公开(公告)号：WO2017008993A1

公开(公告)日：2017-01-19

申请号：PCT/EP2016/063961

申请日：2016-06-16

Applicant: ASML NETHERLANDS B.V.

Inventor： SAEED, Seerwan ,  GATTOBIGIO, Giovanni, Luca ,  YU, Miao ,  EUMMELEN, Erik, Henricus, Egidius,Catharina ,  MIGCHELBRINK, Ferdy ,  VAN SOMMEREN, Daan, Daniel, Johannes,Antonius ,  VAN DE WINKEL, Jimmy, Matheus,Wilhelmus ,  RAAYMAKERS, Jeroen, Arnoldus, Leonardus, Johannes ,  RAS, Arnoldus, Johannes, Martinus, Jozeph ,  ARTS, Petrus, Martinus, Gerardus, Johannes ,  BUDDENBERG, Harold, Sebastiaan ,  KEUKENS,, Floor, Lodewijk ,  TANASA, Gheorghe ,  WOUTERS, Marijn

IPC: G03F7/20 ,  H01L21/66

CPC classification number: G03F7/7085 ,  G01N21/9515 ,  G03F7/70341 ,  G03F7/7065 ,  G03F7/70916 ,  H01L22/12 ,  H01L27/14627 ,  H01L27/14678 ,  H01L27/14862

Abstract: An inspection substrate (IW) for inspecting a component, e.g. a liquid confinement system, of an apparatus for processing production substrates, e.g. a lithographic apparatus. The inspection substrate comprises a body (200) having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus and a sensor, e.g. an imaging device (210) or a pressure sensor, for generating inspection information relating to a parameter of a component of the apparatus proximate to the inspection substrate, the sensor being embedded in the body.

Abstract translation: 用于检查部件的检查基板（IW），例如 液体限制系统，用于处理生产衬底的设备，例如， 光刻设备。 检查基板包括具有与生产基板相似的尺寸的主体（200），使得检查基板与装置和传感器（例如，传感器）兼容。 成像装置（210）或压力传感器，用于产生与靠近检查基板的装置的部件的参数有关的检查信息，传感器嵌入在主体中。