公开(公告)号：WO2022048843A1

公开(公告)日：2022-03-10

申请号：PCT/EP2021/071634

申请日：2021-08-03

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： ALSAQQA, Ali ,  PATEL, Aabid ,  UEBEL, Patrick, Sebastian ,  ABDOLVAND, Amir ,  TEUNISSEN, Paulus Paulus, Antonius, Andreas ,  KADHIM, Wisam F.

IPC: G03F7/20 ,  G02F1/35

Abstract: Disclosed is a radiation source arrangement comprising; a radiation source operable to generate source radiation comprising source energy pulses; and at least one non-linear energy-filter being operable to filter said source radiation to obtain filtered radiation comprising filtered energy pulses. The at least one non-linear energy-filter is operable to mitigate variation in energy in said filtered radiation by reducing the energy level of said source energy pulses which have an energy level corresponding to one of both extremities of an energy distribution of said source energy pulses by a greater amount than said source energy pulses which have an energy level corresponding to a peak of said energy distribution.