公开(公告)号：WO2021154816A1

公开(公告)日：2021-08-05

申请号：PCT/US2021/015225

申请日：2021-01-27

Applicant: APPLIED MATERIALS, INC.

Inventor： CHEN, Yikai ,  PAL, Aniruddha ,  CHAUDHARI, Saurabh M. ,  YANG, Yao-Hung ,  SALIMIAN, Siamak ,  CHO, Tom K.

IPC: C04B41/50 ,  C04B41/45 ,  C04B41/51 ,  H01L21/67 ,  H01J37/32

Abstract: Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.