公开(公告)号：WO2009055507A1

公开(公告)日：2009-04-30

申请号：PCT/US2008/080842

申请日：2008-10-22

申请人： APPLIED MATERIALS, INC. ,  SICO, Angela, Rose ,  RICE, Michael, R. ,  STRASSNER, James, D.

发明人： SICO, Angela, Rose ,  RICE, Michael, R. ,  STRASSNER, James, D.

IPC分类号： C23F1/00

CPC分类号： F16K3/06 ,  F16K3/0227 ,  F16K51/02 ,  H01L21/67126 ,  H01L21/67772

摘要： Apparatus, methods and systems are provided for sealing a door of a slit valve. The invention includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along at least a portion of the length of the seal, wherein the hard stop and the seal fill at least a portion of a gap between the slit valve door and a substrate sealing surface. Numerous other aspects are provided.

摘要翻译： 提供了用于密封狭缝阀的门的装置，方法和系统。 本发明包括适于沿着狭缝阀门的周边延伸的密封件; 以及设置在所述密封件和所述狭缝阀门的外边缘之间并且适于沿着所述密封件的所述长度的至少一部分延伸的硬止动件，其中所述硬止动件和所述密封件填充至少一部分间隙 在狭缝阀门和基板密封面之间。 提供了许多其他方面。