公开(公告)号：WO2009061670A3

公开(公告)日：2009-08-20

申请号：PCT/US2008081923

申请日：2008-10-31

Applicant: MATTSON TECH INC ,  ZUCKER MARTIN L ,  DEVINE DANIEL J ,  NAGORNY VLADIMIR ,  MOHN JONATHAN

Inventor： ZUCKER MARTIN L ,  DEVINE DANIEL J ,  NAGORNY VLADIMIR ,  MOHN JONATHAN

IPC: H01L21/68 ,  B44C1/22

CPC classification number: H01L21/68 ,  C23C14/50 ,  C23C14/541 ,  C23C16/4586 ,  F27B17/0025 ,  F27D5/0037 ,  H01L21/67109 ,  H01L21/67248

Abstract: A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.

Abstract translation: 公开了一种限定工件接收表面的工件支撑件。 工件支撑件包括多个流体区域。 诸如气体的流体被馈送到流体区域以与工件支撑件上的工件接触。 流体可以具有选择的热传导特性，用于在特定位置控制工件的温度。 根据本公开，至少某些流体区域处于不同的方位位置。 以这种方式，工件的温度不仅可以在径向方向上而且在角度方向上进行调节。

公开(公告)号：WO2009061670A2

公开(公告)日：2009-05-14

申请号：PCT/US2008/081923

申请日：2008-10-31

Applicant: MATTSON TECHNOLOGY, INC. ,  ZUCKER, Martin, L. ,  DEVINE, Daniel, J. ,  NAGORNY, Vladimir ,  MOHN, Jonathan

Inventor： ZUCKER, Martin, L. ,  DEVINE, Daniel, J. ,  NAGORNY, Vladimir ,  MOHN, Jonathan

IPC: H01L21/00 ,  H01L21/683

CPC classification number: H01L21/68 ,  C23C14/50 ,  C23C14/541 ,  C23C16/4586 ,  F27B17/0025 ,  F27D5/0037 ,  H01L21/67109 ,  H01L21/67248

Abstract: A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.

Abstract translation: 公开了一种限定工件接收表面的工件支架。 工件支撑件包括多个流体区域。 诸如气体之类的流体被供给到流体区域以与工件支撑件上的工件接触。 流体可以具有选定的热传导特性，用于在特定位置控制工件的温度。 根据本公开，至少某些流体区处于不同的方位位置。 以这种方式，工件的温度不仅可以在径向上调节，而且可以在角度方向上调节。