公开(公告)号：WO2009044324A2

公开(公告)日：2009-04-09

申请号：PCT/IB2008/053950

申请日：2008-09-29

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  KRASTEV, Krassimir, T. ,  NELLISSEN, Antonius, J., M. ,  VAN LIEROP, Hendrikus, W., L., A., M. ,  SOEMERS, Hermanus, M., J., R. ,  SANDERS, Renatus, H., M.

Inventor： KRASTEV, Krassimir, T. ,  NELLISSEN, Antonius, J., M. ,  VAN LIEROP, Hendrikus, W., L., A., M. ,  SOEMERS, Hermanus, M., J., R. ,  SANDERS, Renatus, H., M.

IPC: G02B26/10

CPC classification number: G02B26/0841 ,  G02B26/085 ,  G02B26/0858

Abstract: A MEMS scanning micromirror manufacturing method with a method for manufacturing a MEMS scanning micromirror having a cantilever beam including providing a silicon on insulator (SOI) wafer 200 having a first silicon layer 202, a second silicon layer 206, and an insulating layer 204 between the first silicon layer 202 and the second silicon layer 206, the thickness of the first silicon layer 202 being a final thickness of the cantilever beam 72; and fashioning the cantilever beam 72 from the first silicon layer 202 while maintaining the final thickness of the cantilever beam.

Abstract translation: 一种MEMS扫描微镜制造方法，其具有制造具有悬臂梁的MEMS扫描微镜的方法，所述MEMS扫描微镜包括提供具有第一硅层202，第二硅层206和绝缘层204的绝缘体上硅（SOI）晶片200，所述第一硅层202， 第一硅层202和第二硅层206，第一硅层202的厚度为悬臂梁72的最终厚度; 并从第一硅层202形成悬臂梁72，同时保持悬臂梁的最终厚度。

公开(公告)号：WO2009147569A1

公开(公告)日：2009-12-10

申请号：PCT/IB2009/052189

申请日：2009-05-26

Applicant: PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH ,  KONINKLIJKE PHILIPS ELECTRONICS N. V. ,  URBAN, Max, C. ,  SEIFARTH, Christoph ,  SCHOLL, Gerd, J. ,  VAN LIEROP, Hendrikus, W., L., A., M.

Inventor： URBAN, Max, C. ,  SEIFARTH, Christoph ,  SCHOLL, Gerd, J. ,  VAN LIEROP, Hendrikus, W., L., A., M.

IPC: A61B6/00

CPC classification number: A61B6/547 ,  A61B6/035 ,  A61B6/56

Abstract: The invention provides a device for a computer tomography gantry (91) for transmitting data, wherein the gantry comprises a stationary part (92) and a rotary part (93). The device is adapted to transmit the data between the stationary part of the gantry (92) and the rotary part (93) of the gantry (91). The device comprises a hollow conductor (104, 204, 308) which is adapted to guide a first wave, a sender (102, 103) which is adapted to send the first wave inside the hollow conductor and a receiver (106) which is adapted to receive the first wave after a runtime inside the hollow conductor (104, 204, 308). A further aspect of the invention is a computer tomography gantry (91) comprising a device according to the inventive concept. Using the described device allows to transmit data between the rotary (93) and the stationary part (92), to measure a rotating speed of the rotary part (93) and to measure a position of the rotary part (93) with respect to the stationary part (92).

Abstract translation: 本发明提供一种用于传输数据的计算机断层摄影台架（91）的装置，其中所述机架包括固定部分（92）和旋转部分（93）。 该装置适于在台架的固定部分（92）和台架（91）的旋转部分（93）之间传送数据。 该装置包括适于引导第一波的空心导体（104,204,308），适于将第一波发送到中空导体内的发送器（102,103）和适配的接收器（106） 以在中空导体（104,204,308）内的运行时间之后接收第一波。 本发明的另一方面是包括根据本发明构思的装置的计算机断层摄影台架（91）。 使用所描述的装置允许在旋转部件（93）和固定部件（92）之间传送数据，以测量旋转部件（93）的旋转速度并测量旋转部件（93）相对于 固定部分（92）。

公开(公告)号：WO2009044331A2

公开(公告)日：2009-04-09

申请号：PCT/IB2008053961

申请日：2008-09-29

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  PHILIPS CORP ,  KRASTEV KRASSIMIR TODOROV ,  SOEMERS HERMAN M J ,  VAN LIEROP HENDRIKUS W L A M ,  SANDERS RENATUS HENDRICUS MARI ,  NELLISSEN ANTONIUS JOHANNES MA

Inventor： KRASTEV KRASSIMIR TODOROV ,  SOEMERS HERMAN M J ,  VAN LIEROP HENDRIKUS W L A M ,  SANDERS RENATUS HENDRICUS MARIA ,  NELLISSEN ANTONIUS JOHANNES MARIA

IPC: G02B26/08

CPC classification number: G02B26/0833

Abstract: A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror recess 62 with a recess periphery 64, the frame 60 having a pair of opposed frame bars 66 on the recess periphery 64 along the rotation axis 58; a pair of cantilever beam assemblies 70, each of the pair of cantilever beam assemblies 70 being fixed to one of the pair of opposed frame bars 66 and coupled to one end of the pair of extension bars 56; and a pair of vertical support beams 40 connected between each of the pair of opposed frame bars 66 to the mirror body 50 along the rotation axis 58.

Abstract translation: 包括镜体50的MEMS扫描微镜，具有与旋转轴线58平行的一对延伸杆56的旋转轴线58的镜体50; 框架60形成具有凹部周边64的镜凹部62，框架60在凹部周边64上沿着旋转轴线58具有一对相对的框架杆66; 一对悬臂梁组件70，一对悬臂梁组件70中的每一个固定到一对相对的框架杆杆66中的一个，并且连接到一对延伸杆56的一端; 以及一对垂直支撑梁40，其连接在一对相对的框架杆66中的每一个之间，沿着旋转轴线58连接到镜体50。

公开(公告)号：WO2009044324A3

公开(公告)日：2009-05-28

申请号：PCT/IB2008053950

申请日：2008-09-29

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  KRASTEV KRASSIMIR T ,  NELLISSEN ANTONIUS J M ,  VAN LIEROP HENDRIKUS W L A M ,  SOEMERS HERMANUS M J R ,  SANDERS RENATUS H M

Inventor： KRASTEV KRASSIMIR T ,  NELLISSEN ANTONIUS J M ,  VAN LIEROP HENDRIKUS W L A M ,  SOEMERS HERMANUS M J R ,  SANDERS RENATUS H M

IPC: G02B26/10

CPC classification number: G02B26/0841 ,  G02B26/085 ,  G02B26/0858

Abstract: A MEMS scanning micromirror manufacturing method with a method for manufacturing a MEMS scanning micromirror having a cantilever beam including providing a silicon on insulator (SOI) wafer 200 having a first silicon layer 202, a second silicon layer 206, and an insulating layer 204 between the first silicon layer 202 and the second silicon layer 206, the thickness of the first silicon layer 202 being a final thickness of the cantilever beam 72; and fashioning the cantilever beam 72 from the first silicon layer 202 while maintaining the final thickness of the cantilever beam.

Abstract translation: 具有用于制造具有悬臂梁的MEMS扫描微镜的方法的MEMS扫描微镜制造方法包括提供具有第一硅层202，第二硅层206和位于第一硅层202之间的绝缘层204的绝缘体上硅（SOI）晶片200。 第一硅层202和第二硅层206，第一硅层202的厚度是悬臂梁72的最终厚度; 以及在保持悬臂梁的最终厚度的同时从第一硅层202形成悬臂梁72。

公开(公告)号：WO2009044360A1

公开(公告)日：2009-04-09

申请号：PCT/IB2008/054028

申请日：2008-10-02

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  KRASTEV, Krassimir, T. ,  VAN LIEROP, Hendrikus, W., L., A., M. ,  SOEMERS, Hermanus, M., J., R. ,  SANDERS, Renatus, H., M.

Inventor： KRASTEV, Krassimir, T. ,  VAN LIEROP, Hendrikus, W., L., A., M. ,  SOEMERS, Hermanus, M., J., R. ,  SANDERS, Renatus, H., M.

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B26/0841

Abstract: A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.

Abstract translation: 具有减小的动态变形的MEMS扫描微镜，其具有包括具有旋转轴线58的旋转轴线束120的反射镜支撑件; 平行于旋转轴线58的一对延伸杆56，每个具有第一端140，中点142和第二端144; 和一对X光束130，一对X光束130中的每一个具有十字中点134.一对X光束130中的一个连接到第一端140和每对延伸条56的中点142 ; 一对X梁130中的另一个连接到一对延伸杆56的中点142和第二端144; 并且旋转轴梁120连接到一对X光束130中的每一个的交叉中点134。