公开(公告)号：WO2015063006A1

公开(公告)日：2015-05-07

申请号：PCT/EP2014/072948

申请日：2014-10-27

Applicant: ASELTA NANOGRAPHICS

Inventor： MANAKLI, Serdar ,  MARTIN, Luc

IPC: G03F1/78 ,  G03F7/20 ,  H01J37/317 ,  H01J37/302 ,  G03F1/00

CPC classification number: G03F1/70 ,  G03F1/68 ,  G03F7/70433 ,  G03F7/70558 ,  G06F17/5068 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/31776

Abstract: The invention discloses a computer implemented method of fracturing a free form target design into elementary shots to get a minimum number of shots for a defined roughness of the contour. The method includes determining a first set of shots which pave the target design, except for gaps, and then determining a second set of shots to fill or cover the gaps. The dose levels of the overlapping shots in the first or second sets of shots are determined so that the compounded dose is adequate in view of the resist threshold, taking into account the proximity effect which affects the actual imprint of the shots on the insulated target. Advantageously, a dose geometry modulation is applied. Advantageously, rounded shot prints are produced by shots which are not circular. Shots and rounded shot prints may or may not overlap. The degree of overlap may be determined as a function of a desired optimization of a fit criteria between a printed contour and the contour of the desired pattern. Placements and dimensions of the shots may be determined by a plurality of fit criteria between said printed contour and said contour of the desired pattern.

Abstract translation: 本发明公开了一种计算机实现的方法，将自由形式目标设计分解为基本射击，以获得轮廓的规定粗糙度的最小射击次数。 该方法包括确定除了间隙之外铺平目标设计的第一组拍摄，然后确定第二组拍摄以填充或覆盖间隙。 确定第一组或第二组拍摄中的重叠拍摄的剂量水平，以便鉴于影响绝缘目标上的拍摄实际印记的邻近效应，鉴于抗蚀剂阈值，配合剂量是足够的。 有利地，施加剂量几何调制。 有利地，通过不是圆形的镜头产生圆形镜头照片。 拍摄和圆角拍摄的照片可能重叠也可能不重叠。 可以根据期望的图案的打印轮廓和轮廓之间的拟合标准的优化来确定重叠程度。 拍摄的放置和尺寸可以由所述打印轮廓和所需图案的所述轮廓之间的多个拟合标准确定。

公开(公告)号：WO2014127850A1

公开(公告)日：2014-08-28

申请号：PCT/EP2013/053883

申请日：2013-02-27

Applicant: ASELTA NANOGRAPHICS

Inventor： TIPHINE, Charles ,  QUAGLIO, Thomas ,  MARTIN, Luc

IPC: H01J37/302 ,  H01J37/317

CPC classification number: G06F17/5081 ,  B82Y10/00 ,  B82Y40/00 ,  G06F17/50 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/31764 ,  H01J2237/31776

Abstract: The invention discloses a computer implemented method of fracturing a surface into elementary features (720a) wherein the desired pattern has a rectilinear or curvilinear form. Depending upon the desired pattern, a first fracturing will be performed of a non-overlapping or an overlapping type. If the desired pattern is resolution critical, it will be advantageous to perform a second fracturing step using eRIFs (730a). These eRIFs will be positioned either on the edges or on the medial axis (710a) or skeleton of the desired pattern. The invention further discloses method steps to define the position and shape of the elementary features used for the first and second fracturing steps.

Abstract translation: 本发明公开了一种将表面压裂成基本特征（720a）的计算机实现方法，其中期望的图案具有直线或曲线形式。 根据期望的图案，将执行非重叠或重叠类型的第一压裂。 如果期望的模式是分辨率关键的，则使用eRIF（730a）执行第二压裂步骤将是有利的。 这些eRIF将被定位在所需图案的边缘或中间轴（710a）或骨架上。 本发明还公开了用于限定用于第一和第二压裂步骤的基本特征的位置和形状的方法步骤。