公开(公告)号：WO2008100143A1

公开(公告)日：2008-08-21

申请号：PCT/NL2008/050082

申请日：2008-02-14

Applicant: ASML NETHERLANDS B.V. ,  KRIVTSUN, Vladimir Mihailovitch ,  BANINE, Vadim Yevgenyevich ,  IVANOV, Vladimir Vitalevitch ,  KOROP, Evgeny Dmitrievich ,  KOSHELEV, Konstantin Nikolaevitch ,  SIDELNIKOV, Yurii Victorovitch ,  YAKUSHEV, Oleg

Inventor： KRIVTSUN, Vladimir Mihailovitch ,  BANINE, Vadim Yevgenyevich ,  IVANOV, Vladimir Vitalevitch ,  KOROP, Evgeny Dmitrievich ,  KOSHELEV, Konstantin Nikolaevitch ,  SIDELNIKOV, Yurii Victorovitch ,  YAKUSHEV, Oleg

IPC: G03F7/20

CPC classification number: G03F7/70916 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70858 ,  G03F7/70883 ,  G03F7/70983

Abstract: An apparatus for forming a beam of electromagnetic radiation includes a plasma radiation source (24), and a foil trap (25) provided with a plurality of thin foils (20) that extend substantially parallel to the direction of radiation from the plasma source (20). A grid (22) is disposed between the plasma radiation source (20) and the foil trap (24). A space is located between the grid (22) and the foil trap (24). The apparatus also include an electrical potential application circuit (28) that is constructed and arranged to apply an electrical potential to the grid (22) so that the grid (22) repels electrons emitted by the plasma radiation source (22) and creates a positive space charge between the grid (20) and the foil trap (24) to deflect ions emitted by the plasma radiation source (20) to the foil trap (24).

Abstract translation: 用于形成电磁辐射束的装置包括等离子体辐射源（24）和设置有多个薄箔（20）的箔捕获器（25），其基本平行于等离子体源（20）的辐射方向延伸 ）。 栅极（22）设置在等离子体辐射源（20）和箔阱（24）之间。 一个空间位于网格（22）和箔片陷阱（24）之间。 该装置还包括电位施加电路（28），其构造和布置成向电网（22）施加电势，使得电网（22）排斥由等离子体辐射源（22）发射的电子并产生正的 格栅（20）和箔捕获器（24）之间的空间电荷以将由等离子体辐射源（20）发射的离子偏转到箔捕获器（24）。

公开(公告)号：WO1997022137A1

公开(公告)日：1997-06-19

申请号：PCT/EP1996005731

申请日：1996-12-10

Applicant: PRIMA INDUSTRIES ESTABLISHMENT ,  YAKUSHEV, Oleg Felixovich ,  KASLIN, Victor Mikhailovich

Inventor： PRIMA INDUSTRIES ESTABLISHMENT

IPC: H01J61/00

CPC classification number: H01J61/00 ,  H01J61/38

Abstract: Disclosed is a new type of lamp (1) with a very high efficiency and a very high light intensity, which is capable of emitting visible light over virtually the entire visible region of the spectrum, producing virtually no IR radiation and virtually no UV radiation. In an illustrated preferred embodiment, the lamp comprises two bulbs (20, 30), one within the other. Arranged inside the first bulb (20) is an element (10) for generating UV radiation, for instance a standard mercury lamp. The space (21) between the first bulb (20) and the element (10) contains a dimer medium for converting UV radiation to visible light. The inside of the second bulb (30) is provided with a luminescent substance (31) for absorbing residual UV radiation, if any, leaving the first chamber (21), and for emitting visible light, and optionally the spectrum of the dimer radiation can be supplemented, for instance with red light.

Abstract translation: 公开了一种具有非常高的效率和非常高的光强度的新型灯（1），其能够在实际上在光谱的整个可见光区域发射可见光，几乎不产生IR辐射并且实际上没有UV辐射。 在所示的优选实施例中，灯包括两个灯泡（20,30），一个在另一个中。 在第一灯泡（20）内部布置有用于产生UV辐射的元件（10），例如标准汞灯。 第一灯泡（20）和元件（10）之间的空间（21）包含用于将UV辐射转换成可见光的二聚物介质。 第二灯泡（30）的内​​部设置有用于吸收离开第一室（21）的剩余UV辐射（如果有的话）的发光物质（31），并且用于发射可见光，并且可选地，二聚体辐射的光谱可以 补充，例如用红灯。

公开(公告)号：WO9534112A3

公开(公告)日：1996-03-07

申请号：PCT/EP9502250

申请日：1995-06-08

Applicant: PRIMA IND ESTABLISHMENT ,  YAKUSHEV OLEG FELIXOVICH ,  KASLIN VICTOR MIKHAILOVICH

Inventor： YAKUSHEV OLEG FELIXOVICH ,  KASLIN VICTOR MIKHAILOVICH

IPC: G11B7/125 ,  G21C17/07 ,  H01S3/094 ,  H04B10/155

CPC classification number: H01S3/094 ,  G11B7/125 ,  G21C17/07

Abstract: Disclosed is a dimer laser (50) which is able to produce a beam of laser light (25) with a spectrum extending over a large part of the visible wavelength range, including a part of the ultraviolet and/or a part of the infrared wavelength range, which spectrum is very rich in equidistant spectral lines. This is achieved in that the pump light (31) used for stimulating the laser emission is not coupled axially but sideways. Further described are a number of examples of uses of a dimer laser (50).

Abstract translation: 公开了一种二聚体激光器（50），其能够产生具有在可见波长范围的大部分上延伸的光谱的激光束（25），该光谱包括一部分紫外线和/或一部分红外波长 范围，哪个频谱在等距谱线上非常丰富。 这是因为用于刺激激光发射的泵浦光（31）不是轴向耦合而是侧向耦合。 进一步描述了二聚体激光器（50）的使用的多个示例。

公开(公告)号：WO1995034112A2

公开(公告)日：1995-12-14

申请号：PCT/EP1995002250

申请日：1995-06-08

Applicant: PRIMA INDUSTRIES ESTABLISHMENT ,  YAKUSHEV, Oleg Felixovich ,  KASLIN, Victor Mikhailovich

Inventor： PRIMA INDUSTRIES ESTABLISHMENT

IPC: H01S03/094

CPC classification number: H01S3/094 ,  G11B7/125 ,  G21C17/07

Abstract: Disclosed is a dimer laser (50) which is able to produce a beam of laser light (25) with a spectrum extending over a large part of the visible wavelength range, including a part of the ultraviolet and/or a part of the infrared wavelength range, which spectrum is very rich in equidistant spectral lines. This is achieved in that the pump light (31) used for stimulating the laser emission is not coupled axially but sideways. Further described are a number of examples of uses of a dimer laser (50).

Abstract translation: 公开了一种二聚体激光器（50），其能够产生具有在可见波长范围的大部分上延伸的光谱的激光束（25），包括一部分紫外线和/或一部分红外波长 范围内，等谱线谱非常丰富。 这是因为用于刺激激光发射的泵浦光（31）不是轴向耦合而是侧向耦合。 进一步描述了二聚体激光器（50）的使用的多个示例。