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公开(公告)号：WO2020141072A1
公开(公告)日：2020-07-09
申请号：PCT/EP2019/085720
申请日：2019-12-17
Applicant: ASML NETHERLANDS B.V.
Inventor： ZHOU, Wentian , YU, Liangjiang , WANG, Teng , PU, Lingling , FANG, Wei
Abstract: Disclosed herein is a method of automatically obtaining training images to train a machine learning model that improves image quality. The method may comprise analyzing a plurality of patterns of data relating to a layout of a product to identify a plurality of training locations on a sample of the product to use in relation to training the machine learning model. The method may comprise obtaining a first image having a first quality for each of the plurality of training locations, and obtaining a second image having a second quality for each of the plurality of training locations, the second quality being higher than the first quality. The method may comprise using the first image and the second image to train the machine learning model.
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公开(公告)号：WO2023280487A1
公开(公告)日：2023-01-12
申请号：PCT/EP2022/065032
申请日：2022-06-02
Applicant: ASML NETHERLANDS B.V.
Inventor： LIANG, Haoyi , CHEN, Zhichao , PU, Lingling , CHANG, Fang-Cheng , YU, Liangjiang , WANG, Zhe
Abstract: An improved systems and methods for correcting distortion of an inspection image are disclosed. An improved method for correcting distortion of an inspection image comprises acquiring an inspection image, aligning a plurality of patches of the inspection image based on a reference image corresponding to the inspection image, evaluating, by a machine learning model, alignments between each patch of the plurality of patches and a corresponding patch of the reference image, determining local alignment results for the plurality of patches of the inspection image based on a reference image corresponding to the inspection image, determining an alignment model based on the local alignment results, and correcting a distortion of the inspection image based on the alignment model.
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Patent Agency Ranking3.发明申请
公开(公告)号：WO2022135938A1
公开(公告)日：2022-06-30
申请号：PCT/EP2021/084837
申请日：2021-12-08
Applicant: ASML NETHERLANDS B.V.
Inventor： WANG, Zhe , YU, Liangjiang , PU, Lingling
IPC: G06T7/00
Abstract: An improved systems and methods for generating a synthetic defect image are disclosed. An improved method for generating a synthetic defect image comprises acquiring a machine learning-based generator model; providing a defect-free inspection image and a defect attribute combination as inputs to the generator model; and generating by the generator model, based on the defect-free inspection image, a predicted synthetic defect image with a predicted defect that accords with the defect attribute combination.
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4.发明申请
公开(公告)号：WO2023088623A1
公开(公告)日：2023-05-25
申请号：PCT/EP2022/078928
申请日：2022-10-18
Applicant: ASML NETHERLANDS B.V.
Inventor： JIN, Shengcheng , PU, Lingling , YU, Liangjiang
Abstract: Apparatuses, systems, and methods for providing beams for defect detection and defect location identification associated with a sample of charged particle beam systems. In some embodiments, a method may include obtaining an image of a sample; determining defect characteristics from the image; generating an updated image based on the determined defect characteristics and the image; and aligning the updated image with a reference image.
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5.发明申请
公开(公告)号：WO2023083559A1
公开(公告)日：2023-05-19
申请号：PCT/EP2022/078619
申请日：2022-10-14
Applicant: ASML NETHERLANDS B.V.
Inventor： HOUBEN, Tim , PISARENCO, Maxim , HUISMAN, Thomas, Jarik , PU, Lingling , ZHOU, Jian , YU, Liangjiang , CHANG, Yi-Hsin , YEH, Yun- Ling
Abstract: Systems and methods for image analysis include obtaining a plurality of simulation images and a plurality of non-simulation images both associated with a sample under inspection, at least one of the plurality of simulation images being a simulation image of a location on the sample not imaged by any of the plurality of non-simulation images; and training an unsupervised domain adaptation technique using the plurality of simulation images and the plurality of non-simulation images as inputs to reduce a difference between first intensity gradients of the plurality of simulation images and second intensity gradients of the plurality of non-simulation images.
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公开(公告)号：WO2023280489A1
公开(公告)日：2023-01-12
申请号：PCT/EP2022/065219
申请日：2022-06-03
Applicant: ASML NETHERLANDS B.V.
Inventor： LIANG, Haoyi , CHEN, Yani , YANG, Ming-Yang , YANG, Yang , HUANG, Xiaoxia , CHEN, Zhichao , YU, Liangjiang , WANG, Zhe , PU, Lingling
Abstract: Systems and methods for detecting a defect on a sample include receiving a first image and a second image associated with the first image; determining, using a clustering technique, N first feature descriptor(s) for L first pixel(s) in the first image and M second feature descriptor(s) for L second pixel(s) in the second image, wherein each of the L first pixel(s) is co-located with one of the L second pixel(s), and L, M, and N are positive integers; determining K mapping probability between a first feature descriptor of the N first feature descriptor(s) and each of K second feature descriptor(s) of the M second feature descriptor(s), wherein K is a positive integer; and providing an output for determining whether there is existence of an abnormal pixel representing a candidate defect on the sample based on a determination that one of the K mapping probability does not exceed a threshold value.
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公开(公告)号：WO2021224435A1
公开(公告)日：2021-11-11
申请号：PCT/EP2021/062087
申请日：2021-05-06
Applicant: ASML NETHERLANDS B.V.
Inventor： FANG, Wei , FEI, Ruochong , PU, Lingling , ZHOU, Wentian , YU, Liangjiang , WANG, Bo
Abstract: An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a first image and a second image of multiple stacked layers of a sample that are taken with a first focal point and a second focal point, respectively, associating a first segment of the first image with a first layer among the multiple stacked layers and associating a second segment of the second image with a second layer among the multiple stacked layers, updating the first segment based on a first reference image corresponding to the first layer and updating the second segment based on a second reference image corresponding to the second layer, and combining the updated first segment and the updated second segment to generate a combined image including the first layer and the second layer.
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