公开(公告)号：WO2021074043A1

公开(公告)日：2021-04-22

申请号：PCT/EP2020/078518

申请日：2020-10-09

Applicant: ASML NETHERLANDS B.V.

Inventor： TREES, Dietmar, Uwe, Herbert ,  BUIS, Edwin, Johan ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  JOHNSON, Brandon, Michael

IPC: C03C27/04 ,  H05G2/00 ,  C03C27/02

Abstract: A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.

公开(公告)号：WO2015144370A1

公开(公告)日：2015-10-01

申请号：PCT/EP2015/053611

申请日：2015-02-20

Applicant: ASML NETHERLANDS B.V.

Inventor： BUIS, Edwin, Johan ,  HOL, Sven, Antoin, Johan

IPC: G03F7/20

CPC classification number: G03F7/70075 ,  G02B7/1815 ,  G02B7/1828 ,  G03F7/70116 ,  G03F7/70825 ,  G03F7/70891

Abstract: Disclosed is a housing (701) for an array of densely packed components, the housing being operable to provide individual cooling to each of the components. The housing comprises an array of component apertures (705), each component aperture for receiving one of the components. The wall defining each of the component aperture comprises at least one cooling channel defined by an inner layer and an outer layer; and the outer layer of the at least one cooling channel comprises one or more fluid flow apertures enabling fluid flow between the at least one cooling channel of the component aperture and an at least one cooling channel of an adjacent component aperture. The cooling channels and fluid flow apertures define a cooling path for a coolant between an inlet and an outlet. Also disclosed is a method of manufacture of such a housing and various apparatuses comprising said housing.

Abstract translation: 公开了一种用于密集组件阵列的壳体（701），该壳体可操作以向每个部件提供单独的冷却。 壳体包括阵列的组件孔（705），每个组件孔用于接收组件之一。 限定每个部件孔的壁包括由内层和外层限定的至少一个冷却通道; 并且所述至少一个冷却通道的外层包括一个或多个流体流动孔，使得能够在所述部件孔的所述至少一个冷却通道与相邻部件孔的至少一个冷却通道之间流体流动。 冷却通道和流体流通孔限定了用于入口和出口之间的冷却剂的冷却路径。 还公开了一种制造这种壳体的方法和包括所述壳体的各种装置。

公开(公告)号：WO2023089082A1

公开(公告)日：2023-05-25

申请号：PCT/EP2022/082376

申请日：2022-11-18

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  VAN DRENT, William, Peter ,  REUVERS, Nicolaas, Johannes, Wilhelmus ,  BUIS, Edwin, Johan ,  DIRECKS, Daniel, Jozef, Maria ,  FEIJTS, Maurice, Wilhelmus, Leonardus, Hendricus ,  JACOBS, Johannes, Henricus, Wilhelmus ,  KNAPEN, Bart, Leonardus ,  WESTERLAKEN, Jan, Steven, Christiaan

IPC: H05G2/00

Abstract: The present invention relates to an apparatus for supplying a liquid target material to a radiation source, comprising a first reservoir, a pressurizing system configured to pressurize a hydraulic fluid, and a separating device configured to separate the hydraulic fluid from the liquid target material in the first reservoir and to transfer a pressure from the hydraulic fluid to the liquid target material. The invention also relates to an associated method of supplying liquid target material to a radiation source.

公开(公告)号：WO2023066650A1

公开(公告)日：2023-04-27

申请号：PCT/EP2022/077541

申请日：2022-10-04

Applicant: ASML NETHERLANDS B.V.

Inventor： BUIS, Edwin, Johan ,  BIJLAART, Erik, Theodorus, Maria ,  SWINCKELS, Robertus, Martinus, Johannes ,  VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus

IPC: H05G2/00

Abstract: A fuel droplet nozzle assembly comprises a first hollow body and a piezoelectric element. The first hollow body comprises an inlet and an outlet and a bore extending between the inlet and the outlet. In use, fuel (for example liquid tin) may be provided into the first hollow body via the inlet under pressure. The piezoelectric element surrounds and is in direct or indirect contact with the first hollow body. In use, the piezoelectric element may be configured to squeeze the first hollow body at an excitation frequency and can be used to generate sound waves in the first hollow body. The fuel droplet nozzle assembly may further comprise a second hollow body surrounding and in direct or indirect contact with the piezoelectric element. Additionally or alternatively, the first hollow body may be a composite body formed from at least: an outer support portion formed from metal; and an inner portion formed from a glass material.

公开(公告)号：WO2022258391A2

公开(公告)日：2022-12-15

申请号：PCT/EP2022/064365

申请日：2022-05-26

Applicant: ASML NETHERLANDS B.V.

Inventor： DRIESSEN, Theodorus, Wilhelmus ,  ROLLINGER, Bob ,  TREES, Dietmar, Uwe, Herbert ,  LUKENS, Joshua, Mark ,  VASCHENKO, Georgiy, Olegovich ,  BUIS, Edwin, Johan

IPC: H05G2/00 ,  B05B5/035 ,  B01L3/02 ,  B05B1/086 ,  B05B17/063 ,  B05B17/0661 ,  B05B17/0669 ,  H05G2/006

Abstract: A system includes: a conduit including an orifice configured to fluidly couple to a reservoir and to emit molten target material; an actuator including at least a first zone and a second zone that is between the first zone and the orifice, where motion of the first zone and the second zone is transferred to an interior of the conduit; and a controller configured to apply a first actuation signal to the first zone and a second actuation signal to the second zone. The second actuation signal has a higher frequency than the first actuation signal.