公开(公告)号：WO2017102261A1

公开(公告)日：2017-06-22

申请号：PCT/EP2016/078427

申请日：2016-11-22

Applicant: ASML NETHERLANDS B.V.

Inventor： DIJKSMAN, Johan, Frederik ,  VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  AANGENENT, Wilhelmus, Henricus, Theodorus, Maria ,  HULTERMANS, Ronald, Johannes ,  VAN PUTTEN, Peter, Wilhelm, Hendrik

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005

Abstract: An EUV source for generating a beam of EUV radiation, has a droplet generator with a nozzle assembly to emit droplets of fuel from a nozzle towards a plasma formation location. The nozzle assembly receives the fuel from a reservoir. The nozzle assembly has a pump chamber receiving the fuel from the reservoir and an actuator to vibrate a membrane that forms a wall of the pump chamber. The wall is oriented perpendicularly to a direction wherein the nozzle emits the fuel. The nozzle assembly has first and second nozzle filters non-adjacently arranged in series in a path of the fuel from the pump chamber to the nozzle.

Abstract translation: 用于产生EUV辐射束的EUV源具有带有喷嘴组件的液滴发生器，以将燃料液滴从喷嘴发射到等离子体形成位置。 喷嘴组件接收来自储存器的燃料。 喷嘴组件具有接收来自储存器的燃料的泵室和致动器以振动形成泵室的壁的膜。 壁垂直于喷嘴喷出燃料的方向取向。 喷嘴组件具有第一和第二喷嘴过滤器，该第一和第二喷嘴过滤器在从泵室到喷嘴的燃料路径中不相邻地布置。

公开(公告)号：WO2015139900A1

公开(公告)日：2015-09-24

申请号：PCT/EP2015/053251

申请日：2015-02-17

Applicant: ASML NETHERLANDS B.V.

Inventor： WINKELS, Koen, Gerhardus ,  DIJKSMAN, Johan, Frederik ,  LASSISE, Adam ,  PIJNENBURG, Johannes, Adrianus, Cornelis, Maria ,  YAKUNIN, Andrei, Mikhailovich

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A fuel emitter, comprising a first droplet stream generator and a droplet removal apparatus. The first droplet stream generator is arranged to emit a fuel stream comprising droplets separated by a first distance. The droplet removal apparatus is arranged to remove a first subset of droplets from the fuel stream before the first subset of droplets reach a target region such that the droplets of the fuel stream provided to the target region are separated a second distance greater than the first distance.

Abstract translation: 一种燃料发射器，包括第一液滴流发生器和液滴去除装置。 第一液滴流发生器布置成发射包含以第一距离分开的液滴的燃料流。 液滴去除装置被布置成在液滴的第一子集达到目标区域之前从燃料流中去除第一子集的液滴，使得提供给目标区域的燃料流的液滴被分离成大于第一距离的第二距离 。

公开(公告)号：WO2018234260A1

公开(公告)日：2018-12-27

申请号：PCT/EP2018/066161

申请日：2018-06-19

Applicant: ASML NETHERLANDS B.V.

Inventor： WINKELS, Koen, Gerhardus ,  VASCHENKO, Georgiy O. ,  DRIESSEN, Theodorus, Wilhelmus ,  DIJKSMAN, Johan, Frederik ,  VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  AANGENENT, Wilhelmus, Henricus, Theodorus, Maria

IPC: H05G2/00

Abstract: A supply system for an extreme ultraviolet (EUV) light source includes an apparatus configured to be fluidly coupled to a reservoir configured to contain target material that produces EUV light in a plasma state, the apparatus including two or more target formation units, each one of the target formation units including: a nozzle structure configured to receive the target material from the reservoir, the nozzle structure including an orifice configured to emit the target material to a plasma formation location. The supply system further includes a control system configured to select a particular one of the target formation units for emitting the target material to the plasma formation location. An apparatus for a supply system of an extreme ultraviolet (EUV) light source includes a MEMS system fabricated in a semiconductor device fabrication technology, and the MEMS system including a nozzle structure configured to be fluidly coupled to a reservoir.

公开(公告)号：WO2017102931A1

公开(公告)日：2017-06-22

申请号：PCT/EP2016/081161

申请日：2016-12-15

Applicant: ASML NETHERLANDS B.V.

Inventor： DIJKSMAN, Johan, Frederik ,  VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  WINKELS, Koen, Gerhardus ,  DRIESSEN, Theodorus, Wilhelmus ,  VASCHENKO, Georgiy, O. ,  BAUMGART, Peter, Michael ,  AANGENENT, Wilhelmus, Henricus, Theodorus, Maria ,  NIEUWENKAMP, Jan, Okke ,  KAMPINGA, Wim, Ronald ,  RUOTSALAINEN, Jari

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/006

Abstract: Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being within a pressurized environment at substantially the same pressure as the fuel pressure within the droplet generator. A droplet generator can include an actuator in contact with and biased against a pump chamber by means of a biasing mechanism having an actuator support biased against the actuator. The actuator acts on the fuel within the pump chamber to create droplets. The actuator support has a material with a greater coefficient of thermal expansion than its surrounding structure, such that it is moveable within the surrounding structure at ambient temperature, but expands against the surrounding structure at an operating temperature, so as to clamp the actuator support against the surrounding structure at the operating temperature.

Abstract translation: 诸如在EUV辐射源中使用的液滴发生器，以及相关联的EUV辐射源和光刻设备。 液滴发生器可以包括喷嘴组件以喷射作为液滴的燃料，喷嘴组件处于与液滴发生器内的燃料压力基本相同的压力下的加压环境内。 液滴发生器可以包括致动器，该致动器通过偏置机构与泵室接触并且偏置抵靠泵室，该偏置机构具有偏置抵靠致动器的致动器支撑件。 致动器作用于泵室内的燃料以产生液滴。 致动器支撑件具有比其周围结构具有更大热膨胀系数的材料，使得其可在环境温度下在周围结构内移动，但在工作温度下相对于周围结构膨胀，从而将致动器支撑件夹紧 在工作温度下的周围结构。