an end of the PLC device in the direction of propagation of light, and the input end of an output optical fiber array is ground to be inclined at a predetermined angle with respect to an optical axis. Further, one or more optical fibers and one or more reflection mirrors are alternately arranged, inserted, and disposed in a plurality of V-shaped trenches formed in the output optical fiber array.

    Abstract translation: 本文公开了一种光学有源器件和使用光纤阵列的平面光波电路(PLC)器件的混合集成结构,其中一个或多个光电二极管集成在一个或多个平面光波导上的上包层上。 位于输出光波导之间的边界面上的部分,即PLC装置在光的传播方向上的端部和输出光纤阵列的输入端的部分被磨削成相对于 到光轴。 此外,一个或多个光纤和一个或多个反射镜交替地布置,插入和布置在形成在输出光纤阵列中的多个V形沟槽中。

    METHOD OF MANUFACTURING AIR BLOWN OPTICAL FIBER UNIT FOR PREVENTING OF DETERIORATION OF CHARACTERISTICS IN COATING LAYER AND GAS CHAMBER USED THEREIN
    4.
    发明申请
    METHOD OF MANUFACTURING AIR BLOWN OPTICAL FIBER UNIT FOR PREVENTING OF DETERIORATION OF CHARACTERISTICS IN COATING LAYER AND GAS CHAMBER USED THEREIN 审中-公开
    制造空气光源光纤单元的方法,用于防止涂层中使用的气体和气体室的特性

    公开(公告)号:WO2006062282A1

    公开(公告)日:2006-06-15

    申请号:PCT/KR2005/002077

    申请日:2005-06-30

    Inventor: PARK, Chan-Yong

    CPC classification number: G02B6/4438 G02B6/4485 G02B6/4486

    Abstract: Disclosed is a method of manufacturing an air blown optical fiber unit for prevention of characteristic deterioration of a coating layer, and a gas chamber used therein. This method includes coating a first coating resin on a surface of an optical fiber bundle; introducing the optical fiber bundle coated with the first coating resin into a first curing chamber under inert gas environment and curing the first coating resin to form a first coating layer; coating a second coating resin on a surface of the first coating layer; attaching beads to a surface of the second coating layer; and introducing the optical fiber bundle having the beads attached thereto into a second curing chamber under inert gas environment and curing the second coating resin to form a second coating layer. This method may improve stiffness of the coating layer by intercepting introduction of impurities during the coating layer forming process.

    Abstract translation: 公开了一种制造用于防止涂层的特性劣化的空气吹制光纤单元和其中使用的气室的方法。 该方法包括在光纤束的表面上涂布第一涂布树脂; 将涂覆有第一涂料树脂的光纤束引入第一固化室中并固化第一涂料树脂以形成第一涂层; 在所述第一涂层的表面上涂覆第二涂布树脂; 将珠附接到第二涂层的表面; 并且在惰性气体环境下将具有附着于其上的珠的光纤束引入第二固化室中,并固化第二涂覆树脂以形成第二涂层。 该方法可以通过在涂层形成过程中截留杂质的引入来提高涂层的刚度。

    AIR BLOWN OPTICAL FIBER UNIT FOR REDUCING MICRO-BENDING LOSS
    5.
    发明申请
    AIR BLOWN OPTICAL FIBER UNIT FOR REDUCING MICRO-BENDING LOSS 审中-公开
    用于减少微弯曲损失的空气光纤光纤单元

    公开(公告)号:WO2006062281A1

    公开(公告)日:2006-06-15

    申请号:PCT/KR2005/002076

    申请日:2005-06-30

    Inventor: PARK, Chan-Yong

    CPC classification number: G02B6/4438 G02B6/4464

    Abstract: Disclosed is an air blown optical fiber unit for reducing a micro-bending loss. The air blown optical fiber unit includes at least one optical fiber; a buffer layer surrounding the optical fiber and made of polymer resin having a Young's modulus of 0.05 to 2 kgf/mm ; and an outer layer surrounding the buffer layer and having beads attached to a surface thereof, the outer layer being made of polymer resin, wherein the buffer layer has a thickness of 70 to 140 µm. This optical fiber unit may reduce a micro-bending loss of an optical fiber by buffering an external force applied to the optical fiber due to beads attached to its surface.

    Abstract translation: 公开了一种用于降低微弯损耗的吹气光纤单元。 吹气光纤单元包括至少一个光纤; 围绕光纤并由杨氏模量为0.05〜2kgf / mm的聚合物树脂制成的缓冲层; 以及围绕所述缓冲层的外层,并且具有附着在其表面上的珠,所述外层由聚合物树脂制成,其中所述缓冲层的厚度为70〜140μm。 该光纤单元可以通过缓冲由于附着在其表面上的珠而施加到光纤的外力来减小光纤的微弯曲损耗。

    AIR BLOWN OPTICAL FIBER UNIT HAVING BEAD ATTACHED ON THE SURFACE
    6.
    发明申请
    AIR BLOWN OPTICAL FIBER UNIT HAVING BEAD ATTACHED ON THE SURFACE 审中-公开
    具有连接在表面上的珠子的空气光纤光学单元

    公开(公告)号:WO2006062280A1

    公开(公告)日:2006-06-15

    申请号:PCT/KR2005/002075

    申请日:2005-06-30

    Inventor: PARK, Chan-Yong

    CPC classification number: G02B6/4438 G02B6/4464

    Abstract: Disclosed is an air blown optical fiber unit having beads attached on its surface. The air blown optical fiber unit includes at least one optical fiber, a buffer layer surrounding the optical fiber and made of polymer resin, an outer layer surrounding the buffer layer and made of polymer resin, and beads attached on a surface of the outer layer to have height of 40μm to 120μm on the average. This air blown optical fiber unit gives improved installation characteristics.

    Abstract translation: 公开了一种具有附着在其表面上的珠的空气吹制光纤单元。 空气吹制光纤单元包括至少一个光纤,围绕光纤并由聚合物树脂制成的缓冲层,围绕缓冲层并由聚合物树脂制成的外层,以及附着在外层表面上的珠子 平均高度为40μm至120μm。 该吹风光纤单元提供了改进的安装特性。

    OPTICAL FIBER UNIT FOR AIR BLOWN INSTALLATION AND MANUFACTURING METHOD THEREOF
    7.
    发明申请
    OPTICAL FIBER UNIT FOR AIR BLOWN INSTALLATION AND MANUFACTURING METHOD THEREOF 审中-公开
    用于空气安装的光纤单元及其制造方法

    公开(公告)号:WO2004061508A1

    公开(公告)日:2004-07-22

    申请号:PCT/KR2003/001541

    申请日:2003-07-31

    CPC classification number: G02B6/4438 G02B6/4485

    Abstract: An optical fiber unit for air blown installation includes at least one optical fiber having a core layer and a clad layer; a protective layer coated on the surface of the optical fiber; and protrusions made of polymer resin and formed on the outer circumference of the protective layer in a banded shape. The protrusions may be formed either by supplying polymer resin to the outer circumference of the optical fiber with passing the optical fiber through an extrusion dice in which grooves of a predetermined shape are formed on a hollow inner circumference thereof, or by supplying polymer resin to the outer circumference of the optical fiber through nozzles with moving the optical fiber in a longitudinal direction.

    Abstract translation: 用于吹风装置的光纤单元包括至少一个具有芯层和覆层的光纤; 涂覆在光纤表面上的保护层; 以及由聚合物树脂制成的突起,并以带状形成在保护层的外周上。 突起可以通过将光纤纤维的外周提供聚合物树脂,使光纤穿过其中在其中空的内周上形成有预定形状的沟槽的挤出骰子,或者通过将聚合物树脂供应到 通过喷嘴使光纤的外周沿长度方向移动光纤。

    OUTSIDE VAPOR DEPOSITION APPARATUS FOR MAKING OPTICAL FIBER PREFORM AND METHOD FOR MAKING OPTICAL FIBER PREFORM USING THE SAME
    8.
    发明申请
    OUTSIDE VAPOR DEPOSITION APPARATUS FOR MAKING OPTICAL FIBER PREFORM AND METHOD FOR MAKING OPTICAL FIBER PREFORM USING THE SAME 审中-公开
    用于制造光纤预制件的外部蒸发沉积装置和使用该光纤预制件制造光纤预制件的方法

    公开(公告)号:WO2004002911A1

    公开(公告)日:2004-01-08

    申请号:PCT/KR2003/000615

    申请日:2003-03-27

    CPC classification number: C03B37/0142 C03B2207/02 C03B2207/42

    Abstract: An Outside Vapor Deposition (OVD) apparatus for making an optical fiber preform with uniform deposition of silica particles through uniform heating to the overall length of the preform includes a mandrel having a predetermined length and driven to rotate and a burner for emitting a combustion gas together with a combustion gas toward the mandrel and burning the combustion gas to make silica particles to that the silica particles are deposited on a surface of the mandrel, wherein the burner has a length corresponding to the length of the mandrel and provides uniform temperature throughout the overall length of the mandrel at the same time.

    Abstract translation: 外部气相沉积(OVD)装置,用于通过均匀加热制成具有均匀沉积二氧化硅颗粒至预制棒的整个长度的光纤预型件包括具有预定长度并被驱动旋转的心轴和用于一起燃烧燃烧气体的燃烧器 将燃烧气体朝向心轴燃烧并燃烧燃烧气体以使二氧化硅颗粒与二氧化硅颗粒沉积在心轴的表面上,其中燃烧器的长度对应于心轴的长度并且在整个整体中提供均匀的温度 心轴的长度同时进行。

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    9.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD 审中-公开
    基板处理装置和方法

    公开(公告)号:WO2009120034A3

    公开(公告)日:2009-12-17

    申请号:PCT/KR2009001566

    申请日:2009-03-27

    CPC classification number: C23C16/45565 H01J37/3244 H01J37/32449

    Abstract: Disclosed is a substrate processing apparatus and method. The substrate processing apparatus includes a process chamber (10) providing an internal space, in which a process is carried out onto a substrate; a support member (30) installed in the process chamber (10) to support the substrate; and a shower head (20) located above the support member (30) to supply a source gas toward the support member (30), wherein the shower head (20) includes a first injection surface (24) located at a position separated from the upper surface of the substrate by a first distance, and provided with outlets of first injection holes (24a) to inject the source gas; and a second injection surface (26) located at a position separated from the upper surface of the substrate by a second distance being different from the first distance, and provided with outlets of second injection holes (26a) to inject the source gas.

    Abstract translation: 公开了一种基板处理设备和方法。 该基板处理装置包括提供内部空间的处理室(10),其中在基板上执行处理; 支撑构件(30),其安装在处理室(10)中以支撑基板; 和位于所述支承部件(30)的上方,向所述支承部件(30)供给原料气体的喷淋头(20),所述喷淋头(20)具有第一喷射面(24)和第二喷射面 所述基板的上表面具有第一距离,并且设置有用于喷射所述源气体的第一喷射孔(24a)的出口; 以及位于与基板的上表面隔开与第一距离不同的第二距离的位置处的第二注入表面(26),并且设置有第二注入孔(26a)的出口以注入源气体。

    COAXIAL CABLE
    10.
    发明申请
    COAXIAL CABLE 审中-公开
    同轴电缆

    公开(公告)号:WO2008069462A1

    公开(公告)日:2008-06-12

    申请号:PCT/KR2007/005623

    申请日:2007-11-08

    CPC classification number: H01B11/1808

    Abstract: A coaxial cable includes a central conductor made of cylindrical conductive material with conductivity greater than 100% and smaller than 104%, the central conductor having a thickness greater than 0.1 mm and smaller than 0.5 mm; a dielectric layer surrounding the central conductor and made of insulating material; an outer conductor surrounding the dielectric layer and made of conductive material with conductivity greater than 97% and smaller than 105% and a thickness greater than 0.24 mm and smaller than 0.35 mm; and an outer jacket surrounding the outer conductor. This coaxial cable allows stable transmission of signal even at a high frequency.

    Abstract translation: 同轴电缆包括由导电率大于100%且小于104%的圆柱形导电材料制成的中心导体,中心导体的厚度大于0.1mm且小于0.5mm; 围绕中心导体并由绝缘材料制成的电介质层; 围绕电介质层并由导电率大于97%且小于105%且厚度大于0.24mm且小于0.35mm的导电材料制成的外导体; 以及围绕外导体的外护套。 该同轴电缆即使在高频下也能稳定地传输信号。

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