公开(公告)号：WO2022204482A1

公开(公告)日：2022-09-29

申请号：PCT/US2022/021891

申请日：2022-03-25

Applicant: APPLIED MATERIALS, INC.

Inventor： KASHYAP, Dhritiman Subha ,  SHEREKAR, Amit Rajendra ,  SHAH, Kartik ,  AGARWAL, Ashutosh ,  HOFFMANN, Eric J. ,  BALUJA, Sanjeev ,  PARKHE, Vijay D.

IPC: H01L21/67 ,  H01L21/687 ,  C23C16/458

Abstract: A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.