公开(公告)号：WO2017215944A1

公开(公告)日：2017-12-21

申请号：PCT/EP2017/063383

申请日：2017-06-01

Applicant: ASML NETHERLANDS B.V.

Inventor： GU, Ning ,  WANG, Daimian ,  WANG, Jen-Shiang

IPC: G03F7/20

CPC classification number: G03F7/70616 ,  G03F7/705 ,  G03F7/70633 ,  G06F17/5045

Abstract: A method including computing a multi-variable cost function, the multi-variable cost function representing a metric characterizing a degree of matching between a result when measuring a metrology target structure using a substrate measurement recipe and a behavior of a pattern of a functional device, the metric being a function of a plurality of design variables comprising a parameter of the metrology target structure, and adjusting the design variables and computing the cost function with the adjusted design variables, until a certain termination condition is satisfied.

Abstract translation: 一种包括计算多变量成本函数的方法，所述多变量成本函数表示表征当使用衬底测量配方测量度量衡目标结构时的结果与表征所述结果之间的匹配程度的度量的度量， 度量是包括度量目标结构的参数的多个设计变量的函数，并且调节设计变量并且利用调节的设计变量计算成本函数，直到某个终止条件是 满意。

公开(公告)号：WO2018041550A1

公开(公告)日：2018-03-08

申请号：PCT/EP2017/069969

申请日：2017-08-07

Applicant: ASML NETHERLANDS B.V.

Inventor： WANG, Daimian ,  ZHANG, Shengrui ,  FAN, Chi-Hsiang

IPC: G03F7/20 ,  G03F9/00

CPC classification number: G03F7/705 ,  G03F7/70508 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70683 ,  G03F9/7046

Abstract: A method including performing a first simulation for each of a plurality of different metrology target measurement recipes using a first model, selecting a first group of metrology target measurement recipes from the plurality of metrology target measurement recipes, the first group of metrology target measurement recipes satisfying a first rule, performing a second simulation for each of the metrology target measurement recipes from the first group using a second model, and selecting a second group of metrology target measurement recipes from the first group, the second group of metrology target measurement recipes satisfying a second rule, the first model being less accurate or faster than the second model and/or the first rule being less restrictive than the second rule.

Abstract translation: 包括使用第一模型针对多个不同度量衡目标测量配方中的每一个执行第一仿真，从多个度量衡目标测量配方中选择第一组度量目标测量配方， 第一组度量目标测量配方满足第一规则，使用第二模型针对来自第一组的每个计量目标测量配方执行第二模拟，并且从第一组中选择第二组度量目标测量配方，第二组 满足第二规则的计量目标测量配方组，第一模型比第二模型更不准确或更快，和/或第一规则比第二规则限制更少。