公开(公告)号：WO2015077030A1

公开(公告)日：2015-05-28

申请号：PCT/US2014/064199

申请日：2014-11-06

Applicant: EASTMAN KODAK COMAPNY

Inventor： WEXLER, Allan ,  BENNETT, Grace, Ann ,  LINDNER, Kimberly, S.

IPC: C09D201/02 ,  C09D133/06 ,  C09D133/14 ,  G03F7/039 ,  C23C18/04 ,  C23C18/06

CPC classification number: C08F212/14 ,  C09D133/068 ,  C09D133/14 ,  C09D201/025 ,  C23C18/04 ,  C23C18/06 ,  C23C18/1608 ,  C23C18/1612 ,  C23C18/204 ,  C23C18/206 ,  C23C18/285 ,  C23C18/30 ,  G03F7/0045 ,  G03F7/038 ,  G03F7/039 ,  Y10T428/265

Abstract: Crosslinkable reactive polymers comprise -A- and -B- recurring units, arranged randomly along a backbone. The -A- recurring units comprise pendant aromatic sulfonic acid oxime ester groups that are capable of providing pendant aromatic sulfonic acid groups upon irradiation with radiation having a λ max of at least 150 nm and up to and including 450 nm. The -A- recurring units are present in the reactive polymer in an amount of greater than 50 mol % and up to and including 98 mol % based on total reactive polymer recurring units. The -B- recurring units comprise pendant groups that provide crosslinking upon generation of the aromatic sulfonic acid groups in the -A- recurring units. The -B- recurring units are present in an amount of at least 2 mol %, based on total reactive polymer recurring units. These reactive polymers can be used in various pattern-forming methods.

Abstract translation: 可交联的反应性聚合物包含沿着骨架随机排列的-A-和-B-重复单元。 -A-重复单元包括侧链芳族磺酸肟酯基团，其能够在辐射时具有至少150nm且高达并包括450nm的λmax的辐射时提供侧链芳族磺酸基团。 基于总反应性聚合物重复单元，-A-重复单元以大于50mol％且高达并包括98mol％的量存在于反应性聚合物中。 -B重复单元包括在-A-重复单元中产生芳族磺酸基团时提供交联的侧基。 基于总反应性聚合物重复单元，-B重复单元的存在量为至少2mol％。 这些反应性聚合物可以用于各种图案形成方法。