公开(公告)号：WO2023089080A1

公开(公告)日：2023-05-25

申请号：PCT/EP2022/082373

申请日：2022-11-18

Applicant: ASML NETHERLANDS B.V.

Inventor： DIRECKS, Daniel, Jozef, Maria ,  VAN DRENT, William, Peter ,  VERHAGEN, Martinus, Cornelis, Maria ,  DRIESSEN, Theodorus, Wilhelmus ,  HEEZIUS, Marcel, Johannes, Theodorus ,  WESTERLAKEN, Jan, Steven, Christiaan ,  JACOBS, Johannes, Henricus, Wilhelmus ,  DERKS, Sander, Catharina, Reinier ,  SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  WILLEMS, Petrus, Adrianus

IPC: H05G2/00

Abstract: The present invention relates to an apparatus for supplying a liquid target material to a radiation source, comprising a reservoir system including a reservoir configured to be connected to an ejection system and a pressurizing system to pressurize liquid target material in the reservoir, wherein the pressurizing system comprises a device configured to transfer pressure to the liquid target material, wherein the pressurizing system is configured to apply a pressure of at least 700 bar. The invention also relates to a fuel emitter, radiation source, lithographic apparatus and liquid target material supplying method.

公开(公告)号：WO2022189088A1

公开(公告)日：2022-09-15

申请号：PCT/EP2022/053207

申请日：2022-02-10

Applicant: ASML NETHERLANDS B.V.

Inventor： TREES, Dietmar, Uwe, Herbert ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  ATENCIO, Edgardo, Zamora ,  DVORAK, Ondrej

IPC: F16K13/10 ,  F16K99/00 ,  F16L55/103 ,  H05G2/00

Abstract: A component for a target material transfer system for a laser-produced plasma radiation source and a method of manufacturing such a component are disclosed. The component, which may, for example, be a target material transfer line, a freeze valve, or a flow restrictor, or some combination of this functionality, is made up of a glass capillary body sealed with glass-to-metal seals at both of its ends to a respective metal fitting. The method of manufacturing involves heating the ends of the glass capillary and then forming them to conform with, and forming a glass-to-metal seal with, the interior contours of the respective channels in each of the metal fittings.

公开(公告)号：WO2022017866A1

公开(公告)日：2022-01-27

申请号：PCT/EP2021/069426

申请日：2021-07-13

Applicant: ASML NETHERLANDS B.V.

Inventor： SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  TELKAR, Vikas, Giridhar ,  ERSHOV, Alexander, Igorevich ,  DRIESSEN, Theodorus, Wilhelmus ,  KINCAL, Serkan

IPC: H05G2/00 ,  F16J15/06

Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.

公开(公告)号：WO2020069001A1

公开(公告)日：2020-04-02

申请号：PCT/US2019/052985

申请日：2019-09-25

Applicant: ASML NETHERLANDS B.V.

Inventor： TREES, Dietmar, Uwe, Herbert ,  MUSHI, Simon, Romeo, Estomih ,  SAMS, Benjamin, Andrew ,  MEDINA OSEGUERA, Alfonso ,  DRIESSEN, Theodorus, Wilhelmus

IPC: H05G2/00

Abstract: Apparatus for and method of controlling introduction of EUV target material into an EUV chamber in which the EUV target material is selectively prevented from entering the EUV chamber when the EUV target material is not needed for the formation of a plasma in the EUV chamber such as during periods when a dispenser of the EUV material is initially started or is being tuned.

公开(公告)号：WO2021233645A1

公开(公告)日：2021-11-25

申请号：PCT/EP2021/060798

申请日：2021-04-26

Applicant: ASML NETHERLANDS B.V.

Inventor： SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  DRIESSEN, Theodorus, Wilhelmus ,  BORGGREVE, Herman, Harry ,  JOHNSON, Brandon, Michael ,  TELKAR, Vikas, Giridhar

IPC: H05G2/00

Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.

公开(公告)号：WO2020239625A1

公开(公告)日：2020-12-03

申请号：PCT/EP2020/064273

申请日：2020-05-22

Applicant: ASML NETHERLANDS B.V.

Inventor： SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  DRIESSEN, Theodorus, Wilhelmus ,  ROLLINGER, Bob

IPC: H05G2/00 ,  F16K51/00

Abstract: A fluid control device (100) includes a structure (120) defining a valve cavity, a first fluid port (135), a second fluid port (140), and a third fluid port (145) configured to be fluidly coupled to a hermetic interior (105) of a body; and a plunger valve (130) within the valve cavity and configured to move between first and second modes while maintaining the hermetic interior of the body. In the first mode, the plunger valve is open such that a first fluid flow path is open between the hermetic interior and the first fluid port and fluid is free to pass between the first fluid port and the hermetic interior. In the second mode, the plunger valve is closed such that the first fluid port is blocked from the hermetic interior by the plunger valve and a second fluid flow path is open between the hermetic interior and the second fluid port.

公开(公告)号：WO2021239382A1

公开(公告)日：2021-12-02

申请号：PCT/EP2021/061258

申请日：2021-04-29

Applicant: ASML NETHERLANDS B.V.

Inventor： SWERDLOW, Ethan, Marcus ,  BESSEMS, David ,  TEDROW, Jon, David ,  RAI, Sandeep ,  CAVALIER, Grant, Steven ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  ATENCIO, Edgardo, Zamora ,  JOHNSON, Brandon, Michael

IPC: H05G2/00

Abstract: Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fuel at a predetermined incident angle. The method can further include receiving 5a portion of the inspection beam reflected by the top surface of the radiation fuel at a sensor located adjacent to the view port. Also, the method can include measuring a distance to the top surface of the radiation fuel, and calculating a fill level of the radiation fuel in the fuel tank based on the measured distance.

公开(公告)号：WO2021074043A1

公开(公告)日：2021-04-22

申请号：PCT/EP2020/078518

申请日：2020-10-09

Applicant: ASML NETHERLANDS B.V.

Inventor： TREES, Dietmar, Uwe, Herbert ,  BUIS, Edwin, Johan ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  JOHNSON, Brandon, Michael

IPC: C03C27/04 ,  H05G2/00 ,  C03C27/02

Abstract: A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.

公开(公告)号：WO2020141057A1

公开(公告)日：2020-07-09

申请号：PCT/EP2019/085023

申请日：2019-12-13

Applicant: ASML NETHERLANDS B.V.

Inventor： SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  VASCHENKO, Georgiy, O.

IPC: H05G2/00

Abstract: Apparatus for controlling introduction of EUV target material into an EUV chamber in which a flow restrictor orifice is placed in a flow path of target material through the droplet generator, for example, at a position upstream of a filter within the droplet generator. Also, a liquid tin sensor, for example, a conduction probe or electrical load detector, which may be located in the volume of a droplet generator heater blocks. The flow restrictor can be configured to serve additionally as a seal, for example, for the filter. Thus, the flow restrictor can be configured as a metal disk that can also serve as a sealing gasket. For example, the metal may be unannealed tantalum, tantalum-tungsten alloy, annealed molybdenum, molybdenumrhenium alloy, or annealed rhenium.