METHOD AND SYSTEM FOR PROCESSING OPTICAL ELEMENTS USING MAGNETORHEOLOGICAL FINISHING
    3.
    发明申请
    METHOD AND SYSTEM FOR PROCESSING OPTICAL ELEMENTS USING MAGNETORHEOLOGICAL FINISHING 审中-公开
    使用磁流体整理处理光学元件的方法和系统

    公开(公告)号:WO2011017266A1

    公开(公告)日:2011-02-10

    申请号:PCT/US2010/044138

    申请日:2010-08-02

    CPC classification number: B24B31/112 B24B1/005 B24B13/00 B24B49/12 B24B51/00

    Abstract: A method of finishing an optical element includes mounting the optical element in an optical mount having a plurality of fiducials overlapping with the optical element and obtaining a first metrology map for the optical element and the plurality of fiducials. The method also includes obtaining a second metrology map for the optical element without the plurality of fiducials, forming a difference map between the first metrology map and the second metrology map, and aligning the first metrology map and the second metrology map. The method further includes placing mathematical fiducials onto the second metrology map using the difference map to form a third metrology map and associating the third metrology map to the optical element. Moreover, the method includes mounting the optical element in the fixture in an MRF tool, positioning the optical element in the fixture; removing the plurality of fiducials, and finishing the optical element.

    Abstract translation: 整理光学元件的方法包括将光学元件安装在具有与光学元件重叠的多个基准的光学安装座中,并获得用于光学元件和多个基准的第一计量图。 该方法还包括获得光学元件的第二计量图,而不需要多个基准,形成第一计量图和第二计量图之间的差分图,并对准第一计量图和第二计量图。 该方法还包括使用差分图将数学基准放置在第二计量图上以形成第三测量图并将第三计量图与光学元件相关联。 此外,该方法包括将光学元件安装在固定装置中的MRF工具中,将光学元件定位在固定装置中; 去除多个基准,并整理光学元件。

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