公开(公告)号：WO2022207254A1

公开(公告)日：2022-10-06

申请号：PCT/EP2022/055900

申请日：2022-03-08

Applicant: ASML NETHERLANDS B.V.

Inventor： GU, Shichen ,  REN, Weiming ,  XI, Qingpo

IPC: H01J37/09 ,  H01J37/26 ,  H01J37/28

Abstract: Systems and methods of enhancing imaging resolution by reducing crosstalk between detection elements of a secondary charged-particle detector in a multi-beam apparatus are disclosed. The multi-beam apparatus may comprise an electro-optical system comprising a beam-limit aperture plate having a surface substantially perpendicular to an optical axis, the beam-limit aperture plate comprising a first aperture at a first distance relative to the surface of the beam-limit aperture plate, and a second aperture at a second distance relative to the surface of the beam-limit aperture plate, the second distance being different from the first distance. The first aperture may be a part of a first set of apertures of the beam-limit aperture plate at the first distance, and the second aperture may be a part of a second set of apertures of the beam-limit aperture plate at the second distance.

公开(公告)号：WO2023083574A1

公开(公告)日：2023-05-19

申请号：PCT/EP2022/079038

申请日：2022-10-19

Applicant: ASML NETHERLANDS B.V.

Inventor： GU, Shichen ,  XI, Qingpo ,  DOU, Juying

IPC: F16K51/02 ,  F16K3/18 ,  H01J37/00 ,  H01J37/28

Abstract: Systems with valves that increase cycle life and reduce particle generation. Embodiments may include a first movable member (413), a second movable member (411), and a third movable member (415); a first link (412_1, 412_2) coupled to the first movable member and the second movable member such that when the second movable member is moved laterally and the third movable member is stopped, the first link exerts a force on the first movable member that causes the first movable member to move towards a surface (409) and press against the surface to form a vacuum seal; and a second link ( 412_3) coupled to the first movable member and the third movable member such that when the first link causes the first movable member to move, the second link exerts a force on the first movable member that limits movement of the first movable member such that the first movable member moves towards the surface with limited offset.