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    MECHANICAL SEAL HAVING A SINGLE-PIECE, PERFORATED MATING RING
    1.
    发明申请
    MECHANICAL SEAL HAVING A SINGLE-PIECE, PERFORATED MATING RING 审中-公开

    公开(公告)号：WO2006055212A3

    公开(公告)日：2006-05-26

    申请号：PCT/US2005/038898

    申请日：2005-10-29

    Applicant: BOARD OF SUPERVISORS OF LOUISIANA STATE UNIVERSITY AND AGRICULTURAL AND MECHANICAL COLLEGE ,  SOMANCHI, Anoop K. ,  KHONSARI, Michael

    Inventor： SOMANCHI, Anoop K. ,  KHONSARI, Michael

    IPC: F16J15/34

    Abstract: A mechanical seal ( e.g ., single mechanical seals, double mechanical seals, tandem mechanical seals, bellows, pusher mechanical seals, and all types of rotating and reciprocating machines) with reduced contact surface temperature, reduced contact surface wear, or increased life span. The mechanical seal comprises a rotating ring and a single piece, perforated mating ring, which improves heat transfer by controllably channeling coolant flow through the single-piece mating ring such that the coolant is in substantially uniform thermal contact with a substantial portion of the interior surface area of the seal face, while maintaining the structural integrity of the mechanical seal and minimizing the potential for coolant flow interruptions to the seal face caused by debris or contaminants ( e.g., small solids and trash) in the coolant.

    WAFER EDGE INSPECTION
    2.
    发明申请
    WAFER EDGE INSPECTION 审中-公开
    WAFER EDGE检查

    公开(公告)号：WO2006121843A3

    公开(公告)日：2007-02-01

    申请号：PCT/US2006017385

    申请日：2006-05-05

    Applicant: KLA TENCOR TECH CORP ,  VELIDANDLA VAMSI ,  SOMANCHI ANOOP ,  SOETARMAN RONNY ,  MEEKS STEVEN W

    Inventor： VELIDANDLA VAMSI ,  SOMANCHI ANOOP ,  SOETARMAN RONNY ,  MEEKS STEVEN W

    IPC: G01N21/88

    CPC classification number: G01N21/94 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/211 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/9503 ,  G01N2021/556 ,  H01L22/12

    Abstract: In one embodiment, a system (110) to inspect an edge region of a wafer (122), comprises a surface analyzer assembly comprising a radiation targeting assembly that targets a radiation beam onto a surface of the wafer (122); a reflected radiation collection assembly to collect radiation reflected from a surface of the wafer (122); means for rotating the surface analyzer assembly about an edge surface (126) of the wafer (122); and means for detecting one or more defects in the edge region of the wafer.

    Abstract translation: 在一个实施例中，检查晶片（122）的边缘区域的系统（110）包括表面分析器组件，其包括将辐射束对准在晶片（122）的表面上的辐射瞄准组件; 用于收集从晶片（122）的表面反射的辐射的反射辐射收集组件; 用于使表面分析器组件围绕晶片（122）的边缘表面（126）旋转的装置; 以及用于检测晶片边缘区域中的一个或多个缺陷的装置。

    MECHANICAL SEAL HAVING A SINGLE-PIECE, PERFORATED MATING RING
    4.
    发明申请
    MECHANICAL SEAL HAVING A SINGLE-PIECE, PERFORATED MATING RING 审中-公开
    机械密封具有单层，成型环

    公开(公告)号：WO2006055212A2

    公开(公告)日：2006-05-26

    申请号：PCT/US2005038898

    申请日：2005-10-29

    Applicant: UNIV LOUISIANA STATE ,  SOMANCHI ANOOP K ,  KHONSARI MICHAEL

    Inventor： SOMANCHI ANOOP K ,  KHONSARI MICHAEL

    IPC: F16J15/34

    CPC classification number: F16J15/3404

    Abstract: A mechanical seal (e.g., single mechanical seals, double mechanical seals, tandem mechanical seals, bellows, pusher mechanical seals, and all types of rotating and reciprocating machines) with reduced contact surface temperature, reduced contact surface wear, or increased life span. The mechanical seal comprises a rotating ring and a single piece, perforated mating ring, which improves heat transfer by controllably channeling coolant flow through the single-piece mating ring such that the coolant is in substantially uniform thermal contact with a substantial portion of the interior surface area of the seal face, while maintaining the structural integrity of the mechanical seal and minimizing the potential for coolant flow interruptions to the seal face caused by debris or contaminants (e.g., small solids and trash) in the coolant.

    Abstract translation: 具有降低的接触表面温度，降低的接触表面磨损或增加的寿命的机械密封件（例如，单机械密封件，双机械密封件，串联机械密封件，波纹管，推进器机械密封件以及所有类型的旋转和往复机器）。 机械密封件包括旋转环和单件穿孔配合环，其通过可控地将冷却剂流动通过单件式配合环来改善热传递，使得冷却剂与内表面的大部分基本均匀地热接触 密封面的面积，同时保持机械密封的结构完整性，并最大限度地减少由于冷却剂中的碎屑或污染物（例如，小固体和垃圾）导致的密封面的冷却剂流动中断的可能性。

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