公开(公告)号：WO2004079043A3

公开(公告)日：2004-09-16

申请号：PCT/US2004/005526

申请日：2004-02-25

Applicant: CREE, INC.

Inventor： NAKAMURA, Shuji ,  DENBAARS, Steven ,  BATRES, Max ,  COULTER, Michael

IPC: C23C16/458

Abstract: The present invention discloses a susceptor mounting assembly for holding semiconductor wafers in an MOCVD reactor during growth of epitaxial layers on the wafers, that is particularly adapted for mounting a susceptor in an inverted type reactor chamber. It includes a tower (44) having an upper and lower end (45, 43) with the upper end (45) mounted to the top inside surface of the reactor chamber (162) and a susceptor (52) is arranged at the tower's lower end (43). Semiconductor wafers (68) are held adjacent to the susceptor (52) such that heat from the susceptor (52) passes into wafers (68). A second embodiment of a susceptor mounting assembly according to the invention also comprises a tower (104) having an upper and lower end (103, 108). The tower's upper end (103) is mounted to the top inside surface of the reactor chamber (162). A susceptor (110) is housed within a cup (106) and the cup (106) is mounted to the tower's lower end (108).