公开(公告)号：WO2022017687A1

公开(公告)日：2022-01-27

申请号：PCT/EP2021/065985

申请日：2021-06-14

Applicant: ASML NETHERLANDS B.V.

Inventor： JIN, Wenjie ,  SMORENBURG, Petrus, Wilhelmus ,  LIN, Nan ,  PORTER, Christina, Lynn ,  O'DWYER, David ,  ARNOLD, Cord, Louis ,  DONDERS, Sjoerd, Nicolaas, Lambertus

IPC: H05G2/00

Abstract: Disclosed is an illumination source comprising a gas delivery system being configured to provide a gas target for generating an emitted radiation at an interaction region of the gas target, and an interferometer for illuminating at least part of the gas target with an interferometer radiation to measure a property of the gas target.

公开(公告)号：WO2022228820A1

公开(公告)日：2022-11-03

申请号：PCT/EP2022/058586

申请日：2022-03-31

Applicant: ASML NETHERLANDS B.V.

Inventor： SMORENBURG, Petrus, Wilhelmus ,  EDWARD, Stephen ,  DONDERS, Sjoerd, Nicolaas, Lambertus ,  SCHELLEKENS, Adrianus, Johannes, Hendrikus ,  O'DWYER, David ,  NIKIPELOV, Andrey ,  DE VRIES, Gosse, Charles

IPC: G02F1/35 ,  G03F7/20 ,  G02F1/21 ,  G02F1/365

Abstract: An assembly comprises a space configured for placing a medium to receive a first radiation for generating a second radiation. In operation, the second radiation propagates coaxially with the first radiation after the medium. The assembly further comprises an optical element after the medium for transmitting or reflecting the first radiation with a surface area. The assembly is configured such that, in operation, a cleaning gas is in contact with the surface area. A reactive medium is generated from at least a part of the cleaning gas by the second radiation for removing a contamination from the surface area.

公开(公告)号：WO2022174991A1

公开(公告)日：2022-08-25

申请号：PCT/EP2022/050490

申请日：2022-01-12

Applicant: ASML NETHERLANDS B.V.

Inventor： SMORENBURG, Petrus, Wilhelmus ,  REININK, Johan ,  REIJNDERS, Marinus, Petrus ,  NIENHUYS, Han-Kwang ,  O'DWYER, David ,  ROOBOL, Sander, Bas ,  PORTER, Christina, Lynn ,  EDWARD, Stephen

IPC: G02B6/26 ,  H01S3/00 ,  H01S3/032 ,  H01S4/00 ,  G02F1/35 ,  G21K1/10 ,  H05G2/00

Abstract: An assembly and method for separating first radiation and second radiation in the far field, wherein the first radiation and the second radiation have non-overlapping wavelengths, The assembly comprises a capillary structure, wherein the first radiation and the second radiation propagate coaxially along at least a portion of the capillary structure, and an optical structure configured to control the spatial distribution of the first radiation outside of the capillary structure, through interference, such that the intensity of the first radiation in the far field is reduced along an optical axis of the second radiation.

公开(公告)号：WO2022017687A8

公开(公告)日：2022-01-27

申请号：PCT/EP2021/065985

申请日：2021-06-14

Applicant: ASML NETHERLANDS B.V.

Inventor： JIN, Wenjie ,  SMORENBURG, Petrus, Wilhelmus ,  LIN, Nan ,  PORTER, Christina, Lynn ,  O'DWYER, David ,  ARNOLD, Cord, Louis ,  DONDERS, Sjoerd, Nicolaas, Lambertus

IPC: H05G2/00 ,  H05G2/003 ,  H05G2/008

Abstract: Disclosed is an illumination source comprising a gas delivery system being configured to provide a gas target for generating an emitted radiation at an interaction region of the gas target, and an interferometer for illuminating at least part of the gas target with an interferometer radiation to measure a property of the gas target.

公开(公告)号：WO2021043952A1

公开(公告)日：2021-03-11

申请号：PCT/EP2020/074700

申请日：2020-09-04

Applicant: ASML NETHERLANDS B.V.

Inventor： SCHELLEKENS, Adrianus, Johannes, Hendrikus ,  O'DWYER, David ,  LIN, Nan ,  BRUSSAARD, Gerrit, Jacobus, Hendrik

IPC: H05G2/00

Abstract: A high harmonic generation assembly and method for generating high harmonic radiation. The assembly comprises a cavity configured to receive input radiation and increase the intensity of the input radiation inside the cavity for forming drive radiation suitable for use in high harmonic generation. The assembly further comprises an interaction region within the cavity at which, in use, a medium is present, the medium being configured to generate harmonic radiation by high harmonic generation when the drive radiation is incident thereupon, and an optical assembly configured to direct the drive radiation to pass through the interaction region, and comprising an output coupler comprising an aperture through which at least a part of the generated harmonic radiation is able to exit the cavity. The optical assembly is further configured to shape the drive radiation into a converging hollow beam before the drive radiation passes through the interaction region.