公开(公告)号：WO2004023521A3

公开(公告)日：2004-10-14

申请号：PCT/US0327267

申请日：2003-08-29

Applicant: CREDENCE SYSTEMS CORP ,  DESPLATS ROMAIN ,  PERDU PHILIPPE

Inventor： DESPLATS ROMAIN ,  PERDU PHILIPPE ,  LE COUPANEC PATRICIA ,  LO WILLIAM K ,  KASAPI STEVEN

IPC: G01R31/311 ,  G01R31/302

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A method (Figure 2) for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions (200). After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor (230). After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

Abstract translation: 一种用于分析光子发射数据以区分由晶体管发射的光子和由背景源发射的光子的方法（图2）。 分析涉及光子发射的空间和/或时间相关性（200）。 在相关之后，分析还可以包括获得相关光子由晶体管（230）发射的可能性。 在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。 在一些情况下，重量反映了光子被晶体管发射的可能性。 该分析还可以包括自动识别光子发射图像中的晶体管。

公开(公告)号：WO2007136681A3

公开(公告)日：2008-05-15

申请号：PCT/US2007011790

申请日：2007-05-17

Applicant: CREDENCE SYSTEMS CORP ,  WOODS GARY ,  KASAPI STEVEN ,  WILSHER KENNETH

Inventor： WOODS GARY ,  KASAPI STEVEN ,  WILSHER KENNETH

IPC: G01B9/02

CPC classification number: G01R31/308

Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

Abstract translation: 提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于 检测反射光束，收集信号处理电子元件。 该系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。 在替代实施例中，激光是CW，并且调制被应用于光学检测器。

公开(公告)号：WO2007117618A2

公开(公告)日：2007-10-18

申请号：PCT/US2007008607

申请日：2007-04-05

Applicant: CREDENCE SYSTEMS CORP ,  KASAPI STEVEN ,  WOODS GARY LEONARD

Inventor： KASAPI STEVEN ,  WOODS GARY LEONARD

IPC: G01R23/16

CPC classification number: G01R29/26 ,  G01R31/2882 ,  G01R31/311 ,  G01R31/31709 ,  G01R31/31725

Abstract: Time-resolved emission can be used to measure loop-synchronous, small-signal voltage perturbation in integrated circuits. In this technique the measurements are completely non-invasive and so reflect the true device behavior. The time-dependant propagation delay caused by Vdd modulation also shows the expected qualitative signature. This technique should find applications in circuits with relatively fast clock-like circuits where loop-synchronous voltage pickup is limiting circuit behavior.

Abstract translation: 时间分辨发射可用于测量集成电路中的环路同步，小信号电压扰动。 在这种技术中，测量是完全无创的，因此反映了真实的设备行为。 由Vdd调制引起的时间依赖传播延迟也显示了预期的定性特征。 这种技术应该在具有相对较快时钟的电路的电路中找到应用，其中环路同步电压拾取是限制电路行为的。