公开(公告)号：WO2021037827A1

公开(公告)日：2021-03-04

申请号：PCT/EP2020/073704

申请日：2020-08-25

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Yixiang ,  LIU, Shibing ,  CAO, Shanhui ,  QIU, Kangsheng ,  DOU, Juying ,  LUO, Ying ,  LI, Yinglong ,  LI, Qiang ,  VAN DER WILK, Ronald ,  VAN DER TOORN, Jan-Gerard, Cornelis

IPC: H01J37/317 ,  H01J37/20 ,  H01L21/683

Abstract: Systems and methods for wafer grounding and wafer grounding location adjustment are disclosed. A first method may include receiving a first value of an electric characteristic associated with the wafer being grounded by an electric signal; determining a first control parameter using at least the first value; and controlling a characteristic of the electric signal using the first control parameter and the first value. A second method for adjusting a grounding location for a wafer may include terminating an electric connection between the wafer and at least one grounding pin in contact the wafer; adjusting a relative position between the wafer and the grounding pin; and restoring the electric connection between the grounding pin and the wafer. A third method may include causing a grounding pin to penetrate through a coating on the wafer by impact; and establishing an electrical connection between the grounding pin and the wafer.

公开(公告)号：WO2023083574A1

公开(公告)日：2023-05-19

申请号：PCT/EP2022/079038

申请日：2022-10-19

Applicant: ASML NETHERLANDS B.V.

Inventor： GU, Shichen ,  XI, Qingpo ,  DOU, Juying

IPC: F16K51/02 ,  F16K3/18 ,  H01J37/00 ,  H01J37/28

Abstract: Systems with valves that increase cycle life and reduce particle generation. Embodiments may include a first movable member (413), a second movable member (411), and a third movable member (415); a first link (412_1, 412_2) coupled to the first movable member and the second movable member such that when the second movable member is moved laterally and the third movable member is stopped, the first link exerts a force on the first movable member that causes the first movable member to move towards a surface (409) and press against the surface to form a vacuum seal; and a second link ( 412_3) coupled to the first movable member and the third movable member such that when the first link causes the first movable member to move, the second link exerts a force on the first movable member that limits movement of the first movable member such that the first movable member moves towards the surface with limited offset.

公开(公告)号：WO2023001480A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/067096

申请日：2022-06-23

Applicant: ASML NETHERLANDS B.V.

Inventor： LA FONTAINE, Bruno ,  DOU, Juying ,  DU, Zhidong ,  KUO, Che-Chia

IPC: H01J1/18 ,  H01J37/06

Abstract: Apparatuses and systems for stabilizing electron sources in charged particle beam inspection systems are provided. In some embodiments, a system may include an electron source comprising an emitting tip electrically connected to two electrodes and configured to emit an electron; and a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.

公开(公告)号：WO2018029018A1

公开(公告)日：2018-02-15

申请号：PCT/EP2017/069270

申请日：2017-07-31

Applicant: ASML NETHERLANDS B.V. ,  HERMES MICROVISION, INC.

Inventor： DOU, Juying ,  FAN, Zheng ,  KUO, Tzu-Yi ,  CHEN, Zhongwei

IPC: H01J9/02 ,  H01J1/14 ,  H01J1/304 ,  H01J37/06 ,  H01J37/065 ,  H01J37/073

Abstract: Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

Abstract translation: 公开了电子发射体和制造电子发射体的方法。 根据某些实施例，电子发射器包括具有直径在大约（0.05-10）微米范围内的平面区域的尖端。 电子发射器尖端被配置为释放场致发射电子。 电子发射器还包括涂覆在尖端上的功函降低材料。