公开(公告)号：WO2008021894A3

公开(公告)日：2008-07-31

申请号：PCT/US2007075498

申请日：2007-08-08

Applicant: SOKUDO CO LTD ,  PORRAS ERICA R ,  RAMANAN NATARAJAN

Inventor： PORRAS ERICA R ,  RAMANAN NATARAJAN

IPC: B67D7/08 ,  G03F7/16 ,  B05C11/10

CPC classification number: H01L21/6715 ,  H01L21/67253

Abstract: An apparatus for monitoring a position of a semiconductor process fluid interface in a dispense nozzle includes an extended optical source adapted to provide an optical beam propagating along an optical path. The optical beam is characterized by a path width measured in a first direction aligned with a dispense direction. The apparatus also includes an optical detector coupled to the optical path and adapted to detect at least a portion of the optical beam and a dispense nozzle disposed along the optical path at a location between the extended optical source and the optical detector. The apparatus further includes a nozzle positioning member coupled to the dispense nozzle and adapted to translate the dispense nozzle in the first direction.

Abstract translation: 用于监测分配喷嘴中的半导体工艺流体界面的位置的装置包括适于提供沿光路传播的光束的扩展光源。 光束的特征在于沿与分配方向对齐的第一方向测量的路径宽度。 该装置还包括耦合到光路并适于检测光束的至少一部分的光学检测器以及沿着光路布置在扩展光源和光学检测器之间的位置处的分配喷嘴。 该装置还包括联接到分配喷嘴并适于沿着第一方向平移分配喷嘴的喷嘴定位构件。

公开(公告)号：WO2008021894A2

公开(公告)日：2008-02-21

申请号：PCT/US2007/075498

申请日：2007-08-08

Applicant: SOKUDO CO., LTD. ,  PORRAS, Erica, R. ,  RAMANAN, Natarajan

Inventor： PORRAS, Erica, R. ,  RAMANAN, Natarajan

IPC: B67D5/08 ,  G01B11/14

CPC classification number: H01L21/6715 ,  H01L21/67253

Abstract: An apparatus for monitoring a position of a semiconductor process fluid interface in a dispense nozzle includes an extended optical source adapted to provide an optical beam propagating along an optical path. The optical beam is characterized by a path width measured in a first direction aligned with a dispense direction. The apparatus also includes an optical detector coupled to the optical path and adapted to detect at least a portion of the optical beam and a dispense nozzle disposed along the optical path at a location between the extended optical source and the optical detector. The apparatus further includes a nozzle positioning member coupled to the dispense nozzle and adapted to translate the dispense nozzle in the first direction.

Abstract translation: 用于监测分配喷嘴中的半导体过程流体界面的位置的装置包括适于提供沿着光路传播的光束的扩展光源。 光束的特征在于在与分配方向对齐的第一方向上测量的路径宽度。 所述设备还包括光学检测器，所述光学检测器耦合到所述光路并且适于检测所述光束的至少一部分以及沿着所述光路设置在所述扩展光源与所述光学检测器之间的位置处的分配喷嘴。 该设备还包括喷嘴定位构件，该喷嘴定位构件联接到分配喷嘴并且适于使分配喷嘴沿第一方向平移。