公开(公告)号：WO2019166164A1

公开(公告)日：2019-09-06

申请号：PCT/EP2019/051950

申请日：2019-01-28

Applicant: STICHTING VU ,  STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN ,  UNIVERSITEIT VAN AMSTERDAM ,  ASML NETHERLANDS B.V.

Inventor： KURILOVICH, Dmitry ,  VERSOLATO, Oscar, Oreste ,  PINHEIRO DE FARIA PINTO, Tiago ,  WITTE, Stefan, Michiel

IPC: H05G2/00

Abstract: A radiation source (SO) of a laser-produced plasma type is described. The radiation source (SO) comprises a droplet generator (3a) configured to provide a fuel droplet (60). The radiation source (SO) comprises a laser system (1) configured to provide a pre-pulse and a main-pulse. The pre-pulse is operative to condition the fuel droplet (60) for receipt of main pulse. The main pulse is operative to convert the conditioned fuel droplet (60) into plasma. The radiation source (SO) comprises a sensing system (16) configured for sensing a characteristic of an oscillation of a spatial mass distribution of the fuel droplet (60). The radiation source (SO) comprises a control system (44) operative to adjust a polarization of the pre-pulse under control of the sensed characteristic. The polarization of the pre- pulse may affect the spatial mass distribution of the conditioned fuel droplet (60).

公开(公告)号：WO2020109152A1

公开(公告)日：2020-06-04

申请号：PCT/EP2019/082184

申请日：2019-11-22

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey ,  KURILOVICH, Dmitry ,  SBRIZZAI, Fabio ,  VAN DE KERKHOF, Marcus, Adrianus ,  VAN DER WOORD, Ties, Wouter ,  VAN DER ZANDE, Willem, Joan ,  VAN DUIVENBODE, Jeroen ,  VLES, David, Ferdinand

IPC: G03F1/62 ,  G03F1/82

Abstract: A membrane cleaning apparatus for removing particles from a membrane comprises: a membrane support; and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may comprise: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.

公开(公告)号：WO2021073799A1

公开(公告)日：2021-04-22

申请号：PCT/EP2020/073669

申请日：2020-08-25

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey ,  KURILOVICH, Dmitry

IPC: G03F1/62 ,  G03F1/82 ,  B08B7/00

Abstract: A membrane cleaning apparatus for removing particles from a membrane comprises: a membrane support for supporting the membrane; and a pressure pulse generating mechanism including one or more laser energy sources configured to generate a pressure pulse in a gas. The one or more energy laser sources may be focused to generate a pressure pulse in a gaseous atmosphere. The pressure pulse serves to dislodge particles on the membrane.