公开(公告)号：WO2021054829A1

公开(公告)日：2021-03-25

申请号：PCT/NL2020/050578

申请日：2020-09-18

Applicant: BERKIN B.V.

Inventor： SPARREBOOM, Wouter ,  GROENESTEIJN, Jarno ,  VAN PUTTEN, Jack Herman ,  DE BOER, Meint Jelle ,  WIEGERINK, Remco John ,  VELTKAMP, Henk-Willem ,  YU, Qihui ,  YARIESBOUEI, Mahdieh ,  RODRIGUEZ OLGUIN, Miguel A. ,  LÖTTERS, Joost Conrad

IPC: B81C1/00

Abstract: The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

公开(公告)号：WO2022240288A1

公开(公告)日：2022-11-17

申请号：PCT/NL2022/050255

申请日：2022-05-10

Applicant: BERKIN B.V.

Inventor： GROENESTEIJN, Jarno ,  DE JONGE, Natasja ,  KATIER, Rick John ,  LÖTTERS, Joost Conrad ,  RENSEN, Quinten Johannes ,  SPARREBOOM, Wouter ,  TIEBOUT, David Roelof Ephraïm

IPC: G01F1/684 ,  G01F1/84 ,  G01F15/18 ,  G01F1/48 ,  G01F1/6845 ,  G01F1/8445

Abstract: The invention relates to a device (1) for controlling or measuring a fluid, comprising: - a base part (2); - a microfabricated part (3) for measuring, controlling or regulating a fluid; - an inlet flow channel (4), extending from a flow inlet (34) in the base part to a flow inlet (5) of the microfabricated part; and - an outlet flow channel (6), extending from a flow outlet (7) of the microfabricated part to a flow outlet (35) in the base part, characterized in that - the base part (2) and the microfabricated part (3) are separated by an intermediate layer (8), wherein the intermediate layer is attached to the base part via a first attachment means (11) and attached to the microfabricated part via a second attachment means (12).

公开(公告)号：WO2021054830A1

公开(公告)日：2021-03-25

申请号：PCT/NL2020/050579

申请日：2020-09-18

Applicant: BERKIN B.V. ,  STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN ,  UNIVERSITEIT TWENTE

Inventor： ZHAO, Yiyuan ,  VELTKAMP, Henk-Willem ,  SCHUT, Thomas Victor Paul ,  DE BOER, Meint Jelle ,  WIEGERINK, Remco John ,  GROENESTEIJN, Jarno ,  LÖTTERS, Joost Conrad

IPC: B81C1/00

Abstract: A method for manufacturing a pair of parallel micro machined channels, using a substrate of a first material and comprising the steps of: - forming two primary perforations in said substrate, spaced apart from each other by a distance that is larger than a width of the channels to be formed; - forming two channel outlines in said substrate, the two channel outlines being spaced apart from each other; - filling the outer circumferential surface of the two channel outlines with a second material, to form said first micro machined channel and said second micro machined channel; - forming two secondary perforations in said substrate, at positions radially outside of the micro machined channels formed in the previous step; - forming two ducts in said substrate, while ensuring that some of the substrate-forming first material remains present between the channels.

公开(公告)号：WO2020153835A1

公开(公告)日：2020-07-30

申请号：PCT/NL2020/050026

申请日：2020-01-20

Applicant: BERKIN B.V.

Inventor： GROENESTEIJN, Jarno ,  LÖTTERS, Joost Conrad ,  SCHUT, Thomas Victor Paul ,  WIEGERINK, Remco John

IPC: G01F1/84

Abstract: The invention relates to a micro-Coriolis mass flow sensor, comprising a Coriolis tube having a fixed inlet and a fixed outlet, being fixed in tube fixation means, excitation means for oscillating the Coriolis tube about an excitation axis, detection means (8) for detecting, in use, at least a measure for movements of part of the Coriolis tube, characterized by the detection means (8) comprising one or more strain measurement devices (9, 11) configured for resistive readout being arranged in or on the Coriolis tube.

公开(公告)号：WO2019143239A1

公开(公告)日：2019-07-25

申请号：PCT/NL2019/050021

申请日：2019-01-16

Applicant: BERKIN B.V.

Inventor： LOTTERS, Joost Conrad ,  GROENESTEIJN, Jarno ,  STEENWELLE , Ruud Johannes Antonius ,  WIEGERINK, Remco John ,  ALVERINGH, Dennis ,  MA, Kechun ,  ZENG, Yaxiang

IPC: G01F1/84

Abstract: The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube with at least two ends being fixed in a tube fixation means, wherein the flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the detection means comprise two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

公开(公告)号：WO2017123089A1

公开(公告)日：2017-07-20

申请号：PCT/NL2017/050014

申请日：2017-01-13

Applicant: BERKIN B.V.

Inventor： LÖTTERS, Joost Conrad ,  GROENESTEIJN, Jarno ,  SANDERS, Remco Gerardus Petrus ,  WIEGERINK, Remco John

IPC: G01F1/84

CPC classification number: G01F1/8445 ,  G01F1/8427 ,  G01F1/849

Abstract: The invention relates to a Coriolis flow sensor, comprising at least a Coriolis–tube, wherein the flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the detection means comprise two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

Abstract translation: 本发明涉及科里奥利流量传感器，其至少包括科里奥利管，其中流量传感器包括用于使管振荡的激励装置以及用于检测至少一个测量值的检测装置 操作过程中部分管子的位移。 根据本发明，检测装置包括位于科里奥利管两侧的两个检测元件，其中检测元件部分地彼此重叠。

公开(公告)号：WO2016056902A1

公开(公告)日：2016-04-14

申请号：PCT/NL2015/050698

申请日：2015-10-05

Applicant: BERKIN B.V.

Inventor： LÖTTERS, Joost Conrad ,  GROENESTEIJN, Jarno ,  LAMMERINK, Theodorus Simon Josef ,  WIEGERINK, Remco John ,  VAN DER WOUDEN, Egbert Jan ,  SPARREBOOM, Wouter

IPC: G01N33/22

CPC classification number: G01N33/0036 ,  G01N33/225

Abstract: The invention relates to a method and a system for determining the fractions of a flowing gaseous medium that comprises a known plurality N of known components. The method comprises the steps for determining at least N-1 parameters of a flowing gaseous medium. The N-1 parameters are chosen from a group of quantities comprising mass flow, density, viscosity, and heat capacity. At least N-1 reference values are provided for each of the known N components relating to each of the determined N-1 quantities. The fraction of each of the known components of the supplied gaseous medium is determined through solving of at least N equations. The N equations comprise N-1 equations which describe each determined parameter as a function of the fraction and the reference values, plus an equation that sets the sum of the fractions so as to be equal to 100%.

Abstract translation: 本发明涉及一种用于确定流动气体介质的分数的方法和系统，其包括已知的多个已知组分。 该方法包括用于确定流动气体介质的至少N-1个参数的步骤。 N-1参数选自包括质量流量，密度，粘度和热容量的一组数量。 对于与所确定的每个N-1量相关的已知N个分量，至少提供了N-1个参考值。 通过求解至少N个方程来确定所提供的气体介质的每个已知组分的分数。 N个方程包括描述作为分数和参考值的函数的每个确定的参数的N-1等式，以及将分数之和设置为等于100％的等式。