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1.发明申请
公开(公告)号：WO2023025578A1
公开(公告)日：2023-03-02
申请号：PCT/EP2022/072178
申请日：2022-08-08
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： AJGAONKAR, Mahesh, Upendra , ABDOLVAND, Amir , PONGERS, Willem, Richard , BASELMANS, Johannes, Jacobus, Matheus , NI, Yongfeng
Abstract: Radiation source assembly and method for generating broadband radiation by spectral broadening. The radiation source assembly comprises a pump assembly configured to provide broadband input radiation. The pump assembly comprises a pump source configured to provide first radiation at a pump wavelength, and a broadband assembly configured to provide second radiation comprising a continuous wavelength range, wherein the first radiation and the second radiation form the broadband input radiation. The radiation source assembly further comprises an optical fibre configured to receive the broadband input radiation. The optical fibre comprises a core configured along at least a part of the length of the fibre to guide the received broadband input radiation during propagation through the fibre, so as to generate broadband radiation by spectral broadening to be output by the fibre.
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公开(公告)号：WO2022048843A1
公开(公告)日：2022-03-10
申请号：PCT/EP2021/071634
申请日：2021-08-03
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： ALSAQQA, Ali , PATEL, Aabid , UEBEL, Patrick, Sebastian , ABDOLVAND, Amir , TEUNISSEN, Paulus Paulus, Antonius, Andreas , KADHIM, Wisam F.
Abstract: Disclosed is a radiation source arrangement comprising; a radiation source operable to generate source radiation comprising source energy pulses; and at least one non-linear energy-filter being operable to filter said source radiation to obtain filtered radiation comprising filtered energy pulses. The at least one non-linear energy-filter is operable to mitigate variation in energy in said filtered radiation by reducing the energy level of said source energy pulses which have an energy level corresponding to one of both extremities of an energy distribution of said source energy pulses by a greater amount than said source energy pulses which have an energy level corresponding to a peak of said energy distribution.
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公开(公告)号：WO2022008164A1
公开(公告)日：2022-01-13
申请号：PCT/EP2021/065798
申请日：2021-06-11
Applicant: ASML NETHERLANDS B.V.
Abstract: Disclosed is an optical component for a broadband light source device, the optical component being configured for generating a broadband output upon receiving pump radiation and comprising: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling said HC-PCF, wherein said gas mixture comprises a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas comprising or consisting of Helium.
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Patent Agency Ranking4.发明申请
公开(公告)号：WO2020259972A1
公开(公告)日：2020-12-30
申请号：PCT/EP2020/065315
申请日：2020-06-03
Applicant: ASML NETHERLANDS B.V.
Inventor： ABDOLVAND, Amir
Abstract: Disclosed is a broadband light source device, being configured for generating broadband or white light output. The broadband light source device comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within the gas cell. A gas mixture is comprised within the gas cell and the hollow- core photonic crystal fiber. The gas mixture comprises at least one Raman active molecular gas constituting more than 2% of the gas mixture, such that the broadband light source device operates in a balanced Kerr-Raman nonlinear interaction regime.
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5.发明申请
公开(公告)号：WO2021037472A1
公开(公告)日：2021-03-04
申请号：PCT/EP2020/071424
申请日：2020-07-29
Applicant: ASML NETHERLANDS B.V.
Inventor： UEBEL, Patrick, Sebastian , BAUERSCHMIDT, Sebastian, Thomas , GÖTZ, Peter, Maximilian , NIKIPELOV, Andrey , ABDOLVAND, Amir , UZUNBAJAKAVA, Natallia, Eduardauna
IPC: G02F1/3501 , G02F1/365
Abstract: A system and method for providing a light source is disclosed. In one arrangement, the light source comprises a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more of: the exchange of gas between the optical path and the remainder of the gas cell; ingress of plasma towards or into the optical fiber; and radical flux towards etch-susceptible surfaces.
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公开(公告)号：WO2020083624A1
公开(公告)日：2020-04-30
申请号：PCT/EP2019/076832
申请日：2019-10-03
Applicant: ASML NETHERLANDS B.V.
Inventor： VAN LEEUWEN, Robbert, Edgar , ABDOLVAND, Amir
IPC: C03B37/012 , C03C25/68 , G03F7/20
Abstract: An optical fiber, manufacturing intermediate for forming an optical fiber and a method for forming an optical fiber. The method comprises providing a manufacturing intermediate (300) having an elongate body and comprising an outer tube (308) and a plurality of inner tubes (304), the plurality of inner tubes being arranged in the outer tube, the plurality of inner tubes being arranged in one or more ring structures around, and at least partially defining, an aperture (302) extending through the elongate body along an axial dimension of the elongate body, a boundary of the aperture defining an internal surface of the manufacturing intermediate. The method further comprises etching the internal surface of the manufacturing intermediate using an etching substance, and drawing the manufacturing intermediate along the axial dimension so as to form the optical fiber.
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公开(公告)号：WO2022233547A1
公开(公告)日：2022-11-10
申请号：PCT/EP2022/059799
申请日：2022-04-12
Applicant: ASML NETHERLANDS B.V.
Inventor： UEBEL, Patrick, Sebastian , PONGERS, Willem, Richard , SMEETS, Ralph, Jozef, Johannes, Gerardus, Anna, Maria , ABDOLVAND, Amir , PUTHANKOVILAKAM, Krishnaparvathy
Abstract: In this document a monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element comprising: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards and output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and comprising transversally arranged micro-structures configured to provide non-linear optical behaviour to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, characterized in that the supporting region has a transversal dimension which is sufficiently large to render said at least part of the optical element substantially rigid.
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公开(公告)号：WO2022028812A1
公开(公告)日：2022-02-10
申请号：PCT/EP2021/069252
申请日：2021-07-12
Applicant: ASML NETHERLANDS B.V.
IPC: G02B6/02 , C03B37/027
Abstract: Disclosed is a method of processing an out-coupling end of a hollow core fiber comprising a plurality of anti-resonance elements (ARE) surrounding a hollow core, and a hollow core fiber having been so processed. The method comprises performing a tapering step to form a taper in the anti-resonance elements (ARE); performing a cleaving step at said taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step comprising further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.
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