公开(公告)号：WO2023280489A1

公开(公告)日：2023-01-12

申请号：PCT/EP2022/065219

申请日：2022-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： LIANG, Haoyi ,  CHEN, Yani ,  YANG, Ming-Yang ,  YANG, Yang ,  HUANG, Xiaoxia ,  CHEN, Zhichao ,  YU, Liangjiang ,  WANG, Zhe ,  PU, Lingling

IPC: G06T7/00 ,  H01L21/66

Abstract: Systems and methods for detecting a defect on a sample include receiving a first image and a second image associated with the first image; determining, using a clustering technique, N first feature descriptor(s) for L first pixel(s) in the first image and M second feature descriptor(s) for L second pixel(s) in the second image, wherein each of the L first pixel(s) is co-located with one of the L second pixel(s), and L, M, and N are positive integers; determining K mapping probability between a first feature descriptor of the N first feature descriptor(s) and each of K second feature descriptor(s) of the M second feature descriptor(s), wherein K is a positive integer; and providing an output for determining whether there is existence of an abnormal pixel representing a candidate defect on the sample based on a determination that one of the K mapping probability does not exceed a threshold value.