公开(公告)号：WO2020136044A2

公开(公告)日：2020-07-02

申请号：PCT/EP2019/085706

申请日：2019-12-17

Applicant: ASML NETHERLANDS B.V.

Inventor： BLEEKER, Arno, Jan ,  DE JAGER, Pieter, Willem, Herman ,  GOOSEN, Maikel, Robert ,  SMAKMAN, Erwin, Paul ,  MANGNUS, Albertus, Victor, Gerardus ,  REN, Yan ,  LASSISE, Adam

IPC: H01J37/147 ,  H01J37/26 ,  H01J37/04

Abstract: Apparatuses and methods for charged-particle detection may include a deflector system configured to direct charged-particle pulses, a detector having a detection element configured to detect the charged-particle pulses, and a controller having a circuitry configured to control the deflector system to direct a first and second charged-particle pulses to the detection element; obtain first and second timestamps associated with when the first charged-particle pulse is directed by the deflector system and detected by the detection element, respectively, and third and fourth timestamps associated with when the second charged-particle pulse is directed by the deflector system and detected by the detection element, respectively; and identify a first and second exiting beams based on the first and second timestamps, and the third and fourth timestamps, respectively.

公开(公告)号：WO2015139900A1

公开(公告)日：2015-09-24

申请号：PCT/EP2015/053251

申请日：2015-02-17

Applicant: ASML NETHERLANDS B.V.

Inventor： WINKELS, Koen, Gerhardus ,  DIJKSMAN, Johan, Frederik ,  LASSISE, Adam ,  PIJNENBURG, Johannes, Adrianus, Cornelis, Maria ,  YAKUNIN, Andrei, Mikhailovich

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A fuel emitter, comprising a first droplet stream generator and a droplet removal apparatus. The first droplet stream generator is arranged to emit a fuel stream comprising droplets separated by a first distance. The droplet removal apparatus is arranged to remove a first subset of droplets from the fuel stream before the first subset of droplets reach a target region such that the droplets of the fuel stream provided to the target region are separated a second distance greater than the first distance.

Abstract translation: 一种燃料发射器，包括第一液滴流发生器和液滴去除装置。 第一液滴流发生器布置成发射包含以第一距离分开的液滴的燃料流。 液滴去除装置被布置成在液滴的第一子集达到目标区域之前从燃料流中去除第一子集的液滴，使得提供给目标区域的燃料流的液滴被分离成大于第一距离的第二距离 。

公开(公告)号：WO2020136044A3

公开(公告)日：2020-07-02

申请号：PCT/EP2019/085706

申请日：2019-12-17

Applicant: ASML NETHERLANDS B.V.

Inventor： BLEEKER, Arno, Jan ,  DE JAGER, Pieter, Willem, Herman ,  GOOSEN, Maikel, Robert ,  SMAKMAN, Erwin, Paul ,  MANGNUS, Albertus, Victor, Gerardus ,  REN, Yan ,  LASSISE, Adam

IPC: H01J37/147 ,  H01J37/26 ,  H01J37/04

Abstract: Apparatuses (1400) and methods for charged-particle detection may include a deflector system (1408, 1410, 1412) configured to direct charged-particle pulses (1414, 1416, 1418), a detector having a detection element configured to detect the charged-particle pulses, and a controller having a circuitry configured to control the deflector system to direct a first and second charged-particle pulses to the detection element; obtain first and second timestamps associated with when the first charged-particle pulse is directed by the deflector system and detected by the detection element, respectively, and third and fourth timestamps associated with when the second charged-particle pulse is directed by the deflector system and detected by the detection element, respectively; and identify a first and second exiting beams based on the first and second timestamps, and the third and fourth timestamps, respectively.