公开(公告)号：WO2016178777A1

公开(公告)日：2016-11-10

申请号：PCT/US2016/026156

申请日：2016-04-06

Applicant: APPLIED MATERIALS, INC.

Inventor： RAJ, Govinda ,  KUMAR, Hanish ,  ZHANG, Lin ,  WU, Stanley

IPC: H01L21/02 ,  H01L21/67 ,  C23F15/00

CPC classification number: F16K41/10 ,  C23C16/4404 ,  F16L11/15 ,  H01J37/32477 ,  H01J37/32495 ,  H01L21/68757 ,  H01L21/68792

Abstract: Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.

Abstract translation: 本文所述的实施方案保护室部件免受在高温下使用的腐蚀性清洁气体的影响。 在一个实施例中，室部件包括至少一个波纹管，其包括通过管状手风琴结构联接到底部安装凸缘的顶部安装凸缘。 在至少管状手风琴结构的外表面上设置涂层。 涂层包括聚四氟乙烯，聚对二甲苯C，聚对二甲苯D，类金刚石碳（DLC），氧化钇稳定的氧化锆，镍，氧化铝或铝硅镁钇氧化合物中的至少一种。 在一个实施例中，室部件是具有内部波纹管的阀。