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    APPARATUS FOR PROTECTING EUV OPTICAL ELEMENTS
    1.
    发明申请
    APPARATUS FOR PROTECTING EUV OPTICAL ELEMENTS 审中-公开
    保护EUV光学元件的装置

    公开(公告)号：WO2015034685A1

    公开(公告)日：2015-03-12

    申请号：PCT/US2014/052169

    申请日：2014-08-21

    Applicant: ASML NETHERLANDS B.V.

    Inventor： ERSHOV, Alexander, I. ,  BURKE, Jeremy

    IPC: G03F7/00

    CPC classification number: G02B27/0006 ,  H01J37/32477

    Abstract: Apparatus having a chamber with an interior wall and a region within the chamber from which a contaminating material emanates when the apparatus is in operation. A plurality of vanes is positioned on a portion of the interior wail, each of the vanes having a first surface which is oriented along a direction between the vane and the region and a second surface adjacent the first surface which is oriented to deflect the contaminating material striking the second surface away from the region, the second surfaces being dimensioned and juxtaposed with respect to one another such that the second surfaces substantially prevent the contaminating material from striking the portion of the interior wall.

    Abstract translation: 具有腔室的设备具有内壁和腔室内的区域，当设备运行时污染物质从该腔室发出。 多个叶片位于内部壁部的一部分上，每个叶片具有沿着叶片和区域之间的方向定向的第一表面和邻近第一表面的第二表面，该第二表面被定向成偏转污染物质 将第二表面撞击远离区域，第二表面的尺寸和尺寸相对于彼此并置，使得第二表面基本上防止污染材料撞击内壁的部分。

    COLLECTOR FLOW RING
    2.
    发明申请
    COLLECTOR FLOW RING 审中-公开

    公开(公告)号：WO2021130017A1

    公开(公告)日：2021-07-01

    申请号：PCT/EP2020/085146

    申请日：2020-12-09

    Applicant: ASML NETHERLANDS B.V.

    Inventor： HARTUNG, Taylor, John ,  MA, Yue ,  LANGLOIS, Marc, Guy ,  BURKE, Jeremy ,  JOHNSON, Esteban, Joseph, Sandoval

    IPC: G03F7/20 ,  G03F7/70033 ,  G03F7/70916

    Abstract: Systems, apparatuses, and methods are provided for a collector flow ring (CFR) housing configured to mitigate an accumulation of fuel debris in an extreme ultraviolet (EUV) radiation system. An example CFR housing can include a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the CFR housing. The example CFR housing can further include a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the CFR housing. The example CFR housing can further include a shroud mounting structure configured to support a shroud assembly, a cooling flow channel configured to transport a fluid, and a plurality of optical metrology ports configured to receive a plurality of optical metrology tubes.

    ENHANCED THERMAL CONDUCTIVITY IN VACUUM
    3.
    发明申请
    ENHANCED THERMAL CONDUCTIVITY IN VACUUM 审中-公开

    公开(公告)号：WO2021121986A1

    公开(公告)日：2021-06-24

    申请号：PCT/EP2020/084186

    申请日：2020-12-02

    Applicant: ASML NETHERLANDS B.V.

    Inventor： BURKE, Jeremy ,  MA, Yue ,  LANGLOIS, Marc, Guy

    IPC: G03F7/20 ,  G03F7/70175 ,  G03F7/70841 ,  G03F7/70891 ,  G03F7/7095 ,  G03F7/70991 ,  G21K2201/065

    Abstract: A jointed component for a lithographic apparatus comprising a joint (16) between two or more mating surfaces (17a, 19a), at least one of the mating surfaces comprising tin (18). A jointed component for a lithographic apparatus comprises a joint between two or more components (17, 19) formed of a material other than tin, the two components joined at respective mating surfaces, at least one of the mating surfaces comprising tin thereon. Also described is a lithographic apparatus comprising a jointed component comprising a tin layer, the use of tin as a thermally conductive interface material in a lithographic apparatus, and a method of enhancing the thermal conductivity of a jointed connection of a lithographic apparatus.

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