公开(公告)号：WO2021104622A1

公开(公告)日：2021-06-03

申请号：PCT/EP2019/082765

申请日：2019-11-27

Applicant: APPLIED MATERIALS, INC. ,  AUST, Henning ,  PIHAN, Clemens ,  ADLER, Timo ,  AENIS, Martin

Inventor： AUST, Henning ,  PIHAN, Clemens ,  ADLER, Timo ,  AENIS, Martin

IPC: H01L21/677

Abstract: A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for contactlessly holding the carrier (10) in a carrier transportation space (15), and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction. The second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet.

公开(公告)号：WO2020192911A1

公开(公告)日：2020-10-01

申请号：PCT/EP2019/057762

申请日：2019-03-27

Applicant: APPLIED MATERIALS, INC. ,  LANGHOFF, Sven ,  ERB, Rainer ,  AUST, Henning ,  AENIS, Martin

Inventor： LANGHOFF, Sven ,  ERB, Rainer ,  AUST, Henning ,  AENIS, Martin

IPC: H01L21/677 ,  F16C32/04 ,  H02K41/02 ,  B60L13/06

Abstract: A magnetic levitation system (100) for magnetically levitating a ferromagnetic element (150) is described. The magnetic levitation system (100) includes at least one electromagnetic actuator (178) coupled with one or more transformers (140) provided in a current supply system (135) for supplying current to the at least one electromagnetic actuator (178). Further, a substrate processing system including the magnetic levitation system and a method of measuring a distance between at least one electromagnetic actuator and a ferromagnetic element are described.

公开(公告)号：WO2020072507A1

公开(公告)日：2020-04-09

申请号：PCT/US2019/054089

申请日：2019-10-01

Applicant: APPLIED MATERIALS, INC.

Inventor： NEWMAN, Jacob ,  OLDENDORF, Ulrich ,  AENIS, Martin ,  CONSTANT, Andrew J. ,  ASSAF, Shay ,  HUDGENS, Jeffrey C. ,  BERGER, Alex ,  WEAVER, William T.

IPC: H01L21/677 ,  H01L21/67

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

公开(公告)号：WO2018166640A1

公开(公告)日：2018-09-20

申请号：PCT/EP2017/071651

申请日：2017-08-29

Applicant: APPLIED MATERIALS, INC. ,  EHMANN, Christian Wolfgang ,  SPÄH, Britta ,  AENIS, Martin ,  ADLER, Timo

Inventor： EHMANN, Christian Wolfgang ,  SPÄH, Britta ,  AENIS, Martin ,  ADLER, Timo

IPC: H01L21/67 ,  H01L21/677

Abstract: An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base (30), and a carrier (50) which is movable relative to the base (30). The apparatus further includes at least three magnetic bearings, by means of which the carrier (50) is supported on the base (30) in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction (2), wherein at least two of the magnetic bearings (10) are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit (100), which is fixed to the carrier (50) or to the base (30).