公开(公告)号：WO2022002560A1

公开(公告)日：2022-01-06

申请号：PCT/EP2021/065676

申请日：2021-06-10

Applicant: ASML NETHERLANDS B.V.

Inventor： SIMMONS, Rodney, D ,  KAMBHAMPATI, Murali, Krishna ,  MITRY, Mark, Joseph ,  URONE, Dustin, Michael ,  LI, Shuqi ,  DONKER, Rilpho, Ludovicus ,  MCKENZIE, Paul, Alexander

IPC: G03F7/20 ,  G02B7/00 ,  H05G2/00 ,  G02B7/007 ,  G03F7/70033 ,  G03F7/70841 ,  G03F7/7085 ,  H05G2/005 ,  H05G2/008

Abstract: Systems, apparatuses, and methods are provided for optical metrology in an extreme ultraviolet (EUV) radiation system. An example system can include a metrology system and a window. An example metrology system can be configured to be disposed in a first environment and to perform one or more measurements of a region in a second environment along an optical axis of the metrology system. An example window can be configured to be disposed intersecting the optical axis and to isolate the metrology system from the second environment. The example window can be further configured to limit a transverse displacement from the optical axis to less than about ± 50 microns from a nominal transverse displacement from the optical axis at a primary focus of a radiation collector.

公开(公告)号：WO2018052909A1

公开(公告)日：2018-03-22

申请号：PCT/US2017/051208

申请日：2017-09-12

Applicant: ASML NETHERLANDS B.V.

Inventor： PRICE, Michael, Leslie ,  MITRY, Mark, Joseph ,  STINSON, Cory, Alan

IPC: H05G2/00 ,  G03F7/20

Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.

Abstract translation: 描述了用于测量目标的移动性质的方法。 该方法包括：形成至少部分与扩展目标区域重合的剩余等离子体，剩余等离子体是由在目标空间中的先前目标与先前辐射脉冲之间的相互作用形成的等离子体; 沿着朝向至少部分与扩展目标区域重叠的目标空间的轨迹释放当前目标; 当所述当前目标处于所述扩展目标区域内时，并且在先前和相邻目标已经与所述目标空间中的先前辐射脉冲相互作用之后，确定所述当前目标的一个或多个运动特性; 并且如果当前目标的所确定的一个或多个移动特性中的任何一个在可接受范围之外，则调整指向目标空间的辐射脉冲的一个或多个特性。