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公开(公告)号:WO2018232244A1
公开(公告)日:2018-12-20
申请号:PCT/US2018/037759
申请日:2018-06-15
Applicant: ALTA DEVICES, INC.
Inventor: RITENOUR, Andrew J. , RAU, Ileana , CANIZARES, Claudio , WASHINGTON, Lori D. , KAYES, Brendan M. , HE, Gang
IPC: H01L31/0304 , H01L31/0687 , H01L31/18
Abstract: A growth structure having a lattice transition under a release layer is used as a seed crystal for growth of optoelectronic devices. The optoelectronic device can be a single- or multi-junction photovoltaic device. The release layer can be selectively removed in an epitaxial lift-off (ELO) process to separate the optoelectronic device from the growth structure and leave the region with the lattice transition intact to reuse the growth structure to grow additional devices. A manufacturing method is described that includes providing a growth structure having a substrate and a lattice transition from a first lattice constant to a second lattice constant, depositing a release layer on the growth structure, depositing on the release layer an epitaxial layer having a lattice constant that matches the second lattice and including an optoelectronic device, and removing the release layer to separate the epitaxial layer and the optoelectronic device from the growth structure.